215589 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser having auxiliary ionisation means
Sub-classes:LASER CHAMBER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#3Excimer laser chamber device
#4Preliminary ionization discharge device and laser apparatus
#5Slab gas laser with pre-ionizing cell
#6Matched impedance controlled avalanche driver
#7Capillary discharge x-ray laser
#8Pre-ionizer for RF-energized gas laser
#9Matched impedance controlled avalanche driver