215584 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
Sub-classes:Optical element for a deep ultraviolet light source
#2High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method
#3PROLONGED LIFE LASER CHAMBER ELECTRODE AND LASER HAVING SAME
#4METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE
#5GAS LASER DEVICE
#6Radio frequency slab laser
#7Laser source device, extreme ultraviolet lithography device and method
#8Capacitor cooling structure and laser apparatus
#9Solid-state laser device, solid-state laser system, and laser device for exposure device
#10Laser apparatus and laser processing system
#11Gas optimization in a gas discharge light source
#12Laser apparatus
#13Laser device
#14Polarisation and mode selection technique for a laser
#15LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
#16Wavelength measuring device
#17Multilayer electrode assembly
#18Generating plasma or laser pulses by radiofrequency excitation pulses
#19Laser unit
#20Laser unit and non-transitory computer-readable storage medium
#21Laser crystallization device
#22Gas optimization in a gas discharge light source
#23Impedance matching in a gas-laser excitation arrangement
#24Gas-laser excitation
#25Erosion resistant electrodes for use in generating gas discharge laser
#26Gas laser device and control method therefor
#27Gas laser oscillation device
#28Wavelength stabilization for an optical source
#29Laser unit and non-transitory computer-readable storage medium
#30Gas laser oscillation apparatus of orthogonal excitation type
#31Laser amplifier, laser apparatus, and extreme ultraviolet light generating system
#32Compensation for a disturbance in an optical source
#33Systems and methods for supplying power to and cooling dental laser systems
#34Gas laser device
#35Gas circulation type laser oscillator
#36Laser chamber and discharge excitation gas laser apparatus
#37Air-cooled gas lasers with heat transfer resonator optics and associated systems and methods
#38Air-cooled gas lasers and associated systems and methods
#39Air-cooled gas lasers with heat transfer assembly and associated systems and methods
#40Impedance matching system for slab type lasers
#41Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier
#42Laser apparatus and method of controlling laser apparatus
#43Laser apparatus and method of controlling laser apparatus
#44Gas lasers including heat exchangers
#45Laser apparatus and extreme ultraviolet light generation system
#46COlaser device and COlaser processing device
#47Marking device for marking an object with marking light
#48Gas laser device
#49Corrosion resistant electrodes for laser chambers
#50Laser beam amplifier and laser apparatus using the same
#51Apparatus and method for balancing combined RF power-supplies for driving a COgas-discharge laser
#52Pulsed laser source with high repetition rate
#53Laser apparatus
#54Laser tube with distributed taps for a gas discharge RF-excited laser
#55Extendable electrode for gas discharge laser
#56Configuration for Multiwavelength Emission with a CO2 Laser
#57Ceramic gas laser having an integrated beam shaping waveguide
#58RF-excited laser assembly
#59Gas laser
#60Gas laser oscillator apparatus and gas laser machining apparatus
#61Gas laser oscillator having function for judging discharge initiation
#62Laser device that stably controls very low laser power
#63COlaser output power control during warm-up
#64EXCIMER LASER DEVICE
#65Extendable electrode for gas discharge laser
#66Microchannel laser having microplasma gain media
#67Laser beam amplifier and laser apparatus using the same
#68Radio frequency excited gas laser source
#69Laser Discharge Tube Assembly for a Gas Laser and Production Method for the Same
#70Slab type laser apparatus
#71RF shielded, series inductor, high RF power impedance matching interconnector for COslab laser
#72COLPITTS RF POWER OSCILLATOR FOR A GAS DISCHARGE LASER
#73High power low inductance RF hermetic sealed feed-through for slab CO2 lasers
#74Power combiner
#75RF-EXCITED GAS LASER WITH DC BIAS AND METHODS OF MANUFACTURING AND USING
#76Method and arrangement for the excitation of a gas laser arrangement
#77RF laser
#78Laser device for exposure device
#79Dielectric barrier discharge excimer light source
#80Dielectric barrier discharge excimer light source
#81Dielectric barrier diescharge excimer light source
#82Optical mounting scheme for waveguide lasers and waveguide laser incorporating the same
#83Method for operating a vacuum plasma process system
#84Excimer laser device
#85Extendable electrode for gas discharge laser
#86Dielectric Barrier Discharge Excimer Light Source
#87Laser system
#88Waveguide laser having reduced cross-sectional size and/or reduced optical axis distortion
#89Gas discharge laser light source beam delivery unit
#90Line narrowed laser apparatus
#91Acoustic shock-wave damping in pulsed gas-laser discharge
#92Laser oscillator
#93Cathodes for fluorine gas discharge lasers
#94Timing control for two-chamber gas discharge laser system
#95Control system for a two chamber gas discharge laser
#96Excimer laser with electron emitters
#97Very narrow band, two chamber, high rep-rate gas discharge laser system
#98Laser gas replenishment method
#99Dielectric coupled COslab laser
#100Very narrow band, two chamber, high rep-rate gas discharge laser system
#101Control system for a two chamber gas discharge laser
#102Gas discharge laser chamber improvements
#103Gas discharge MOPA laser spectral analysis module
#104Multi-path laser system
#105Method and device for coherence reduction
#106One dimensional all-metal slab waveguide gas laser
#107Laser spectral engineering for lithographic process
#108System and method for segmented electrode with temporal voltage shifting
#109Halogen gas discharge laser electrodes
#110Gas discharge MOPA laser spectral analysis module
#111Laser spectral engineering for lithographic process
#112Optical elements with protective undercoating
#113Timing control for two-chamber gas discharge laser system
#114Radio frequency laser