215581 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser Details of the driver electronics and electric discharge circuits
PULSE LASER POWER SOURCE, PULSE LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH
#3LASER DEVICE, LASER CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#4GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#5TIME IMPARTING METHOD AND LASER APPARATUS
#6METHOD FOR IGNITING AND SUPPLYING A LASER OR PLASMA WITH POWER, AND PLASMA OR LASER SYSTEM
#7GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#8GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#9PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET
#10ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PULSE OF THE PULSED OUTPUT LIGHT BEAM
#11GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#12PULSED POWER CIRCUITS USING HYBRID NON-LINEAR MAGNETIC MATERIALS AND INDUCTORS INCORPORATING THE SAME
#13GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#14Electrical pulse compression circuit
#15DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTROL AND REDUCED POWER CONSUMPTION
#16APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH
#17Light emitting unit and light source device
#18High-voltage pulse generator, gas laser apparatus, and method for manufacturing electronic device
#19High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method
#20Radio-frequency excited gas laser
#21GAS LASER DEVICE
#22Control device and control method for controlling laser oscillator
#23Folded slab laser
#24Dental laser system and treatment method
#25Online calibration for repetition rate dependent performance variables
#26Excimer laser apparatus and method for manufacturing electronic device
#27Capacitor cooling structure and laser apparatus
#28Folded slab laser
#29HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
#30Laser doping apparatus and laser doping method
#31Laser apparatus and laser processing system
#32Laser device and extreme ultraviolet light generation device using delay determination at a shutter
#33Laser apparatus
#34GAS LASER DEVICE
#35LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
#36Excimer laser apparatus
#37Generating plasma or laser pulses by radiofrequency excitation pulses
#38Laser system
#39Excimer laser device
#40Laser unit and non-transitory computer-readable storage medium
#41Laser system
#42Online calibration for repetition rate dependent performance variables
#43LASER DOPING APPARATUS AND LASER DOPING METHOD
#44HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
#45PULSE POWER MODULE
#46Dielectric electrode assembly and method of manufacture thereof
#47Laser apparatus and extreme ultraviolet light generation system
#48LASER RESONATOR WITH PARASITIC MODE SUPPRESSION
#49Impedance matching in a gas-laser excitation arrangement
#50Gas-laser excitation
#51Gas laser oscillator having auxiliary electrodes
#52Laser apparatus, EUV light generation system, and method of controlling laser apparatus
#53Laser system
#54Gas laser device and condenser
#55Laser chamber
#56Excimer laser apparatus and excimer laser system
#57Laser chamber
#58Laser unit and non-transitory computer-readable storage medium
#59Split voltage supply configuration with matched input load for single ended drivers
#60GAS-DISCHARGE LASER POWER AND ENERGY CONTROL
#61Systems and methods for supplying power to and cooling dental laser systems
#62Gas laser oscillator capable of estimating sealability of gas container
#63Powerful pulsed self-seeding COlaser
#64Laser machining apparatus changing operation based on length of power-down time
#65FABRICATION OF CAPACITIVE DISCHARGE ELECTRODES FOR A RING LASER GYROSCOPE
#66LASER EXCITATION PULSING SYSTEM
#67Gas laser system re-activatable without any damage within short time during recovery of power supply
#68Gas laser system capable of maintaining laser gas state during power supply cutoff
#69Laser apparatus
#70Impedance matching system for slab type lasers
#71Laser apparatus and method of controlling laser apparatus
#72Excimer laser apparatus and excimer laser system
#73Gas laser oscillator having function to determine initiation of electric discharge
#74Laser processing apparatus carrying out control to reduce consumed power
#75Gas laser oscillator having function of judging start of discharge
#76Gas laser oscillator with discharge start judgment function
#77Output-power control apparatus for a COgas-discharge laser
#78Multiple phase-locked loops for high-power RF-power combiners
#79Excimer laser apparatus and excimer laser system
#80Apparatus and method for balancing combined RF power-supplies for driving a COgas-discharge laser
#81Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus
#82Command apparatus in a gas laser oscillator, capable of command at high speed and with high precision
#83Pulsed laser source with high repetition rate
#84Impedance-matching transformers for RF driven COgas discharge lasers
#85High-precision synchronization of pulsed gas-discharge lasers
#86Laser tube with distributed taps for a gas discharge RF-excited laser
#87Gas laser discharge pre-ionization using a simmer-discharge
#886 KHz and above gas discharge laser system
#89Impedance-matching circuits for multi-output power supplies driving COgas-discharge lasers
#90Laser oscillator control device
#91High-precision synchronization of pulsed gas-discharge lasers
#92IMPEDANCE-MATCHING TRANSFORMERS FOR RF DRIVEN CO2 GAS DISCHARGE LASERS
#93GAS LASER DEVICE
#94Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
#95Dental laser system and treatment method
#96COlaser output power control during warm-up
#97Pre-ionization method for COgas-discharge laser
#98Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser
#99Dental laser system using midrange gas pressure
#100Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
#101Multi-chamber gas discharge laser bandwidth control through discharge timing
#102Electromagnetically pumped alkali metal vapor cell system
#103Frequency-agile RF-power excitation for driving diffusion-cooled sealed-off, RF-excited gas lasers
#1046K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
#105Diffusion-cooled COlaser with flexible housing
#106RF shielded, series inductor, high RF power impedance matching interconnector for COslab laser
#107Recording device
#108COLPITTS RF POWER OSCILLATOR FOR A GAS DISCHARGE LASER
#109Laser tube with external adjustable reactance for a gas discharge RF-excited laser
#110Laser
#111SOLID-STATE MICROSECOND CAPACITANCE CHARGER FOR HIGH VOLTAGE AND PULSED POWER
#112Power combiner
#113Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator
#114RF-EXCITED GAS LASER WITH DC BIAS AND METHODS OF MANUFACTURING AND USING
#115Method and arrangement for the excitation of a gas laser arrangement
#116Laser device for exposure device
#117Anodes for fluorine gas discharge lasers
#118Matched impedance controlled avalanche driver
#1196K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
#120Laser oscillator
#121Cathodes for fluorine gas discharge lasers
#122Timing control for two-chamber gas discharge laser system
#123Two-stage laser pulse energy control device and two-stage laser system
#124Injection locking type or MOPA type of laser device
#125Hybrid electrode support bar
#126Gas discharge laser output light beam parameter control
#1276 Khz and above gas discharge laser system
#128Control system for a two chamber gas discharge laser
#129Very high repetition rate narrow band gas discharge laser system
#130Multi-chamber gas discharge laser bandwidth control through discharge timing
#131Dual pulse-width medical laser with presets
#132Very narrow band, two chamber, high rep-rate gas discharge laser system
#133Exciting laser resonators with RF energy
#134Injection locking type or MOPA type of laser device
#135Very narrow band, two chamber, high rep-rate gas discharge laser system
#136Control system for a two chamber gas discharge laser
#137Very high repetition rate narrow band gas discharge laser system
#138Laser unit
#139Matched impedance controlled avalanche driver
#140Q-switched CO2 laser for material processing
#141Excimer or molecular fluorine laser system with precision timing
#142Timing control for two-chamber gas discharge laser system
#143Discharge laser with porous insulating layer covering anode discharge surface
#144Low-pressure axial direction excitation type Flaser oscillator
#145Pulser driven, helium free transversely excited atmospheric-pressure (TEA) CO2 laser
#146Water-cooled carbon-dioxide laser
#147Linear remote plasma source