215754 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium; Gases the active gas being polyatomic, i.e. containing more than one atom comprising an excimer or exciplex F2, i.e. molecular fluoride is comprised for lasing around 157 nm
Capped blocking coating for laser optics
#2GAS CONTROL METHOD AND RELATED USES
#3Electrode for a discharge chamber
#4Electrode for a discharge chamber
#5Laser gas regeneration system and laser system
#6LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
#7Laser unit and non-transitory computer-readable storage medium
#8Gas mixture control in a gas discharge light source
#9Gas mixture control in a gas discharge light source
#10Excimer laser apparatus and excimer laser system
#11Laser chamber
#12Laser unit and non-transitory computer-readable storage medium
#13Method of controlling laser apparatus and laser apparatus
#14Discharge-pumped gas laser device
#15Excimer laser apparatus and excimer laser system
#16Discharge-pumped gas laser device
#17Excimer laser apparatus and excimer laser system
#18Laser system
#19Laser system
#20Methods and Compositions for Diagnosing Carcinomas
#21Laser system
#22Laser system
#23Laser system
#24Laser system
#25Gas discharge laser light source beam delivery unit
#26Line narrowed laser apparatus
#27Cathodes for fluorine gas discharge lasers
#28Timing control for two-chamber gas discharge laser system
#29Very narrow band, two chamber, high rep-rate gas discharge laser system
#30Gas laser device and exposure apparatus using the same
#31Very narrow band, two chamber, high rep-rate gas discharge laser system
#32Method and apparatus for controlling the output of a gas discharge MOPA laser system
#33Method and apparatus for controlling the output of a gas discharge laser system
#34Gas discharge MOPA laser spectral analysis module
#35Method and apparatus for controlling the output of a gas discharge MOPA laser system
#36Laser output light pulse stretcher
#37Laser spectral engineering for lithographic process
#38Gas discharge MOPA laser spectral analysis module
#39Laser spectral engineering for lithographic process
#40Excimer or molecular fluorine laser system with precision timing
#41Optical elements with protective undercoating
#42Timing control for two-chamber gas discharge laser system
#43Low-pressure axial direction excitation type Flaser oscillator