Patents-Review.com
ClassID:

215764 ⎘

H01S3/2366 - CPC Classification

Classification description:

Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Arrangements of two or more lasers not provided for in groups  - , e.g. tandem arrangements of separate active media comprising a gas as the active medium

Recent Application in this class:
#1
20260100553
2026-04-09

LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

 #2
20260066606
2026-03-05

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #3
20260058430
2026-02-26

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #4
20250013066
2025-01-09

SPECTRAL FEATURE CONTROL APPARATUS

 #5
20240291226
2024-08-29

GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE

 #6
20240283210
2024-08-22

PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET

 #7
20240222927
2024-07-04

ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PULSE OF THE PULSED OUTPUT LIGHT BEAM

 #8
20230124587
2023-04-20

Spectral feature control apparatus

 #9
20220393422
2022-12-08

LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

 #10
20220350120
2022-11-03

Pulse width expansion apparatus and electronic device manufacturing method

 #11
20220255286
2022-08-11

CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS

 #12
20220131335
2022-04-28

LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

 #13
20210366710
2021-11-25

METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LASER ANNEALING SYSTEM

 #14
20210226411
2021-07-22

Laser system and electronic device manufacturing method

 #15
20210011302
2021-01-14

Spectral feature control apparatus

 #16
20200388980
2020-12-10

Laser device, laser machining apparatus, and method for controlling output of laser device

 #17
20200358240
2020-11-12

Gas management system

 #18
20200244029
2020-07-30

Gas laser apparatus

 #19
20200112137
2020-04-09

Laser system

 #20
20200028313
2020-01-23

Arrangement of expanding optical flows for efficient laser extraction

 #21
20190387603
2019-12-19

Target trajectory metrology in an extreme ultraviolet light source

 #22
20190353920
2019-11-21

Spectral feature control apparatus

 #23
20190305508
2019-10-03

Solid-state laser device, solid-state laser system, and laser device for exposure device

 #24
20190288478
2019-09-19

Laser apparatus and extreme ultraviolet light generation system

 #25
20190190229
2019-06-20

Gas optimization in a gas discharge light source

 #26
20190157833
2019-05-23

Laser device, and extreme ultraviolet light generation system

 #27
20190141826
2019-05-09

System and method for generating extreme ultraviolet light

 #28
20190081449
2019-03-14

Gas laser apparatus

 #29
20190074655
2019-03-07

Gas laser apparatus

 #30
20190069386
2019-02-28

Target trajectory metrology in an extreme ultraviolet light source

 #31
20190037677
2019-01-31

System and method for generating extreme ultraviolet light

 #32
20180261973
2018-09-13

Excimer laser apparatus

 #33
20180110116
2018-04-19

System and method for generating extreme ultraviolet light

 #34
20180107017
2018-04-19

Spectral feature control apparatus

 #35
20180052059
2018-02-22

Light beam measurement device, laser apparatus, and light beam separator

 #36
20180034235
2018-02-01

Radiation source

 #37
20180034228
2018-02-01

Laser apparatus and extreme ultraviolet light generation apparatus

 #38
20170302050
2017-10-19

Laser system

 #39
20170279241
2017-09-28

Solid-state laser system

 #40
20170237224
2017-08-17

Gas optimization in a gas discharge light source

 #41
20170181259
2017-06-22

Laser apparatus and extreme ultraviolet light generating apparatus

 #42
20170085054
2017-03-23

Monitoring laser beams

 #43
20170019983
2017-01-19

System and method for generating extreme ultraviolet light

 #44
20160336713
2016-11-17

Laser apparatus

 #45
20160322772
2016-11-03

Excimer laser apparatus and excimer laser system

 #46
20160301182
2016-10-13

Optically pumped micro-plasma

 #47
20160285222
2016-09-29

Laser unit and extreme ultraviolet light generating system

 #48
20160128172
2016-05-05

System and method for generating extreme ultraviolet light

 #49
20160076944
2016-03-17

Light beam measurement device, laser apparatus, and light beam separator

 #50
20150340837
2015-11-26

Method of controlling wavelength of laser beam and laser apparatus

 #51
20150188277
2015-07-02

Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier

 #52
20150139258
2015-05-21

Laser apparatus and method of controlling laser apparatus

 #53
20150028231
2015-01-29

LASER APPARATUS

 #54
20150003485
2015-01-01

Excimer laser apparatus and excimer laser system

 #55
20140341239
2014-11-20

Laser system and laser light generation method

 #56
20140334514
2014-11-13

COlaser device and COlaser processing device

 #57
20140028988
2014-01-30

Intracavity loss element for power amplifier

 #58
20130315272
2013-11-28

Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system

 #59
20130114215
2013-05-09

Laser apparatus

 #60
20130100980
2013-04-25

Excimer laser apparatus and excimer laser system

 #61
20130083818
2013-04-04

System and method for high accuracy gas inject in a two chamber gas discharge laser system

 #62
20130064258
2013-03-14

Master oscillator system and laser apparatus

 #63
20130034116
2013-02-07

Slab amplification device, laser apparatus, and extreme ultraviolet light generation system

 #64
20130032735
2013-02-07

Laser beam output control with optical shutter

 #65
20130003773
2013-01-03

System and method for automatic gas optimization in a two-chamber gas discharge laser system

 #66
20130003763
2013-01-03

Apparatus for adjusting polarization characteristics, and ultra-short ultra-high intensity pulse laser generator comprising same

 #67
20130000773
2013-01-03

System and method for high accuracy gas refill in a two chamber gas discharge laser system

 #68
20120307851
2012-12-06

System and method for generating extreme ultraviolet light

 #69
20120250710
2012-10-04

Laser system and laser light generation method

 #70
20120250709
2012-10-04

Laser system and laser light generation method

 #71
20120236885
2012-09-20

Laser device for exposure apparatus

 #72
20120229889
2012-09-13

Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system

 #73
20120219032
2012-08-30

Extendable electrode for gas discharge laser

 #74
20110211601
2011-09-01

DRIVER LASER FOR EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE

 #75
20110069733
2011-03-24

Regenerative ring resonator

 #76
20110058580
2011-03-10

Extendable electrode for gas discharge laser

 #77
20100309939
2010-12-09

Multi-chamber gas discharge laser bandwidth control through discharge timing

 #78
20080285602
2008-11-20

Narrow-spectrum laser device

 #79
20080225908
2008-09-18

Laser system

 #80
20080198882
2008-08-21

Active cooling of crystal optics for increased laser lifetime

 #81
20080095209
2008-04-24

Laser device for exposure device

 #82
20080069157
2008-03-20

Driver laser for extreme ultra violet light source device

 #83
20070253459
2007-11-01

Extendable electrode for gas discharge laser

 #84
20070160103
2007-07-12

Gas discharge laser light source beam delivery unit

 #85
20060251135
2006-11-09

Timing control for two-chamber gas discharge laser system

 #86
20060209917
2006-09-21

Control system for a two chamber gas discharge laser

 #87
20060171439
2006-08-03

Master oscillator—power amplifier excimer laser system

 #88
20060146906
2006-07-06

LLP EUV drive laser

 #89
20060146900
2006-07-06

Multi-chamber gas discharge laser bandwidth control through discharge timing

 #90
20060126697
2006-06-15

Very narrow band, two chamber, high rep-rate gas discharge laser system

 #91
20060050745
2006-03-09

Method and system for generating ultrashort laser pulses

 #92
20050271109
2005-12-08

Very narrow band, two chamber, high rep-rate gas discharge laser system

 #93
20050265417
2005-12-01

Control system for a two chamber gas discharge laser

 #94
20050238077
2005-10-27

Method and apparatus for controlling the output of a gas discharge MOPA laser system

 #95
20050185690
2005-08-25

Method and apparatus for controlling the output of a gas discharge laser system

 #96
20050174576
2005-08-11

Gas discharge MOPA laser spectral analysis module

 #97
20050141580
2005-06-30

Laser thin film poly-silicon annealing system

 #98
20050135451
2005-06-23

Method and apparatus for controlling the output of a gas discharge MOPA laser system

 #99
20050105579
2005-05-19

Laser output light pulse stretcher

 #100
20050094698
2005-05-05

Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control

 #101
20050069007
2005-03-31

Q-switched CO2 laser for material processing

 #102
20050068538
2005-03-31

Gas discharge MOPA laser spectral analysis module

 #103
20050046856
2005-03-03

Gas discharge MOPA laser spectral analysis module

 #104
20050018739
2005-01-27

Timing control for two-chamber gas discharge laser system

 #105
15851484
2019-01-01

Method for direct compression of laser pulses with large temporal ratios

 #106
15530464
2019-08-06

Rotation and acceleration sensor based on superluminal ring lasers

 #107
15044677
2017-04-25

Gas optimization in a gas discharge light source