Patents-Review.com
ClassID:

215661 ⎘

H01S3/134 - CPC Classification

Classification description:

Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating; Stabilisation of laser output parameters, e.g. frequency, amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers

Recent Application in this class:
#1
20250364774
2025-11-27

LASER APPARATUS, METHOD OF CONTROLLING LASER APPARATUS, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

 #2
20250293478
2025-09-18

CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #3
20240372313
2024-11-07

EXCIMER LASER WITH IMPROVED BEAM UNIFORMITY AND STABILITY

 #4
20240291226
2024-08-29

GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE

 #5
20240146011
2024-05-02

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #6
20240128706
2024-04-18

CONTROL METHOD OF DISCHARGE-EXCITATION TYPE LASER DEVICE, DISCHARGE-EXCITATION TYPE LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #7
20240111219
2024-04-04

WAVELENGTH CONTROL METHOD, LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

 #8
20230396033
2023-12-07

GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #9
20230318252
2023-10-05

CONTROL METHOD OF LASER SYSTEM, LASER SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #10
20230016894
2023-01-19

UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER

 #11
20220385029
2022-12-01

Line narrowed gas laser apparatus, control method therefor, electronic device manufacturing method

 #12
20220255288
2022-08-11

APPARATUS FOR AND METHOD OF GENERATING MULTIPLE LASER BEAMS

 #13
20220255286
2022-08-11

CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS

 #14
20220094133
2022-03-24

Excimer laser system with long service intervals

 #15
20210359487
2021-11-18

Control method and system for stabilizing excimer laser pulse energy

 #16
20210235572
2021-07-29

Residual gain monitoring and reduction for EUV drive laser

 #17
20210226407
2021-07-22

Gas monitoring system

 #18
20210167568
2021-06-03

GAS LASER DEVICE

 #19
20210028595
2021-01-28

Dark cavity laser

 #20
20210028594
2021-01-28

Control device and control method for controlling laser oscillator

 #21
20210021094
2021-01-21

Lithography system bandwidth control

 #22
20200403369
2020-12-24

Laser chamber, method for manufacturing seal member, and method for manufacturing electronic device

 #23
20200395733
2020-12-17

Laser oscillation device

 #24
20200388980
2020-12-10

Laser device, laser machining apparatus, and method for controlling output of laser device

 #25
20200366049
2020-11-19

LASER GAS MANAGEMENT SYSTEM, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND METHOD FOR CONTROLLING EXCIMER LASER SYSTEM

 #26
20200244032
2020-07-30

Excimer laser apparatus and method for manufacturing electronic device

 #27
20200146137
2020-05-07

Residual gain monitoring and reduction for EUV drive laser

 #28
20200136336
2020-04-30

Capacitor cooling structure and laser apparatus

 #29
20200067259
2020-02-27

Laser apparatus, laser apparatus management system, and laser apparatus management method

 #30
20190288478
2019-09-19

Laser apparatus and extreme ultraviolet light generation system

 #31
20190252846
2019-08-15

HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS

 #32
20190221985
2019-07-18

Optical processing apparatus, optical processing method, and optically-processed product production method

 #33
20190190229
2019-06-20

Gas optimization in a gas discharge light source

 #34
20190173259
2019-06-06

Laser apparatus

 #35
20190155170
2019-05-23

Lithography system bandwidth control

 #36
20190081451
2019-03-14

LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

 #37
20180375283
2018-12-27

Laser apparatus and extreme ultraviolet light generating system

 #38
20180351322
2018-12-06

Laser apparatus and extreme ultraviolet light generation system

 #39
20180348644
2018-12-06

Energy controller for excimer-laser silicon crystallization

 #40
20180337510
2018-11-22

EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION

 #41
20180323568
2018-11-08

Line narrowed laser apparatus

 #42
20180261973
2018-09-13

Excimer laser apparatus

 #43
20180241170
2018-08-23

Laser gas purifying system and laser system

 #44
20180233876
2018-08-16

Generating plasma or laser pulses by radiofrequency excitation pulses

 #45
20180212394
2018-07-26

Laser feedback control systems

 #46
20180198253
2018-07-12

Narrow band excimer laser apparatus

 #47
20180123312
2018-05-03

Line narrowed laser apparatus

 #48
20180123308
2018-05-03

Laser unit

 #49
20180102622
2018-04-12

Excimer laser device

 #50
20180052059
2018-02-22

Light beam measurement device, laser apparatus, and light beam separator

 #51
20180048109
2018-02-15

Excimer laser apparatus and excimer laser system

 #52
20180026414
2018-01-25

Laser unit and non-transitory computer-readable storage medium

 #53
20170279240
2017-09-28

System and method for automatic gas optimization in a two-chamber gas discharge laser system

 #54
20170237224
2017-08-17

Gas optimization in a gas discharge light source

 #55
20170229833
2017-08-10

Laser oscillation device having laser medium circulating tube

 #56
20170222391
2017-08-03

Narrow band laser apparatus

 #57
20170070024
2017-03-09

Laser apparatus, EUV light generation system, and method of controlling laser apparatus

 #58
20160365696
2016-12-15

Laser chamber

 #59
20160359291
2016-12-08

Gas laser device and control method therefor

 #60
20160322772
2016-11-03

Excimer laser apparatus and excimer laser system

 #61
20160308324
2016-10-20

Laser chamber

 #62
20160254634
2016-09-01

Excimer laser apparatus and excimer laser system

 #63
20160248214
2016-08-25

Laser unit and non-transitory computer-readable storage medium

 #64
20160240991
2016-08-18

Laser oscillator provided with blower

 #65
20160226213
2016-08-04

Gas laser apparatus for determining composition ratio of laser gas

 #66
20160190763
2016-06-30

Laser apparatus

 #67
20160161859
2016-06-09

Compensation for a disturbance in an optical source

 #68
20160076944
2016-03-17

Light beam measurement device, laser apparatus, and light beam separator

 #69
20150372441
2015-12-24

Gas laser oscillator capable of estimating sealability of gas container

 #70
20150340836
2015-11-26

Laser oscillator provided with blower

 #71
20150249312
2015-09-03

Laser chamber and discharge excitation gas laser apparatus

 #72
20150222083
2015-08-06

Catalytic conversion of an optical amplifier gas medium

 #73
20150222076
2015-08-06

Gas laser system re-activatable without any damage within short time during recovery of power supply

 #74
20150188274
2015-07-02

Method of controlling laser apparatus and laser apparatus

 #75
20150180192
2015-06-25

Laser apparatus and method of controlling laser apparatus

 #76
20150171591
2015-06-18

Oxygen laser oscillator

 #77
20150063397
2015-03-05

Gas laser resonator

 #78
20150003485
2015-01-01

Excimer laser apparatus and excimer laser system

 #79
20140348188
2014-11-27

Laser apparatus and extreme ultraviolet light generation system

 #80
20140341239
2014-11-20

Laser system and laser light generation method

 #81
20140247855
2014-09-04

Lasing device

 #82
20130202004
2013-08-08

Output-power control apparatus for a COgas-discharge laser

 #83
20130100980
2013-04-25

Excimer laser apparatus and excimer laser system

 #84
20130099140
2013-04-25

Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam

 #85
20120250710
2012-10-04

Laser system and laser light generation method

 #86
20120236885
2012-09-20

Laser device for exposure apparatus

 #87
20110249691
2011-10-13

Method and apparatus for controlling light bandwidth

 #88
20110243168
2011-10-06

Gas laser oscillator having function for judging discharge initiation

 #89
20110243165
2011-10-06

Laser device that stably controls very low laser power

 #90
20110235663
2011-09-29

Method and system for managing light source operation

 #91
20110182319
2011-07-28

COlaser output power control during warm-up

 #92
20110051761
2011-03-03

OPERATING METHOD OF EXCIMER LASER SYSTEM

 #93
20110051760
2011-03-03

Active spectral control of DUV laser light source

 #94
20100309939
2010-12-09

Multi-chamber gas discharge laser bandwidth control through discharge timing

 #95
20100232469
2010-09-16

METHOD AND APPARATUS FOR EFFICIENTLY OPERATING A GAS DISCHARGE EXCIMER LASER

 #96
20090201479
2009-08-13

LASER LIGHT SOURCE CONTROL METHOD, LASER LIGHT SOURCE DEVICE, AND EXPOSURE APPARATUS

 #97
20090067457
2009-03-12

Ultraviolet laser light source pulse energy control system

 #98
20080285602
2008-11-20

Narrow-spectrum laser device

 #99
20080253416
2008-10-16

Laser unit having preparatory function for activating the unit and activation method for the unit

 #100
20080240197
2008-10-02

METHOD AND APPARATUS FOR EFFICIENTLY OPERATING A GAS DISCHARGE EXCIMER LASER

 #101
20080205472
2008-08-28

Laser gas injection system

 #102
20080144681
2008-06-19

Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator

 #103
20080059096
2008-03-06

Electromagnetic Radiation Pulse Timing Control

 #104
20080043799
2008-02-21

Gas laser oscillator

 #105
20080023452
2008-01-31

CO2 laser stabilization systems and methods

 #106
20070297478
2007-12-27

Gas laser oscillator and gas laser beam machine

 #107
20070195836
2007-08-23

Active spectral control of DUV light source

 #108
20070160103
2007-07-12

Gas discharge laser light source beam delivery unit

 #109
20070147446
2007-06-28

Frequency stabilised gas laser

 #110
20070091973
2007-04-26

Injection locking Q-switched and Q-switched cavity dumped COlasers for extreme UV generation

 #111
20070047610
2007-03-01

High frequency discharge excited gas laser oscillator

 #112
20070030877
2007-02-08

Apparatus and method for monitoring power of a UV laser

 #113
20060251135
2006-11-09

Timing control for two-chamber gas discharge laser system

 #114
20060239322
2006-10-26

Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method

 #115
20060239309
2006-10-26

Two-stage laser pulse energy control device and two-stage laser system

 #116
20060239307
2006-10-26

Injection locking type or MOPA type of laser device

 #117
20060227839
2006-10-12

Gas discharge laser output light beam parameter control

 #118
20060176917
2006-08-10

COlaser stabilization systems and methods

 #119
20060146900
2006-07-06

Multi-chamber gas discharge laser bandwidth control through discharge timing

 #120
20060126697
2006-06-15

Very narrow band, two chamber, high rep-rate gas discharge laser system

 #121
20060078032
2006-04-13

Method, system and apparatus for an enhanced electrically pumped oxygen iodine laser

 #122
20060060571
2006-03-23

Laser apparatus

 #123
20060056478
2006-03-16

Laser gas replenishment method

 #124
20050281306
2005-12-22

Injection locking type or MOPA type of laser device

 #125
20050271109
2005-12-08

Very narrow band, two chamber, high rep-rate gas discharge laser system

 #126
20050271096
2005-12-08

Laser output temperature compensation

 #127
20050238077
2005-10-27

Method and apparatus for controlling the output of a gas discharge MOPA laser system

 #128
20050206918
2005-09-22

Laser unit

 #129
20050195867
2005-09-08

Laser unit

 #130
20050185690
2005-08-25

Method and apparatus for controlling the output of a gas discharge laser system

 #131
20050174576
2005-08-11

Gas discharge MOPA laser spectral analysis module

 #132
20050135451
2005-06-23

Method and apparatus for controlling the output of a gas discharge MOPA laser system

 #133
20050105579
2005-05-19

Laser output light pulse stretcher

 #134
20050068997
2005-03-31

Laser spectral engineering for lithographic process

 #135
20050046856
2005-03-03

Gas discharge MOPA laser spectral analysis module

 #136
20050041701
2005-02-24

Laser spectral engineering for lithographic process

 #137
20050025882
2005-02-03

Optical elements with protective undercoating

 #138
20050018739
2005-01-27

Timing control for two-chamber gas discharge laser system

 #139
20050002426
2005-01-06

Gas laser machining apparatus

 #140
16030085
2019-03-26

Tunable laser system and amplifier using a noble gas-filled hollow-core fiber waveguide

 #141
14565016
2016-02-16

Compensation for a disturbance in an optical source

 #142
14139461
2017-05-16

Self-locking atomic emission laser with an intracavity atomic plasma as the resonance line seeder