ClassID:

215746

H01S3/2232 - CPC Classification

Classification description:

Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium; Gases the active gas being polyatomic, i.e. containing more than one atom Carbon dioxide (CO) or monoxide [CO]

Recent Application in this class:
#1
20250309606
2025-10-02

PULSED LASERS AND METHODS OF OPERATION

#2
20250222709
2025-07-10

ELECTROMAGNETIC RADIATION STEERING MECHANISM

#3
20250201510
2025-06-19

Radiation Heating to Dry Moisture from Air Bearing Shaft

#4
20240297476
2024-09-05

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER SYSTEMS

#5
20240285372
2024-08-29

SYSTEM AND METHOD FOR TREATMENT OF PERIODONTIC POCKETS USING DISPOSABLE INSERTS

#6
20240275114
2024-08-15

A SEED LASER OPTICAL ISOLATOR, SEED ISOLATOR MODULE, EUV RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND OPTICAL ISOLATOR OPERATING METHOD

#7
20240255767
2024-08-01

METHOD AND DEVICE FOR GENERATING LASER PULSES

#8
20240140123
2024-05-02

Electromagnetic radiation steering mechanism

#9
20240128705
2024-04-18

GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPARATUS, AND EUV EXPOSURE APPARATUS

#10
20240120700
2024-04-11

CO2 BEAM SOURCE COMPRISING A CATALYST

#11
20240090946
2024-03-21

System and method for laser based treatment of soft tissue

#12
20240072508
2024-02-29

LASER POWER CONTROL

#13
20230402806
2023-12-14

Positive high-voltage laser having super-long discharge tube

#14
20230378714
2023-11-23

Q-SWITCH CO2 LASER

#15
20230350263
2023-11-02

ELECTRO-OPTIC DISPLAY STACKS WITH SEGMENTED ELECTRODES AND METHODS OF MAKING THE SAME

#16
20230208092
2023-06-29

Methods and systems for aligning master oscillator power amplifier systems

#17
20230198217
2023-06-22

SCALABLE OPTICALLY PUMPED CO2 WITH HOLMIUM -DOPED PUMP SOURCE

#18
20230155342
2023-05-18

PULSE EQUALIZATION IN Q-SWITCHED GAS LASERS

#19
20230145560
2023-05-11

PRINTED WIRING BOARD MANUFACTURING METHOD AND PROCESSING SYSTEM

#20
20230143962
2023-05-11

SEED LASER SYSTEM FOR RADIATION SOURCE

#21
20230139746
2023-05-04

Optical isolation module

#22
20230051665
2023-02-16

Laser amplification device and extreme ultraviolet light generation apparatus

#23
20230049553
2023-02-16

System and method for laser based treatment of soft tissue

#24
20220271490
2022-08-25

DISC LASER

#25
20220216665
2022-07-07

LASER PROCESSING METHOD OF PRINTED CIRCUIT BOARD AND LASER PROCESSING MACHINE FOR PRINTED CIRCUIT BOARD

#26
20220212282
2022-07-07

HYBRID MECHANICAL DRILL

#27
20220176495
2022-06-09

SYSTEM AND METHOD FOR RADIUS OF CURVATURE MODIFICATION OF OPTICAL PLATES AND LENSES BY IRRADIATION WITH OPTICAL ENERGY

#28
20220174806
2022-06-02

Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same

#29
20220146943
2022-05-12

Extreme ultraviolet light generation system and electronic device manufacturing method

#30
20220070992
2022-03-03

Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same

#31
20220066225
2022-03-03

Light source and extreme ultraviolet light source system using the same

#32
20220006254
2022-01-06

Method for adjusting a laser beam, apparatus for providing an adjusted laser beam and optical arrangement

#33
20210391683
2021-12-16

LASER DEVICE

#34
20210353358
2021-11-18

System and method for laser based treatment of soft tissue

#35
20210349371
2021-11-11

Tunable mid-infrared laser source and method

#36
20210291573
2021-09-23

Laser marking system

#37
20210276130
2021-09-09

Device and method for producing a patterned functional coating for a glass layer

#38
20210242656
2021-08-05

RESONATOR MIRROR FOR AN OPTICAL RESONATOR OF A LASER APPARATUS, AND LASER APPARATUS

#39
20210242650
2021-08-05

Radio-frequency excited gas laser

#40
20210235572
2021-07-29

Residual gain monitoring and reduction for EUV drive laser

#41
20210153333
2021-05-20

EUV light concentrating apparatus and lithography apparatus including the same

#42
20210121987
2021-04-29

DUAL-LASER CUTTING MACHINE AND CUTTING METHOD TEHREOF

#43
20210119399
2021-04-22

Compact coaxial laser

#44
20210083447
2021-03-18

Output coupling from unstable laser resonators

#45
20210066877
2021-03-04

Sensor system

#46
20210057864
2021-02-25

ENHANCED WAVEGUIDE SURFACE IN GAS LASERS

#47
20210045808
2021-02-18

System and method for laser based treatment of soft tissue

#48
20210038125
2021-02-11

Method for measuring concentration of substance in blood

#49
20210036477
2021-02-04

Light source apparatus

#50
20210006031
2021-01-07

Folded slab laser

#51
20200393687
2020-12-17

Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing method

#52
20200371346
2020-11-26

Electromagnetic radiation steering mechanism

#53
20200345453
2020-11-05

System and method for treatment of periodontic pockets using disposable inserts

#54
20200337801
2020-10-29

Dental laser system and treatment method

#55
20200305263
2020-09-24

Optical isolation module

#56
20200274313
2020-08-27

Radio frequency slab laser

#57
20200235542
2020-07-23

Conductively-cooled slab laser

#58
20200212646
2020-07-02

System for optimizing laser beam

#59
20200203912
2020-06-25

External optical feedback element for tuning a multi-wavelength gas laser

#60
20200150543
2020-05-14

Extreme ultraviolet light generation system

#61
20200146137
2020-05-07

Residual gain monitoring and reduction for EUV drive laser

#62
20200146136
2020-05-07

EUV LIGHT CONCENTRATING APPARATUS AND LITHOGRAPHY APPARATUS INCLUDING THE SAME

#63
20200067256
2020-02-27

Wavelength discriminating slab laser

#64
20200061917
2020-02-27

Laser fabrication additive system and method

#65
20200041719
2020-02-06

ABLATED END FIBERS AND METHODS FOR ABLATING OPTICAL FIBERS

#66
20190363508
2019-11-28

Laser system and extreme ultraviolet light generation system

#67
20190326722
2019-10-24

Laser apparatus and extreme ultraviolet light generation system

#68
20190314872
2019-10-17

Reversing coffee-ring effect by laser-induced differential evaporation

#69
20190312403
2019-10-10

Folded slab laser

#70
20190293922
2019-09-26

Laser apparatus and extreme ultraviolet light generation system

#71
20190280448
2019-09-12

Conductively-cooled slab laser

#72
20190239330
2019-08-01

Laser device and extreme ultraviolet light generation device using delay determination at a shutter

#73
20190157831
2019-05-23

Polarisation and mode selection technique for a laser

#74
20190157828
2019-05-23

Methods and systems for aligning master oscillator power amplifier systems

#75
20190150267
2019-05-16

Optical pulse generation for an extreme ultraviolet light source

#76
20190141826
2019-05-09

System and method for generating extreme ultraviolet light

#77
20190049565
2019-02-14

System and Method for Depth Sensing

#78
20190037677
2019-01-31

System and method for generating extreme ultraviolet light

#79
20190020168
2019-01-17

Multilayer electrode assembly

#80
20180375283
2018-12-27

Laser apparatus and extreme ultraviolet light generating system

#81
20180375278
2018-12-27

Exteme ultraviolet radiation producing systems with driver laser systems having optical isolators

#82
20180351322
2018-12-06

Laser apparatus and extreme ultraviolet light generation system

#83
20180351318
2018-12-06

Laser device and laser device control method

#84
20180317308
2018-11-01

Residual gain monitoring and reduction for EUV drive laser

#85
20180301862
2018-10-18

Laser machining device

#86
20180261974
2018-09-13

Apparatus and method of optimizing laser system

#87
20180254598
2018-09-06

High gain optically pumped far infrared laser

#88
20180246250
2018-08-30

Downhole gamma-ray generators and systems to generate gamma-rays in a downhole environment

#89
20180242441
2018-08-23

Extreme ultraviolet light generation system

#90
20180233876
2018-08-16

Generating plasma or laser pulses by radiofrequency excitation pulses

#91
20180212394
2018-07-26

Laser feedback control systems

#92
20180196361
2018-07-12

Lithographic apparatus

#93
20180191123
2018-07-05

Gas slab laser

#94
20180116363
2018-05-03

Hair coloring appliance

#95
20180110116
2018-04-19

System and method for generating extreme ultraviolet light

#96
20180081280
2018-03-22

Wavelength-based optical filtering

#97
20180069365
2018-03-08

Wavelength discriminating slab laser

#98
20180063935
2018-03-01

Optical isolation module

#99
20180034235
2018-02-01

Radiation source

#100
20180034228
2018-02-01

Laser apparatus and extreme ultraviolet light generation apparatus

#101
20180019567
2018-01-18

CO2 laser

#102
20180000386
2018-01-04

Device for measuring concentration of substance in blood, and method for measuring concentration of substance in blood

#103
20170325325
2017-11-09

Adjusting a beam diameter and an aperture angle of a laser beam

#104
20170324211
2017-11-09

Dielectric electrode assembly and method of manufacture thereof

#105
20170310070
2017-10-26

Q-switched CO2-laser material machining system comprising acousto-optic modulators

#106
20170296272
2017-10-19

Window for surgical laser

#107
20170285351
2017-10-05

LASER VIA DRILLING APPARATUS AND METHODS

#108
20170181259
2017-06-22

Laser apparatus and extreme ultraviolet light generating apparatus

#109
20170179668
2017-06-22

Gas Flow Laser

#110
20170160538
2017-06-08

LASER SIPING APPARATUS

#111
20170160527
2017-06-08

Elongating a travel path of a light beam by an optical delay device

#112
20170149202
2017-05-25

Amplifying pulsed laser radiation for EUV radiation production

#113
20170136581
2017-05-18

Laser processing head including circulation path for circulating coolant

#114
20170131617
2017-05-11

Pulse-dividing method and apparatus for a pulsed carbon monoxide laser

#115
20170131556
2017-05-11

LASER VIA DRILLING APPARATUS AND METHODS

#116
20170099721
2017-04-06

Optical isolation module

#117
20170085054
2017-03-23

Monitoring laser beams

#118
20170077666
2017-03-16

Laser oscillator comprising heat exchanger having function of collecting foreign matters

#119
20170070024
2017-03-09

Laser apparatus, EUV light generation system, and method of controlling laser apparatus

#120
20170050266
2017-02-23

Carbon monoxide laser machining system

#121
20170047702
2017-02-16

Vacuum container of laser oscillator

#122
20170036301
2017-02-09

Acousto-optics deflector and mirror for laser beam steering

#123
20170033526
2017-02-02

Laser oscillator having folding mirror

#124
20170027047
2017-01-26

Extreme ultraviolet light generation system

#125
20170019983
2017-01-19

System and method for generating extreme ultraviolet light

#126
20170019981
2017-01-19

Solution for EUV power increment at wafer level

#127
20160353561
2016-12-01

Protecting a vacuum environment from leakage

#128
20160345419
2016-11-24

Extreme UV radiation light source device

#129
20160336713
2016-11-17

Laser apparatus

#130
20160322776
2016-11-03

CO2-N2-HE GAS DYNAMIC LASER

#131
20160316551
2016-10-27

Laser device and extreme ultraviolet light generation system

#132
20160315439
2016-10-27

Mirror device

#133
20160308325
2016-10-20

Air-cooled carbon-dioxide laser

#134
20160285222
2016-09-29

Laser unit and extreme ultraviolet light generating system

#135
20160278195
2016-09-22

Apparatus for generating extreme ultraviolet light

#136
20160254635
2016-09-01

Temperature controllable gas laser oscillator

#137
20160240992
2016-08-18

Gas laser oscillation apparatus of orthogonal excitation type

#138
20160233640
2016-08-11

Flat-folded ceramic slab lasers

#139
20160226213
2016-08-04

Gas laser apparatus for determining composition ratio of laser gas

#140
20160172820
2016-06-16

Laser amplifier, laser apparatus, and extreme ultraviolet light generating system

#141
20160156150
2016-06-02

Laser apparatus and extreme ultraviolet light generation system

#142
20160149369
2016-05-26

Systems and methods for supplying power to and cooling dental laser systems

#143
20160134075
2016-05-12

Gas laser device

#144
20160128172
2016-05-05

System and method for generating extreme ultraviolet light

#145
20160118761
2016-04-28

LASER OSCILLATOR FOR IMPROVING BEAM QUALITY

#146
20160113101
2016-04-21

EUV light source and exposure apparatus

#147
20160094004
2016-03-31

Laser oscillator for improving beam quality

#148
20160056602
2016-02-25

Laser oscillator provided with laser medium flow path

#149
20160013606
2016-01-14

Gas laser oscillator capable of controlling gas pressure and gas consumption amount

#150
20150372441
2015-12-24

Gas laser oscillator capable of estimating sealability of gas container

#151
20150357785
2015-12-10

Gas laser device

#152
20150351209
2015-12-03

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

#153
20150351208
2015-12-03

LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

#154
20150349483
2015-12-03

Powerful pulsed self-seeding COlaser

#155
20150349480
2015-12-03

Laser waveguide device and laser waveguide system

#156
20150340838
2015-11-26

Laser apparatus and extreme ultraviolet light generation system

#157
20150340836
2015-11-26

Laser oscillator provided with blower

#158
20150333469
2015-11-19

Gas circulation type laser oscillator

#159
20150296602
2015-10-15

Method and apparatus for generating radiation

#160
20150288128
2015-10-08

Carbon dioxide gas laser oscillator which can estimate composition ratio of laser gas

#161
20150270678
2015-09-24

Diffusion cooled gas laser arrangement and method for setting the discharge distribution in the case of diffusion cooled gas laser arrangement

#162
20150249312
2015-09-03

Laser chamber and discharge excitation gas laser apparatus

#163
20150244140
2015-08-27

Air-cooled gas lasers with heat transfer resonator optics and associated systems and methods

#164
20150244139
2015-08-27

Air-cooled gas lasers and associated systems and methods

#165
20150244137
2015-08-27

Air-cooled gas lasers with heat transfer assembly and associated systems and methods

#166
20150222083
2015-08-06

Catalytic conversion of an optical amplifier gas medium

#167
20150188282
2015-07-02

Impedance matching system for slab type lasers

#168
20150188277
2015-07-02

Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier

#169
20150055672
2015-02-26

Discharge-pumped gas laser device

#170
20150043057
2015-02-12

Optical amplifier arrangement

#171
20150030043
2015-01-29

Cooling laser gas

#172
20150028231
2015-01-29

LASER APPARATUS

#173
20140355639
2014-12-04

Metamaterial structures for Q-switching in lasers

#174
20140355633
2014-12-04

Gas lasers including heat exchangers

#175
20140341248
2014-11-20

Amplifier, laser apparatus, and extreme ultraviolet light generation system

#176
20140334514
2014-11-13

COlaser device and COlaser processing device

#177
20140334510
2014-11-13

Laser tube with baffles

#178
20140319388
2014-10-30

Laser apparatus and extreme ultraviolet light generation apparatus

#179
20140294034
2014-10-02

Laser

#180
20140294033
2014-10-02

Laser

#181
20140253661
2014-09-11

Marking device for marking an object with marking light

#182
20140247855
2014-09-04

Lasing device

#183
20140247316
2014-09-04

Marking apparatus

#184
20140233597
2014-08-21

Laser device

#185
20140224778
2014-08-14

Marking apparatus with a plurality of gas lasers with resonator tubes and individually adjustable deflection means

#186
20140224777
2014-08-14

Marking apparatus with a plurality of lasers, deflection means, and telescopic means for each laser beam

#187
20140217073
2014-08-07

Marking apparatus with a plurality of lasers and individually adjustable sets of deflection means

#188
20140217072
2014-08-07

Marking apparatus with a plurality of lasers and a combining deflection device

#189
20140202998
2014-07-24

Laser device and method for marking an object

#190
20140177667
2014-06-26

Laser

#191
20140177666
2014-06-26

Laser

#192
20140177665
2014-06-26

Laser

#193
20140146387
2014-05-29

Master oscillator—power amplifier drive laser with pre-pulse for EUV light source

#194
20140145096
2014-05-29

EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods

#195
20140112362
2014-04-24

Gas laser device

#196
20140105238
2014-04-17

Discharge-pumped gas laser device

#197
20140086271
2014-03-27

Molecular gas laser

#198
20140077104
2014-03-20

Drive laser delivery systems for EUV light source

#199
20140064318
2014-03-06

Waveguide COlaser with multiply folded resonator

#200
20140064317
2014-03-06

Gas laser oscillator with discharge start judgment function

#201
20130322482
2013-12-05

System and method for protecting a seed laser in an EUV light source with a Bragg AOM

#202
20130321901
2013-12-05

Drive laser for EUV light source

#203
20130315272
2013-11-28

Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system

#204
20130308673
2013-11-21

Slab laser

#205
20130272327
2013-10-17

Device for amplifying a laser beam

#206
20130272325
2013-10-17

Pulsed COlaser output-pulse shape and power control

#207
20130250402
2013-09-26

Laser beam amplifier and laser apparatus using the same

#208
20130235894
2013-09-12

Gas laser device

#209
20130220981
2013-08-29

Control device and control method for laser processing machine

#210
20130202006
2013-08-08

Gas filled hollow fiber laser

#211
20130202004
2013-08-08

Output-power control apparatus for a COgas-discharge laser

#212
20130170514
2013-07-04

Laser machine and controlling method of laser machine

#213
20130148674
2013-06-13

Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light

#214
20130114215
2013-05-09

Laser apparatus

#215
20130099140
2013-04-25

Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam

#216
20130051416
2013-02-28

Apparatus and method for balancing combined RF power-supplies for driving a COgas-discharge laser

#217
20130022065
2013-01-24

Gas laser having radial and axial gas bearings

#218
20130003775
2013-01-03

COlaser

#219
20130003774
2013-01-03

CO2 laser

#220
20130003772
2013-01-03

Molecular gas laser

#221
20120319014
2012-12-20

Extreme ultraviolet light source device and control method for extreme ultraviolet light source device

#222
20120307852
2012-12-06

Impedance-matching transformers for RF driven COgas discharge lasers

#223
20120307851
2012-12-06

System and method for generating extreme ultraviolet light

#224
20120281728
2012-11-08

Waveguide COlaser with mutiply folded resonator

#225
20120243566
2012-09-27

System and method for generating extreme ultraviolet light

#226
20120236897
2012-09-20

Stripline laser

#227
20120235066
2012-09-20

Drive laser delivery systems for EUV light source

#228
20120229889
2012-09-13

Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system

#229
20120219028
2012-08-30

Ceramic slab, free-space and waveguide lasers

#230
20120195342
2012-08-02

Configuration for Multiwavelength Emission with a CO2 Laser

#231
20120189031
2012-07-26

Gas laser discharge pre-ionization using a simmer-discharge

#232
20120106586
2012-05-03

RF-excited laser assembly

#233
20120092746
2012-04-19

Oscillator-amplifier drive laser with seed protection for an EUV light source

#234
20120087388
2012-04-12

Catalyst module for high repetition rate COlasers

#235
20120086519
2012-04-12

Impedance-matching circuits for multi-output power supplies driving COgas-discharge lasers

#236
20120080584
2012-04-05

EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods

#237
20120034328
2012-02-09

Apparatus for laser processing

#238
20120033703
2012-02-09

Hermetically-sealed RF feed-through with integrated capacitor

#239
20120027042
2012-02-02

Multiple discharge COlaser with improved repetition rate

#240
20120012762
2012-01-19

LASER DEVICE, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

#241
20110317256
2011-12-29

Master oscillator-power amplifier drive laser with pre-pulse for EUV light source

#242
20110285473
2011-11-24

IMPEDANCE-MATCHING TRANSFORMERS FOR RF DRIVEN CO2 GAS DISCHARGE LASERS

#243
20110261844
2011-10-27

LASER SYSTEM

#244
20110220816
2011-09-15

Extreme ultraviolet light generation apparatus

#245
20110211601
2011-09-01

DRIVER LASER FOR EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE

#246
20110194581
2011-08-11

Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections

#247
20110189628
2011-08-04

Dental laser system and treatment method

#248
20110182319
2011-07-28

COlaser output power control during warm-up

#249
20110126847
2011-06-02

Palladium-containing nanoscale catalysts

#250
20110122897
2011-05-26

Acousto-optically Q-switched COlaser

#251
20110085580
2011-04-14

Pre-ionization method for COgas-discharge laser

#252
20110085575
2011-04-14

Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser

#253
20110058588
2011-03-10

Drive laser for EUV light source

#254
20110027744
2011-02-03

Dental laser system using midrange gas pressure

#255
20110024401
2011-02-03

Recovery of energy from a laser machining system

#256
20100327192
2010-12-30

EUV light producing system and method utilizing an alignment laser

#257
20100316084
2010-12-16

Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections

#258
20100265984
2010-10-21

Lasers

#259
20100220756
2010-09-02

Laser apparatus and extreme ultraviolet light source apparatus

#260
20100195196
2010-08-05

Laser beam amplifier and laser apparatus using the same

#261
20100193710
2010-08-05

Laser apparatus and extreme ultraviolet light source apparatus

#262
20100189156
2010-07-29

Radio frequency excited gas laser source

#263
20100182579
2010-07-22

Laser device

#264
20100172386
2010-07-08

Particle damage protection for high power COslab laser mirrors

#265
20100172042
2010-07-08

Compensation for transient heating of laser mirrors

#266
20100118901
2010-05-13

Hermetically-sealed RF feed-through with integrated capacitor

#267
20100118898
2010-05-13

Mode selection technique for a laser

#268
20100117009
2010-05-13

Extreme ultraviolet light source device and control method for extreme ultraviolet light source device

#269
20100086000
2010-04-08

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Apparatus and method of adjusting a laser light source for an EUV source device

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Slab type laser apparatus

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Frequency-agile RF-power excitation for driving diffusion-cooled sealed-off, RF-excited gas lasers

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System and method for lasers in surgical applications

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Drive laser delivery systems for EUV light source

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Laser system

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Acousto-optically Q-switched COlaser

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Diffusion-cooled COlaser with flexible housing

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Drive laser for EUV light source

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Laser having distributed inductances

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Target marking system having a gas laser assembly and a thermal imager

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Gas laser device

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Laser device with optical element module on separate plate

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Pre-ionizer for pulsed gas-discharge laser

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Slab laser with stand-off for ceramic spacers

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RF shielded, series inductor, high RF power impedance matching interconnector for COslab laser

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Laser

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RF excited COslab laser tube housing and electrodes cooling

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Unstable resonator with variable output coupling

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High power low inductance RF hermetic sealed feed-through for slab CO2 lasers

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Mechanically Q-switched COlaser

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Apparatus for generating laser radiation

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Gas lasers including nanoscale catalysts and methods for producing such lasers

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RF laser

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Drive laser delivery systems for EUV light source

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Pre-ionizer for pulsed gas-discharge laser

#296
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Driver laser for extreme ultra violet light source device

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Gas laser oscillator

#298
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Gas laser oscillating unit

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2008-01-03

High damage threshold Q-switched CO2 laser

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Incoherent combination of laser beams