215611 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
APPARATUS FOR AND METHOD OF CONTROL FOR SPECTRUM SEPARATION
#2APPARATUS FOR AND METHOD OF CONDITIONING LIGHT SOURCE AFTER IDLE PERIOD
#3GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNIQUES
#4METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER SYSTEMS
#5Gaseous laser systems with edge-defining element and related techniques
#6LASER POWER CONTROL
#7REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER
#8Gaseous laser systems with edge-defining element and related techniques
#9Methods and systems for aligning master oscillator power amplifier systems
#10LINE NARROWING GAS LASER DEVICE, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#11DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTROL AND REDUCED POWER CONSUMPTION
#12PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHARGE CHAMBERS
#13GAS CONTROL METHOD AND RELATED USES
#14LASER PROCESSING METHOD OF PRINTED CIRCUIT BOARD AND LASER PROCESSING MACHINE FOR PRINTED CIRCUIT BOARD
#15Excimer laser system with long service intervals
#16LASER LIGHT ENERGY AND DOSE CONTROL USING REPETITION RATE BASED GAIN ESTIMATORS
#17Residual gain monitoring and reduction for EUV drive laser
#18GAS LASER DEVICE
#19Excimer laser apparatus and electronic-device manufacturing method
#20Gas laser apparatus
#21Residual gain monitoring and reduction for EUV drive laser
#22Laser apparatus
#23Laser gas regeneration system and laser system
#24Gas optimization in a gas discharge light source
#25Laser apparatus
#26Methods and systems for aligning master oscillator power amplifier systems
#27GAS LASER DEVICE
#28System and method for generating extreme ultraviolet light
#29Systems and methods for spatiotemporal control of a laser and applications of same
#30LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
#31GAS LASER APPARATUS
#32Gas laser apparatus
#33Gas laser apparatus
#34GAS LASER APPARATUS
#35System and method for generating extreme ultraviolet light
#36GAS LASER APPARATUS
#37Laser apparatus and extreme ultraviolet light generating system
#38Laser light energy and dose control using repetition rate based gain estimators
#39Laser machining device
#40Laser system
#41LASER GAS PURIFYING SYSTEM
#42Laser unit
#43System and method for generating extreme ultraviolet light
#44AMPLIFIER AND LASER SYSTEM
#45System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#46Laser unit and non-transitory computer-readable storage medium
#47Laser system
#48Laser apparatus and measurement unit
#49Gas laser apparatus
#50System and method for automatic gas optimization in a two-chamber gas discharge laser system
#51Gas optimization in a gas discharge light source
#52Laser oscillation device having laser medium circulating tube
#53Pulsed light beam spectral feature control
#54Gas laser oscillator having auxiliary electrodes
#55Laser oscillator comprising heat exchanger having function of collecting foreign matters
#56Laser apparatus, EUV light generation system, and method of controlling laser apparatus
#57Laser system
#58System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#59System and method for generating extreme ultraviolet light
#60Gas laser oscillation device
#61Temperature controllable gas laser oscillator
#62Gas laser apparatus
#63Laser unit and non-transitory computer-readable storage medium
#64Laser oscillator provided with blower
#65Compensation for a disturbance in an optical source
#66Systems and methods for supplying power to and cooling dental laser systems
#67System and method for generating extreme ultraviolet light
#68Gas laser device having function for discriminating type of alarm
#69Method of controlling a radiation source and lithographic apparatus comprising the radiation source
#70LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR
#71Gas laser oscillator capable of estimating sealability of gas container
#72Powerful pulsed self-seeding COlaser
#73Laser oscillator provided with blower
#74Gas circulation type laser oscillator
#75Laser machining apparatus changing operation based on length of power-down time
#76Laser chamber and discharge excitation gas laser apparatus
#77Catalytic conversion of an optical amplifier gas medium
#78Laser apparatus
#79Oxygen laser oscillator
#80Systems and methods to more accurately estimate a fluorine concentration in a source laser
#81Generation of VUV, EUV, and X-ray Light Using VUV-UV-VIS Lasers
#82Laser apparatus and extreme ultraviolet light generation system
#83LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
#84Laser processing apparatus carrying out control to reduce consumed power
#85Lasing device
#86Gas laser oscillator with discharge start judgment function
#87Metal vapor circulating system
#88Pulsed COlaser output-pulse shape and power control
#89System and method for extending gas life in a two chamber gas discharge laser system
#90Master oscillator system and laser apparatus
#91Gas laser apparatus equipped with power calculation unit
#92System and method for automatic gas optimization in a two-chamber gas discharge laser system
#93System and method for generating extreme ultraviolet light
#94Laser system and laser light generation method
#95Laser tube with distributed taps for a gas discharge RF-excited laser
#96Remotely induced atmospheric lasing
#97Gas laser oscillator apparatus and gas laser machining apparatus
#98Laser oscillator and laser machining apparatus
#99GAS LASER DEVICE
#100High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers
#101Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser
#102Electromagnetically pumped alkali metal vapor cell system
#103Method and apparatus for laser control in a two chamber gas discharge laser
#104Method and apparatus for laser control in a two chamber gas discharge laser
#105Method and apparatus for laser control in a two chamber gas discharge laser
#106Impurity removing apparatus and method of operating the same
#107High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers
#108LASER LIGHT SOURCE CONTROL METHOD, LASER LIGHT SOURCE DEVICE, AND EXPOSURE APPARATUS
#109Laser unit having preparatory function for activating the unit and activation method for the unit
#110Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator
#111Gas laser apparatus, and method and device for monitoring blower
#112Output energy control for lasers
#113Gas laser oscillator and method of measuring laser gas replacement amount
#114Gas discharge laser light source beam delivery unit
#115Controlling the spatio-temporal uniformity of a pulsed gas laser beam
#116LASER PROCESSING DEVICE
#117Laser oscillator
#118Gas laser apparatus
#119Two-stage laser pulse energy control device and two-stage laser system
#120Very high repetition rate narrow band gas discharge laser system
#121Dual pulse-width medical laser with presets
#122Very narrow band, two chamber, high rep-rate gas discharge laser system
#123Very narrow band, two chamber, high rep-rate gas discharge laser system
#124Very high repetition rate narrow band gas discharge laser system
#125Method and apparatus for controlling the output of a gas discharge laser system
#126Gas discharge MOPA laser spectral analysis module
#127Laser spectral engineering for lithographic process
#128Gas discharge MOPA laser spectral analysis module
#129Laser spectral engineering for lithographic process
#130Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
#131Optical elements with protective undercoating
#132Trichel pulse energy devices
#133Compensation for a disturbance in an optical source