215742 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium; Gases Noble gas ions, e.g. Ar+>, Kr+>
GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2PACKED-BED FILTER FOR METAL FLUORIDE DUST TRAPPING IN LASER DISCHARGE CHAMBERS
#3LASER SYSTEM WITH OPTICAL SYSTEM FOR THE SPECTRAL BROADENING OF PULSED LASER RADIATION AND METHOD FOR THE SPECTRAL BROADENING OF PULSED LASER RADIATION
#4OPTICAL SYSTEM FOR INCREASING THE CONTRAST OF PULSED LASER RADIATION, LASER SYSTEM AND METHOD FOR INCREASING THE CONTRAST OF PULSED LASER RADIATION
#5Laser
#6Output light beam formation apparatus
#7Optical compensation system for laser beam and excimer laser annealing device
#8Light source apparatus
#9EXCIMER LASER OSCILLATION DEVICE HAVING GAS RECYCLE FUNCTION
#10Line narrowed laser apparatus
#11LASER GAS PURIFYING SYSTEM
#12System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#13CO2 laser
#14System and method for automatic gas optimization in a two-chamber gas discharge laser system
#15Gas laser
#16Dual channel method for pumping and cooling lasers and laser device
#17Method and device for detecting flatness of a fluorescent wheel in a laser light source
#18System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#19Optically pumped micro-plasma
#20Gas laser oscillator capable of controlling gas pressure and gas consumption amount
#21Gas laser oscillator capable of estimating sealability of gas container
#22Sub 200nm laser pumped homonuclear excimer lasers
#23CO2 laser
#24Apparatus for generating laser radiation
#25Two-light flux interference exposure device, two-light flux interference exposure method, semiconductor light emitting element manufacturing method, and semiconductor light emitting element
#26Laser intra-cavity electronic wavelength tuner
#27Gas discharge laser light source beam delivery unit
#28Timing control for two-chamber gas discharge laser system
#29Very narrow band, two chamber, high rep-rate gas discharge laser system
#30Very narrow band, two chamber, high rep-rate gas discharge laser system
#31Gas discharge MOPA laser spectral analysis module
#32Laser spectral engineering for lithographic process
#33Gas discharge MOPA laser spectral analysis module
#34Laser spectral engineering for lithographic process
#35Optical elements with protective undercoating
#36Timing control for two-chamber gas discharge laser system
#37Discharge laser with porous insulating layer covering anode discharge surface
#38Method for direct compression of laser pulses with large temporal ratios
#39Self-locking atomic emission laser with an intracavity atomic plasma as the resonance line seeder