Patents-Review.com
ClassID:

215750 ⎘

H01S3/2251 - CPC Classification

Classification description:

Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium; Gases the active gas being polyatomic, i.e. containing more than one atom comprising an excimer or exciplex ArF, i.e. argon fluoride is comprised for lasing around 193 nm

Recent Application in this class:
#1
20260088583
2026-03-26

ULTRAVIOLET LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #2
20250329978
2025-10-23

CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #3
20250233380
2025-07-17

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #4
20250096515
2025-03-20

CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #5
20250044603
2025-02-06

Adaptable computing network with real time, intelligent, 4D spherical scalability, tech stack awareness, tech stack integration, automatic bi-directional communications channel switching and order equilibrium—for large enterprise, time sensitive event/transaction driven applications

 #6
20240235149
2024-07-11

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #7
20230378713
2023-11-23

ULTRAVIOLET LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #8
20230375847
2023-11-23

OPTICAL ISOLATOR, ULTRAVIOLET LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #9
20230375846
2023-11-23

OPTICAL ISOLATOR, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #10
20230229088
2023-07-20

LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

 #11
20230055090
2023-02-23

PREDICTIVE CONTROL OF A PULSED LIGHT BEAM

 #12
20220373893
2022-11-24

Exposure system, laser control parameter production method, and electronic device manufacturing method

 #13
20220311200
2022-09-29

Capped blocking coating for laser optics

 #14
20220285902
2022-09-08

GAS CONTROL METHOD AND RELATED USES

 #15
20220255286
2022-08-11

CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS

 #16
20220190540
2022-06-16

LASER DEVICE AND LEAK CHECK METHOD FOR LASER DEVICE

 #17
20220158402
2022-05-19

WAVELENGTH CONVERSION APPARATUS, SOLID-STATE LASER SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #18
20220131335
2022-04-28

LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

 #19
20220050382
2022-02-17

Laser processing method and laser processing system

 #20
20210384027
2021-12-09

Electrode for a discharge chamber

 #21
20210367393
2021-11-25

High voltage pulse generation device, gas laser apparatus, and electronic device manufacturing method

 #22
20210359482
2021-11-18

Copper electrode material

 #23
20210336407
2021-10-28

Line narrowing module, gas laser apparatus, and electronic device manufacturing method

 #24
20210336404
2021-10-28

Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device

 #25
20210242649
2021-08-05

Laser system

 #26
20210043334
2021-02-11

Argon Fluoride Laser-Driven Inertial Fusion Energy System

 #27
20200403371
2020-12-24

Laser gas regenerating apparatus and electronic device manufacturing method

 #28
20200328074
2020-10-15

Electrode for a discharge chamber

 #29
20200321746
2020-10-08

Online calibration for repetition rate dependent performance variables

 #30
20200209760
2020-07-02

Laser processing method and laser processing system

 #31
20200067257
2020-02-27

Laser apparatus and method for manufacturing optical element

 #32
20200014168
2020-01-09

Line narrowing module

 #33
20190288472
2019-09-19

Laser system

 #34
20190283179
2019-09-19

Laser processing system and laser processing method

 #35
20190245321
2019-08-08

Laser apparatus and laser processing system

 #36
20190181607
2019-06-13

Laser apparatus

 #37
20190173259
2019-06-06

Laser apparatus

 #38
20190173258
2019-06-06

Laser device

 #39
20190103724
2019-04-04

LASER SYSTEM

 #40
20190033133
2019-01-31

Wavelength measuring device

 #41
20180320250
2018-11-08

Electrodes for laser chambers having extended lifetime

 #42
20180254600
2018-09-06

Narrowband laser apparatus and spectral linewidth measuring apparatus

 #43
20180241170
2018-08-23

Laser gas purifying system and laser system

 #44
20180102620
2018-04-12

Beam reverser module and optical power amplifier having such a beam reverser module

 #45
20180097331
2018-04-05

System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system

 #46
20180006425
2018-01-04

Online calibration for repetition rate dependent performance variables

 #47
20170302050
2017-10-19

Laser system

 #48
20170279241
2017-09-28

Solid-state laser system

 #49
20170279240
2017-09-28

System and method for automatic gas optimization in a two-chamber gas discharge laser system

 #50
20170229832
2017-08-10

Gas mixture control in a gas discharge light source

 #51
20170222391
2017-08-03

Narrow band laser apparatus

 #52
20170201057
2017-07-13

Gas mixture control in a gas discharge light source

 #53
20170063016
2017-03-02

System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system

 #54
20170033527
2017-02-02

Gas laser device and condenser

 #55
20160344158
2016-11-24

Lasersystem

 #56
20160322772
2016-11-03

Excimer laser apparatus and excimer laser system

 #57
20160161859
2016-06-09

Compensation for a disturbance in an optical source

 #58
20160013606
2016-01-14

Gas laser oscillator capable of controlling gas pressure and gas consumption amount

 #59
20150380893
2015-12-31

LASER DEVICE, AND METHOD OF CONTROLLING ACTUATOR

 #60
20150340837
2015-11-26

Method of controlling wavelength of laser beam and laser apparatus

 #61
20150340829
2015-11-26

Beam reverser module and optical power amplifier having such a beam reverser module

 #62
20150255947
2015-09-10

DIFFRACTION GRATING, LASER APPARATUS, AND MANUFACTURING METHOD FOR DIFFRACTION GRATING

 #63
20150255946
2015-09-10

Diffraction grating, laser apparatus, and manufacturing method for diffraction grating

 #64
20150249312
2015-09-03

Laser chamber and discharge excitation gas laser apparatus

 #65
20150194781
2015-07-09

Laser apparatus

 #66
20150188274
2015-07-02

Method of controlling laser apparatus and laser apparatus

 #67
20150180192
2015-06-25

Laser apparatus and method of controlling laser apparatus

 #68
20150003485
2015-01-01

Excimer laser apparatus and excimer laser system

 #69
20140341239
2014-11-20

Laser system and laser light generation method

 #70
20140050239
2014-02-20

Polarization purity control device and gas laser apparatus provided with the same

 #71
20130322483
2013-12-05

Gas discharge chamber

 #72
20130315270
2013-11-28

Laser apparatus

 #73
20130215916
2013-08-22

Laser apparatus

 #74
20130202003
2013-08-08

Wavelength converter, wavelength converting device, solid state laser device, and laser system

 #75
20130100980
2013-04-25

Excimer laser apparatus and excimer laser system

 #76
20130064258
2013-03-14

Master oscillator system and laser apparatus

 #77
20130039372
2013-02-14

Wavelength conversion device, solid-state laser apparatus, and laser system

 #78
20130003773
2013-01-03

System and method for automatic gas optimization in a two-chamber gas discharge laser system

 #79
20130003032
2013-01-03

Pulsed laser source with high repetition rate

 #80
20120250710
2012-10-04

Laser system and laser light generation method

 #81
20120250708
2012-10-04

Laser system and laser light generation method

 #82
20120236894
2012-09-20

WAVELENGTH CONVERSION DEVICE, SOLID-STATE LASER APPARATUS, AND LASER SYSTEM

 #83
20120177072
2012-07-12

Polarization purity control device and gas laser apparatus provided with the same

 #84
20120087386
2012-04-12

Laser system

 #85
20120002687
2012-01-05

Laser system

 #86
20110206859
2011-08-25

ENGINEERED FLUORIDE-COATED ELEMENTS FOR LASER SYSTEMS

 #87
20110194580
2011-08-11

Line narrowing module

 #88
20110164647
2011-07-07

EXCIMER LASER DEVICE

 #89
20110158281
2011-06-30

Gas discharge chamber

 #90
20110102759
2011-05-05

Laser system

 #91
20100128747
2010-05-27

Polarization purity control device and gas laser apparatus provided with the same

 #92
20100108913
2010-05-06

Laser system

 #93
20100103534
2010-04-29

Imaging optical system, and imaging apparatus incorporating the same

 #94
20100097704
2010-04-22

Line narrowing module

 #95
20100054297
2010-03-04

Optical element for gas laser and gas laser apparatus using the same

 #96
20080267242
2008-10-30

Laser system

 #97
20080225908
2008-09-18

Laser system

 #98
20080225904
2008-09-18

Laser system

 #99
20080205472
2008-08-28

Laser gas injection system

 #100
20080204862
2008-08-28

Engineered fluoride-coated elements for laser systems

 #101
20080198891
2008-08-21

Excimer laser device operable at high repetition rate and having high band-narrowing efficiency

 #102
20080165337
2008-07-10

Laser system

 #103
20080151944
2008-06-26

Line narrowing module

 #104
20080144671
2008-06-19

Laser system

 #105
20080117948
2008-05-22

Narrow-band laser device for exposure apparatus

 #106
20080095209
2008-04-24

Laser device for exposure device

 #107
20080037609
2008-02-14

Excimer laser device

 #108
20080002752
2008-01-03

Anodes for fluorine gas discharge lasers

 #109
20070160103
2007-07-12

Gas discharge laser light source beam delivery unit

 #110
20060274809
2006-12-07

Cathodes for fluorine gas discharge lasers

 #111
20060251135
2006-11-09

Timing control for two-chamber gas discharge laser system

 #112
20060209917
2006-09-21

Control system for a two chamber gas discharge laser

 #113
20060126697
2006-06-15

Very narrow band, two chamber, high rep-rate gas discharge laser system

 #114
20060114957
2006-06-01

Line narrowing module

 #115
20060093009
2006-05-04

Gas laser device and exposure apparatus using the same

 #116
20060083274
2006-04-20

System and method for controlling wavelength of a laser beam

 #117
20050271109
2005-12-08

Very narrow band, two chamber, high rep-rate gas discharge laser system

 #118
20050265417
2005-12-01

Control system for a two chamber gas discharge laser

 #119
20050174576
2005-08-11

Gas discharge MOPA laser spectral analysis module

 #120
20050105579
2005-05-19

Laser output light pulse stretcher

 #121
20050068997
2005-03-31

Laser spectral engineering for lithographic process

 #122
20050046856
2005-03-03

Gas discharge MOPA laser spectral analysis module

 #123
20050041701
2005-02-24

Laser spectral engineering for lithographic process

 #124
20050025882
2005-02-03

Optical elements with protective undercoating

 #125
20050018739
2005-01-27

Timing control for two-chamber gas discharge laser system

 #126
14565016
2016-02-16

Compensation for a disturbance in an optical source

 #127
14483082
2015-09-08

System and method for automatic gas optimization in a two-chamber gas discharge laser system