ClassID:

215611

H01S3/104 - CPC Classification

Classification description:

Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers

Recent Application in this class:
#1
20260081397
2026-03-19

APPARATUS FOR AND METHOD OF CONTROL FOR SPECTRUM SEPARATION

#2
20250385480
2025-12-18

APPARATUS FOR AND METHOD OF CONDITIONING LIGHT SOURCE AFTER IDLE PERIOD

#3
20250174957
2025-05-29

GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNIQUES

#4
20240297476
2024-09-05

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER SYSTEMS

#5
20240170910
2024-05-23

Gaseous laser systems with edge-defining element and related techniques

#6
20240072508
2024-02-29

LASER POWER CONTROL

#7
20240039228
2024-02-01

REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER

#8
20230318251
2023-10-05

Gaseous laser systems with edge-defining element and related techniques

#9
20230208092
2023-06-29

Methods and systems for aligning master oscillator power amplifier systems

#10
20230064314
2023-03-02

LINE NARROWING GAS LASER DEVICE, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

#11
20230017337
2023-01-19

DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTROL AND REDUCED POWER CONSUMPTION

#12
20230008480
2023-01-12

PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHARGE CHAMBERS

#13
20220285902
2022-09-08

GAS CONTROL METHOD AND RELATED USES

#14
20220216665
2022-07-07

LASER PROCESSING METHOD OF PRINTED CIRCUIT BOARD AND LASER PROCESSING MACHINE FOR PRINTED CIRCUIT BOARD

#15
20220094133
2022-03-24

Excimer laser system with long service intervals

#16
20210328401
2021-10-21

LASER LIGHT ENERGY AND DOSE CONTROL USING REPETITION RATE BASED GAIN ESTIMATORS

#17
20210235572
2021-07-29

Residual gain monitoring and reduction for EUV drive laser

#18
20210167568
2021-06-03

GAS LASER DEVICE

#19
20200274315
2020-08-27

Excimer laser apparatus and electronic-device manufacturing method

#20
20200244029
2020-07-30

Gas laser apparatus

#21
20200146137
2020-05-07

Residual gain monitoring and reduction for EUV drive laser

#22
20190280451
2019-09-12

Laser apparatus

#23
20190237928
2019-08-01

Laser gas regeneration system and laser system

#24
20190190229
2019-06-20

Gas optimization in a gas discharge light source

#25
20190173259
2019-06-06

Laser apparatus

#26
20190157828
2019-05-23

Methods and systems for aligning master oscillator power amplifier systems

#27
20190148905
2019-05-16

GAS LASER DEVICE

#28
20190141826
2019-05-09

System and method for generating extreme ultraviolet light

#29
20190103720
2019-04-04

Systems and methods for spatiotemporal control of a laser and applications of same

#30
20190081451
2019-03-14

LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

#31
20190081450
2019-03-14

GAS LASER APPARATUS

#32
20190081449
2019-03-14

Gas laser apparatus

#33
20190074655
2019-03-07

Gas laser apparatus

#34
20190074654
2019-03-07

GAS LASER APPARATUS

#35
20190037677
2019-01-31

System and method for generating extreme ultraviolet light

#36
20190020167
2019-01-17

GAS LASER APPARATUS

#37
20180375283
2018-12-27

Laser apparatus and extreme ultraviolet light generating system

#38
20180309259
2018-10-25

Laser light energy and dose control using repetition rate based gain estimators

#39
20180301862
2018-10-18

Laser machining device

#40
20180191124
2018-07-05

Laser system

#41
20180191122
2018-07-05

LASER GAS PURIFYING SYSTEM

#42
20180123308
2018-05-03

Laser unit

#43
20180110116
2018-04-19

System and method for generating extreme ultraviolet light

#44
20180109065
2018-04-19

AMPLIFIER AND LASER SYSTEM

#45
20180097331
2018-04-05

System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system

#46
20180026414
2018-01-25

Laser unit and non-transitory computer-readable storage medium

#47
20180013258
2018-01-11

Laser system

#48
20170373461
2017-12-28

Laser apparatus and measurement unit

#49
20170288361
2017-10-05

Gas laser apparatus

#50
20170279240
2017-09-28

System and method for automatic gas optimization in a two-chamber gas discharge laser system

#51
20170237224
2017-08-17

Gas optimization in a gas discharge light source

#52
20170229833
2017-08-10

Laser oscillation device having laser medium circulating tube

#53
20170160638
2017-06-08

Pulsed light beam spectral feature control

#54
20170098918
2017-04-06

Gas laser oscillator having auxiliary electrodes

#55
20170077666
2017-03-16

Laser oscillator comprising heat exchanger having function of collecting foreign matters

#56
20170070024
2017-03-09

Laser apparatus, EUV light generation system, and method of controlling laser apparatus

#57
20170070023
2017-03-09

Laser system

#58
20170063016
2017-03-02

System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system

#59
20170019983
2017-01-19

System and method for generating extreme ultraviolet light

#60
20160336706
2016-11-17

Gas laser oscillation device

#61
20160254635
2016-09-01

Temperature controllable gas laser oscillator

#62
20160248215
2016-08-25

Gas laser apparatus

#63
20160248214
2016-08-25

Laser unit and non-transitory computer-readable storage medium

#64
20160240991
2016-08-18

Laser oscillator provided with blower

#65
20160161859
2016-06-09

Compensation for a disturbance in an optical source

#66
20160149369
2016-05-26

Systems and methods for supplying power to and cooling dental laser systems

#67
20160128172
2016-05-05

System and method for generating extreme ultraviolet light

#68
20160099534
2016-04-07

Gas laser device having function for discriminating type of alarm

#69
20160070179
2016-03-10

Method of controlling a radiation source and lithographic apparatus comprising the radiation source

#70
20150380893
2015-12-31

LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR

#71
20150372441
2015-12-24

Gas laser oscillator capable of estimating sealability of gas container

#72
20150349483
2015-12-03

Powerful pulsed self-seeding COlaser

#73
20150340836
2015-11-26

Laser oscillator provided with blower

#74
20150333469
2015-11-19

Gas circulation type laser oscillator

#75
20150290745
2015-10-15

Laser machining apparatus changing operation based on length of power-down time

#76
20150249312
2015-09-03

Laser chamber and discharge excitation gas laser apparatus

#77
20150222083
2015-08-06

Catalytic conversion of an optical amplifier gas medium

#78
20150194781
2015-07-09

Laser apparatus

#79
20150171591
2015-06-18

Oxygen laser oscillator

#80
20150138631
2015-05-21

Systems and methods to more accurately estimate a fluorine concentration in a source laser

#81
20150063385
2015-03-05

Generation of VUV, EUV, and X-ray Light Using VUV-UV-VIS Lasers

#82
20140348188
2014-11-27

Laser apparatus and extreme ultraviolet light generation system

#83
20140346375
2014-11-27

LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

#84
20140307751
2014-10-16

Laser processing apparatus carrying out control to reduce consumed power

#85
20140247855
2014-09-04

Lasing device

#86
20140064317
2014-03-06

Gas laser oscillator with discharge start judgment function

#87
20140023100
2014-01-23

Metal vapor circulating system

#88
20130272325
2013-10-17

Pulsed COlaser output-pulse shape and power control

#89
20130170516
2013-07-04

System and method for extending gas life in a two chamber gas discharge laser system

#90
20130064258
2013-03-14

Master oscillator system and laser apparatus

#91
20130039377
2013-02-14

Gas laser apparatus equipped with power calculation unit

#92
20130003773
2013-01-03

System and method for automatic gas optimization in a two-chamber gas discharge laser system

#93
20120307851
2012-12-06

System and method for generating extreme ultraviolet light

#94
20120250708
2012-10-04

Laser system and laser light generation method

#95
20120230362
2012-09-13

Laser tube with distributed taps for a gas discharge RF-excited laser

#96
20120170599
2012-07-05

Remotely induced atmospheric lasing

#97
20120051385
2012-03-01

Gas laser oscillator apparatus and gas laser machining apparatus

#98
20120006798
2012-01-12

Laser oscillator and laser machining apparatus

#99
20110243177
2011-10-06

GAS LASER DEVICE

#100
20110170571
2011-07-14

High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers

#101
20110085575
2011-04-14

Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser

#102
20100232460
2010-09-16

Electromagnetically pumped alkali metal vapor cell system

#103
20100098124
2010-04-22

Method and apparatus for laser control in a two chamber gas discharge laser

#104
20100098123
2010-04-22

Method and apparatus for laser control in a two chamber gas discharge laser

#105
20100098122
2010-04-22

Method and apparatus for laser control in a two chamber gas discharge laser

#106
20100086459
2010-04-08

Impurity removing apparatus and method of operating the same

#107
20090323743
2009-12-31

High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers

#108
20090201479
2009-08-13

LASER LIGHT SOURCE CONTROL METHOD, LASER LIGHT SOURCE DEVICE, AND EXPOSURE APPARATUS

#109
20080253416
2008-10-16

Laser unit having preparatory function for activating the unit and activation method for the unit

#110
20080144681
2008-06-19

Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator

#111
20080056325
2008-03-06

Gas laser apparatus, and method and device for monitoring blower

#112
20070213697
2007-09-13

Output energy control for lasers

#113
20070177649
2007-08-02

Gas laser oscillator and method of measuring laser gas replacement amount

#114
20070160103
2007-07-12

Gas discharge laser light source beam delivery unit

#115
20070133645
2007-06-14

Controlling the spatio-temporal uniformity of a pulsed gas laser beam

#116
20070030875
2007-02-08

LASER PROCESSING DEVICE

#117
20060280213
2006-12-14

Laser oscillator

#118
20060274806
2006-12-07

Gas laser apparatus

#119
20060239309
2006-10-26

Two-stage laser pulse energy control device and two-stage laser system

#120
20060209916
2006-09-21

Very high repetition rate narrow band gas discharge laser system

#121
20060142745
2006-06-29

Dual pulse-width medical laser with presets

#122
20060126697
2006-06-15

Very narrow band, two chamber, high rep-rate gas discharge laser system

#123
20050271109
2005-12-08

Very narrow band, two chamber, high rep-rate gas discharge laser system

#124
20050226300
2005-10-13

Very high repetition rate narrow band gas discharge laser system

#125
20050185690
2005-08-25

Method and apparatus for controlling the output of a gas discharge laser system

#126
20050174576
2005-08-11

Gas discharge MOPA laser spectral analysis module

#127
20050068997
2005-03-31

Laser spectral engineering for lithographic process

#128
20050046856
2005-03-03

Gas discharge MOPA laser spectral analysis module

#129
20050041701
2005-02-24

Laser spectral engineering for lithographic process

#130
20050030987
2005-02-10

Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method

#131
20050025882
2005-02-03

Optical elements with protective undercoating

#132
14799493
2017-05-16

Trichel pulse energy devices

#133
14565016
2016-02-16

Compensation for a disturbance in an optical source