215752 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium; Gases the active gas being polyatomic, i.e. containing more than one atom comprising an excimer or exciplex XeF, i.e. xenon fluoride is comprised for lasing around 351 nm
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2Capped blocking coating for laser optics
#3GAS CONTROL METHOD AND RELATED USES
#4System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#5Laser system
#6Gas mixture control in a gas discharge light source
#7Gas mixture control in a gas discharge light source
#8Light irradiation device and method for patterning self assembled monolayer
#9System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
#10LLP EUV drive laser
#11Laser thin film poly-silicon annealing system