Linear motor and linear motor cogging reduction method

Linear motor including extended tooth tips

Linear actuator unit

Linear motor, linear motor system, and electronic-circuit-component mounting machine including the linear motor

Absolute position sensing

Storage or conveying system

Linear motor position detection system

Electro-magnetic motor generator system

Protected Magnetic Displacement Device

THREE DEGREE OF MOVEMENT MOVER AND METHOD FOR CONTROLLING A THREE DEGREE OF MOVEMENT MOVER

Linear motor magnetic shield apparatus

Method and apparatus for coil-less magnetoelectric magnetic flux switching for permanent magnets

Linear motor having a slidable element

Monolithic stage positioning system and method

Base for Planar Servo Motor

Linear synchronous motor

Direct Current Brushless Machine and Wind Turbine System

X-Y table actuator

Reluctance motor with improved stator structure

MODULAR, BRUSHLESS MOTORS AND APPLICATIONS THEREOF

Linear generator with a primary part and a secondary part for power generation in a wave-driven power station and wave-driven power station

Integrated linear brushless DC motor

Control of a linear motor

Electromagnetic moving system

Driving mechanism having position encoder for two-dimensional positioning

Driving mechanism having position encoder for two-dimensional positioning

Rotary reluctance motor

Circular-Shaped Linear Synchronous Motor, Electromagnetic Suspension and Motor-Driven Steering Device Using the Same

Anti-deformation mechanism for an axial rod motor

Dual linear electrodynamic system and method

Vacuum processing apparatus

Linear synchronous motor

Switched reluctance linear motor/generator

LOW SPEED, PERMANENT MAGNET BRUSHLESS MOTORS AND GENERATORS

Rotary actuator for auto-focusing a camera lens

Electromagnetic machine with magnetic gap channels

Canned linear motor armature and canned linear motor

Motor apparatus, manufacturing method, exposure apparatus, and device fabrication method

Axial flux permanent magnet machines

Mover stabilizing and stator cooling arrangement of a 3-phase linear motor of a submersible oil pump

Linear stepping motor

Magnet holder for permanent magnet rotors of rotating machines

PULSE MOTOR, POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Cylindrical linear motor armature, cylindrical linear motor field pole, and cylindrical linear motor using them

Electric motor with a permanent magnet carrier rotating a sprocket

Linear motor actuator

PLANAR MOTOR, POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Three axis linear actuator

Linear motor and method of manufacturing the same

Tool-changing device having a directly driven stroke and pivoting actuator

Stage unit, exposure apparatus, and device manufacturing method

Electric Motor for Rotation and Axial Movement

Planar pulse motor, exposure apparatus, and device manufacturing method

OPERATION APPARATUS

Electric motor

Position measurement using magnetic fields

Power unit

Machining apparatus with mechanism for retaining axial position of guide member

MAGNETICALLY ACTUATED ROLLER HEAD

Spherical motor rotating in multiple degrees of freedom

Sliding system with onboard moving-coil linear motor

Artificial lift structures

Linear motor having coils surrounding an axially moving magnetic rod

Linear motor mounting structure

Position Feedback Device for a Linear Motor

Apparatus for generating amplified cooling air flows

LINEAR ACTUATOR

Modular Mover for a Linear Motor

Linear motor with differently configured secondary part sections

Information memory apparatus using probe

Micro actuator

Linear Motor Actuator

METHOD FOR CONTROLLING AN ELECTRIC MOTOR, CONTROL UNIT AND ELECTRIC MOTOR

WINDING MODULE OF PERMANENT MAGNET ELECTRIC MACHINERY

Synchronous linear motor

Planar motor and stage using the same

Method of magnetizing the shaft of a linear stepper motor

Method of manufacturing a can assembly of an enhanced coreless alternating current linear motor

Linear drive with a moving, reduced-mass and laterally guided passive unit

Linear synchronous motor and linear motor actuator

Linear motor, drive stage, and XY drive stage

Direct-drive built-in motor with special sensor attachment

High performance linear motor and magnet assembly therefor

Electrical linear drive

LINEAR MOTOR

Magnetic levitation actuator

Cylindrical linear motor

System and method for capturing energy from a railcar

Tangential drive module assembly and method of assembly for airflow induction

LINEAR MOTOR

LINEAR MOTOR

Substrate processing apparatus with motors integral to chamber walls

Synchronous motor having multiple coil segments

Chain support structure for a planar motor

LINEAR MOTOR

Canned linear motor armature and canned linear motor

Shaft Type Linear Motor, Mounting Head and Component Mounting Device With the Linear Motor, and Position Detection Method for Shaft for Driving the Linear Motor

Coil support unit, motor and exposure apparatus using the same, and device manufacturing method

ENERGY CONVERTER

ELECTROMAGNETIC ACTUATOR AND OPTICAL PICKUP DEVICE INCORPORATING ELECTROMAGNETIC ACTUATOR

Plastics injection-molding machine with integrated, linear-rotary direct drive

ELECTROMAGNETIC ACTUATOR

Canned linear motor armature and canned linear motor

Linear motor

Variable reluctance dynamo-electric rotary machine provided with united magnetic, electric and polarising circuits and method for production thereof

Linear motor and tool moving device with the same

Electric linear drive unit

TWO DEGREE OF FREEDOM MOVERS WITH OVERLAPPING COILS

Cylinder-type linear motor and moving part thereof

Cylinder-type linear motor and moving parts thereof

Assembly of linear motor cooling parts

Electrodynamic drive for a dispensing valve

Electromagnetic moving system

Electric drive having a bell-shaped armature and external permanent magnet elements

Linear motor not requiring yoke

Rotor arrangement for a unilateral transverse flux machine with flux concentration

Moving-magnet type linear motor

Linear motor

Multipolar, Linear or Rotating Synchronous Direct Drive Motor

Actuator

Reluctance laminations for a motor assembly

Cylinder-Type Linear Motor and Moving Part Thereof

Rod-adjusting Structure for a Rod Type Linear Motor

Positioning apparatus, exposure apparatus using thereof and device manufacturing method

STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Synchronous electromechanical transformer

Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield

Driving device, optical apparatus, and image pickup apparatus

Synchronous linear motor with non-contacting scanning of the toothed structure of the secondary part

Stage apparatus, exposure apparatus, and device manufacturing method

HEAT SINK FOR A SHAFT-TYPE LINEAR MOTOR

METHOD AND APPARATUS FOR COIL-LESS MAGNETOELECTRIC MAGNETIC FLUX SWITCHING FOR PERMANENT MAGNETS

Linear actuator for circuit breaker remote operation device

Planar motor

Blade tip electric machine

Apparatus for preventing displacement of retainer

Brushless motor

Linear motor having dual coil configuration

Magnetic Guide Apparatus, Stage Apparatus, Exposure Apparatus, and Device Manufacturing Method

Coreless linear motor having a non-magnetic reinforcing member

Electric motor

High efficiency linear motor and oil well lift device

Low mass six degree of freedom stage for lithography tools

Monolithic stage devices providing motion in six degrees of freedom

Cylindrical linear motor and a vehicle using the same

Stage apparatus

Linear motor

SLIDING SYSTEM WITH ONBOARD MOVING-MAGNET LINEAR MOTOR

Linear motor cooling apparatus with air amplification

Moving Magnet Type Linear Actuator

Driving apparatus, exposure apparatus, and device manufacturing method

Sliding device with onboard moving-magnet linear motor

Heat Dissipating Arrangement for a Linear Motor

Linear motor, manufacturing method of the linear motor, and stage apparatus using the linear motor

Linear motor

Method for Manufacturing Linear Motor

Linear compressor assembly

Linear motor

Linear Motor And Manufacturing Method Of Linear Motor

Wind wheel and electricity generator using same

Wind wheel and electricity generator using same

Linear motor

Meter

An add-on kit comprising a ring of magnets installed onto a bicycle/car wheel; electromagnets installed onto a bike fork or car suspension which then provide assisted rotation.

Linear reluctance motor

System and method to control a rotary-linear actuator

Moving-magnet-type linear slider

Tubular electrical machines

Coreless linear motor and canned linear motor

Magnet assembly, linear actuator, planar motor and lithographic apparatus

Moving magnet type linear actuator

Planar direct drive unit comprising a position measuring system

Lithographic apparatus and motor

Moving magnet type linear slider

Optical devices

Moving magnet type linear slider

Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising and electromagnetic actuator

Linear motor

Motor modules for linear and rotary motors

Linear drive system

System for controlling an electrostatic stepper motor

Moving magnet type linear actuator

Linear motor and stage device using the linear motor

High performance linear motor and magnet assembly therefor

Method for controlling stage apparatus

Actuator and bonding apparatus

Linear motor

Wind wheel and electricity generator using same

Driving device

LINEAR MOTOR

Cartesian positioning system

Linear motor with claw-pole armature units

Dual linear electrodynamic system and method

Current-controlled/driven compensating/strengthening device

Electromagnetically actuated adjusting apparatus for lens

Brake apparatus for linear motor and method for positioning movable section of linear motor

Split coil linear motor for z force

Positioning system and linear motor

2-Dimensional displacement device

Position control mechanism

Integrated resolver for high pole count motors

Sliding system with onboard linear motor

METHOD AND APPARATUS FOR COIL-LESS MAGNETOELECTRIC MAGNETIC FLUX SWITCHING FOR PERMANENT MAGNETS

Cylindrical linear motor, electromagnetic suspension, and vehicle using the same

Alignment apparatus, exposure apparatus, and device manufacturing method

Positioning apparatus

Mover for linear oscillatory actuator

System and method for servo control of nonlinear electromagnetic actuators

Torus geometry motor system

Motor, motor system, motor elements and method of assembly thereof

High performance linear motor and magnet assembly therefor

Variable reluctance motor with separated stator cores

Motor, motor system, motor elements and method of assembly thereof

Positioning system, magnetic bearing, and method of controlling the same

Motor having cores structure wherein magnetic circuit is designed in three dimensional configuration

Linear brushless D.C. motor with stationary armature and field and with integratable magnetic suspension

Linear motor

Linear motor and stator core therefor

Extensible coil for biaxial driver

Positioning apparatus, exposure apparatus using thereof and device manufacturing method

Linear drive apparatus having cores and coils which are positioned on opposite sides of the cores

Coreless ac linear motor and method of producing the same

Driving device, optical apparatus, and image pickup apparatus

Motor using rectangular waveform conductor

Axial gap electrical machine

Belt including a flexible rare earth magnetic strip and conveyor utilizing a belt including a flexible rare earth magnetic strip

Linear motor

Tubular linear motor for electrical discharge machine

Linear motor and linear moving stage device

Synchronous permanent magnet planar motor

Split coil linear motor for z force

Linear motor for use in machine tool

Cylinder-type linear motor and moving part thereof

Levitated reticle-masking blade stage

Method and apparatus for coil-less magnetoelectric magnetic flux switching for permanent magnets

Dual flow circulation system for a mover

Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method

Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus

Linear motor

Linear motor and manufacturing method of linear motor

Tandem arrangement linear motor

Magnetic bearing using displacement winding techniques

Sliding device with onboard moving-magnet linear motor

Linear motor not requiring yoke

Stage apparatus, plane motor, and device manufacturing method

Linear motor apparatus

Two-dimensional variable reluctance planar motor

Anti-cogging method and apparatus for a linear motor

Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method

Precision machining stage equipment

Circuitry for increasing efficiency of a linear electric generator

Drive for reticle-masking blade stage

Linear drive unit reducing stress generated in movable part in horizontal direction

Actuator and bonding apparatus

Auto-calibration of attraction-only type actuator commutations

Linear motor

Magnetic floating device

Actuator with hit prevention mechanism

Circulation housing for a mover

Linear motor

Stage apparatus, exposure apparatus, and device manufacturing method

Actuator and table device

Linear motor, exposure apparatus using the same, and device manufacturing method

Coil support unit, motor and exposure apparatus using the same, and device manufacturing method

Planar motor

Method for manufacturing teeth of linear step motors

Electromagnetic actuator

Linear motor and X-Y stage

Hermetically sealed elements of an actuator

Measure system for linear planar stepping motor

Electric motor, elevator with a car movable by an electric motor, and elevator with a car and with an electric motor for movement of a guide element relative to the car

Motor using permanent magnet

Lithographic apparatus and device manufacturing method

System for integrating linear motion guide and reluctance-type linear motor

Direct-driven magnetic rotating apparatus

Linear driving mechanism of electronic components mounting apparatus

Mover combination with two circulation flows

Toroidal-coil linear stepping motor, toroidal-coil linear reciprocating motor, cylinder compressor and cylinder pump using these motors

Linear actuator capable of low-speed driving

Ironless AC linear motor

Dual flow circulation system for a mover

Polygonal structure of a linear motor with ring winding

Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector

Passive braking systems for container shuttles