DIELECTRIC ELASTOMER ACTUATORS AND METHODS OF MANUFACTURING THEREOF

ELECTROSTATIC MOTOR

BIAS VOLTAGE ADJUSTMENT FOR A PHASE LIGHT MODULATOR

Thrust Production via Quantized Inertia

METHOD FOR FABRICATING MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROMECHANICAL SYSTEM (MEMS) ACTUATORS

STACKABLE ACTUATING ELEMENT WITH PROFILED INSULATED ELECTRODE STRUCTURES

FRINGING-FIELD, PARALLEL PLATE ACTUATOR

ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICAL ACTUATOR AND PRODUCTION METHOD THEREOF

MICROELECTROMECHANICAL ACTUATOR STRUCTURE, COMPONENT

MEMS Nanopositioner and Method of Fabrication

DRIVE CIRCUIT OF ELECTROSTATIC FILM ACTUATOR

Electromechanical Soft Actuator Driven by Low Voltage

Electrostatic Motor

Artificial muscles including closing aid, artificial muscle assemblies, and methods of using same

POLYMER MATERIALS INCLUDING COATED NANOVOIDS AND METHODS AND SYSTEMS FOR FORMING THE SAME

ELECTROSTATIC MOTOR HAVING FLUID MANAGEMENT FEATURES

Stackable actuating element with profiled insulated electrode structures

Artificial muscle assemblies comprising a reinforced housing

Micromechanical arm array in micro-electromechanical system (MEMS) actuators

Artificial muscles, artificial muscle assemblies, and methods of using same

MEMS Structure and Method of Forming Same

Wearable Hydraulically Amplified Self-Healing Electrostatic Actuator Systems

Multilayer electrostatic actuator

Thrust Production via Quantized Inertia

MICRO-ELECTROMECHANICAL OPTICAL SHUTTER WITH TRANSLATING SHIELDING STRUCTURES AND RELATED MANUFACTURING PROCESS

FLEXIBLE WIRING BODY, DRIVING SYSTEM, AND IMAGING DEVICE

ROTATIONAL AND TRANSLATIONAL MICROPOSITIONERS USING DEFORMABLE MICROELECTROMECHANICAL SYSTEMS

Low voltage electrostatic jamming device

Actuator

MEMS nanopositioner and method of fabrication

Actuator

Actuator

IMAGING MODULE AND METHOD FOR FABRICATING SAME

Actuator

Electrostatic actuator with 4-bit digital electrode

ARTIFICIAL AIR GAP TRIBOELECTRIC DEVICE FOR APPLICATIONS IN SENSORS, POWER GENERATION AND ENERGY HARVESTING

Micromachined ultrasonic transources with dual out-of-plane and in-plane actuation and displacement

Stackable actuating element with profiled insulated electrode structures

Composite layering of hydraulically amplified self-healing electrostatic transducers

Load-bearing variable stiffening device comprising an electrode structure

Dielectric elastomer drive system and dielectric elastomer drive method

Nanometric electromechanical actuator and method of manufacturing the same

Artificial muscle actuators comprising electrodes with an insulation bilayer

Load-bearing variable stiffening device comprising an electrode structure

Artificial muscles comprising an electrode pair and artificial muscle assemblies including same

Thermal compensation of lens assembly focus using image sensor shift

Stackable actuating element with profiled insulated electrode structures

In-situ monitoring, calibration, and testing of a haptic actuator

Electrostatic zipper

Electrostatic motor

Flexible devices with jamming components

Low Voltage Electrostatic Jamming Device

Electrostatic motor

Capactive micromachined transducer having a high contact resistance part

Electrostatic motor

Electrostatic motor

ELECTROSTATIC MOTOR

Method of producing an electrostatic motor

Fringing-field, parallel plate actuator

Electrostatic motor having fluid management features

Micro electrostatic actuated pneumatic driven motor

BIAS VOLTAGE ADJUSTMENT FOR A PHASE LIGHT MODULATOR

Actuator drive apparatus and method for controlling actuator drive apparatus

Actuated polymer-based dielectric mirrors

Dielectric elastomer transducer and dielectric elastomer driving device

Driver for a circuit with a capacitive load

Actuator

Dielectric nano-fluid for electrostatic machines and actuators

TRANSDUCER DEVICE

ACTUATOR

Soft-bodied fluidic actuator

Driver for a circuit with a capacitive load

MEMS electrostatic actuator with linearized displacements

Transducers with electrostatic repulsion and associated systems and methods

Spatially addressable nanovoided polymers

Nanovoided tunable birefringence

Nanovoided polymers having shaped voids

Soft-bodied actuator with pinched configuration

Engineered loading response in electroactive polymer devices having structured nanovoids

Actuator including elastomer layer and elastic electrodes and method for manufacturing the same

Somersaulting motion of soft bodied structure

Actuator with sealable edge region

Actuator with static activated position

ELECTROSTATIC ACTUATOR

Composite actuator device driven by an electrostatic attractive force when a voltage is applied

MEMS structure and method of forming same

Area efficient single-ended analog-to-digital converter

Highly integrated high voltage actuator driver

MEMS heater or emitter structure for fast heating and cooling cycles

(Meth)acrylic conductive material

Actuator, actuator module, endoscope, endoscope module, and controlling method

System and method for a MEMS device

MEMS actuator structures resistant to shock

MEMS actuator structures resistant to shock

Method of manufacturing actuator

Electric machine with electrodes having modified shapes

Row and column actuator control

Localized Haptics Using Shifting Masses

MULTILAYER STRUCTURE, POLYMER ACTUATOR ELEMENT, SENSOR ELEMENT, AND DEVICE

Electrostatic actuator with tri-electrode topology

Actuator apparatus, electronic device, and control method

Electrostatic actuator and method for manufacturing electrostatic actuator

Method of producing an optoelectronic component, and optoelectronic component

CAPACITIVE TRANSDUCER DRIVE DEVICE AND OBJECT INFORMATION ACQUIRING DEVICE

ELECTROSTATIC CONVERTER

WAFER AND METHOD OF MANUFACTURING THE SAME

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

Optical module and electronic apparatus having wavelength variable interference filter with voltage controller

MEMS structure and method of forming same

Electrostatic actuator, switch device and power supply device

Capacitive actuator motor, capacitive actuator, and capacitive actuator unit

CAPACITIVE ELECTROMECHANICAL TRANSDUCER

Pre-collapsed capacitive micro-machined transducer cell with annular-shaped collapsed region

ACTUATOR AND MOVABLE MIRROR

Flexure shear and strain actuator

MEMS heater or emitter structure for fast heating and cooling cycles

Electrode design and low-cost fabrication method for assembling and actuation of miniature motors with ultrahigh and uniform speed

System and method for a variable flow transducer

Shock caging features for MEMS actuator structures

MEMS actuator structures resistant to shock

IC die, ultrasound probe, ultrasonic diagnostic system and method

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

Electromechanical transducer and method of producing the same

Pulsed start-up system for electrostatic generators

Ultrasonic transducer device with through-substrate via

Apparatus and methods for individual addressing and noise reduction in actuator arrays

Method of forming capacitive MEMS sensor devices

Peg-style electrostatic rotating machine employing dielectric sleeves

Resonance device and filter including the same

Touch-sensitive interface module

Dielectric film, process for producing same, and transducer using same

Row and column actuator control

Stress compensated oscillator circuitry and integrated circuit using the same

Graphene sheet and nanomechanical resonator

CMUT device manufacturing method, CMUT device and apparatus

Capacitive micromachined ultrasonic transducer (CMUT) forming

MEMS piton-tube capacitive force sensor

Peg-style electrostatic rotating machine

DUAL MODE CMUT TRANSDUCER

Device for converting thermal energy into electrical energy

Micro-electro-mechanical system device with enhanced structural strength

Electrostatically deflectable micromechanical device

GARMENT HAVING TRANSDUCER CAPABILITIES

PIEZOELECTRIC ELEMENT INCLUDING MESOPOROUS PIEZOELECTRIC THIN FILM

LAUNCH CONTROL OF MOVABLE LAYER IN ELECTROMECHANICAL DEVICES

Energy-harvesting device

Electrostatic machine system and method of operation

Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer

VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

Electrostatic actuator and method for producing the same

Multi-phased MEMS plate lowering and lifting system and method

Method and technique to control MEMS DVC control waveform for lifetime enhancement

MEMS device

Varying capacitance rotating electrical machine

High displacement ultrasonic transducer

Ultrasonic transducer and method of manufacturing the same

MEMS device and method for manufacturing the MEMS device

Electrical bar latching for low stiffness flexure MEMS actuator

MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT

Method for making a capacitive micromachined ultrasonic transducer

ACTUATOR APPARATUS, ELECTRONIC DEVICE, AND CONTROL METHOD

MEMS structure and method of forming same

Device having element electrode connected to penetrating wire, and method for manufacturing the same

VIBRATOR, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPLIANCE

Supply independent and programmable non-resonant MEMS driver

ASSEMBLY HAVING A MULTILAYER ACTUATOR

Actuator control device, optical module, and electronic apparatus

Actuator control device, optical module, electronic apparatus, and actuator control method

Electromechanical transducer

Micro-electro-mechanical transducer having an optimized non-flat surface

Resonant energy harvester, aircraft component comprising the resonant energy harvester and an aircraft comprising the resonant energy harvester or the aircraft component

Micro-electro-mechanical transducer having an optimized non-flat surface

Micro-electro-mechanical transducer having an optimized non-flat surface

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

Capacitive micro-machined transducer and method of manufacturing the same

Capacitive micromachined ultrasound transducer

Wafer and method of manufacturing the same

SWITCHED CAPACITIVE DEVICES AND METHOD OF OPERATING SUCH DEVICES

Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator

ULTRASONIC TRANSDUCER WITH DIELECTRIC ELASTOMER AS ACTIVE LAYER

Vibrator, oscillator, electronic device, and moving object

Vibrator, oscillator, electronic device, and moving object

VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT

Actuator drive system, optical module, and electronic apparatus

MOVABLE MEMS ELEMENT WITH STICTION MITIGATING SPRING

Capacitive electromechanical transducer

Electrostatic induction conversion device and DC-DC converter

Vibration power generator and power generator

Paper-base flexible power-generation apparatus, and manufacturing method thereof

Electrostatic capacitance transducer, probe, and subject information acquiring device

TRANSDUCER AND SUBJECT INFORMATION ACQUISITION APPARATUS

MEMS device and methods for manufacturing and using same

Capacitive micro-machined transducer and method of manufacturing the same

Actuator and movable mirror

CAPACITIVE TRANSDUCER DRIVE DEVICE AND OBJECT INFORMATION ACQUIRING DEVICE

VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, MOVING OBJECT, AND METHOD OF MANUFACTURING VIBRATOR

Integrated MEMS design for manufacturing

Actuator plate partitioning and control devices and methods

Display apparatus with narrow gap electrostatic actuators

Pre-collapsed capacitive micro-machined transducer cell with annular-shaped collapsed region

Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures

Compensation of changes in MEMS capacitive transduction

ELECTROSTATIC GENERATOR/MOTOR DESIGNS CAPABLE OF OPERATION WITH THE ELECTRODES IMMERSED IN A LIQUID OR PRESSURIZED GAS

Method of manufacturing optical image stabilizer

Capacitive MEMS sensor devices

Capacitive micromachined ultrasound transducers with pressurized cavities

Capacitive micromachined ultrasonic transducer (CMUT) device with through-substrate via (TSV)

Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug

Stiction resistant mems device and method of operation

VIBRATION ELEMENT AND ELECTRONIC DEVICE

Electrostatic comb actuator, deformable mirror using the electrostatic comb actuator, adaptive optics system using the deformable mirror, and scanning laser ophthalmoscope using the adaptive optics system

VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, AND MOBILE UNIT

Vibration power generator and vibration power generation device, and communication device and electronic equipment with vibration power generation device

MEMS device with independent rotation in two axes of rotation

MEMS device, electronic apparatus, and manufacturing method of MEMS device

Electronic device

SYSTEM AND METHOD OF SENSING ACTUATION AND RELEASE VOLTAGES OF INTERFEROMETRIC MODULATORS

SYSTEM AND METHOD OF SENSING ACTUATION AND RELEASE VOLTAGES OF INTERFEROMETRIC MODULATORS

Method and apparatus for sensing signals

Multi-State Electrostatic Actuator and Digital Camera Therewith

Method and apparatus for sensing underwater signals

Micromechanical device

Axially gapped electrostatic machine having drive structure configured to recycle charge

Apparatus and methods for individual addressing and noise reduction in actuator arrays

GRAPHENE SHEET AND NANOMECHANICAL RESONATOR

Tilting actuator with close-gap electrodes

Microelectromechanical systems (MEMS) resonators and related apparatus and methods

Microelectromechanical systems (MEMS) resonators and related apparatus and methods

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

Semiconductor device and drive method of electrostatic actuator

Varying capacitance rotating electrical machine

Apparatus for use as a motor or generator

Cascaded electrostatic actuator

Rotationally deployed actuator devices

Multiple degree of freedom actuator

Electrostatic actuator control

Row and column actuator control

MEMS actuator/sensor

Method for manufacturing an electromechanical transducer

MEMS structure and method of forming same

Display device

Microelectromechanical systems (MEMS) resonators and related apparatus and methods

Electromechanical transducer and method of producing the same

Sensor with energy-harvesting device

Electrostatic actuator of a mobile structure with improved relaxation of trapped charges

Electrostatic operation device

MEMS device and methods for manufacturing and using same

METHOD OF MAKING A MULTILAYER COMPOSITE

Electrostatic actuator apparatus

Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer

Mechanical meta-materials

Nanometer Scale Instrument for Biochemically, Chemically, or Catalytically Interacting with a Sample Material

Selectively rigidizable and actively steerable articulatable device

Micromechanical component and production method for a micromechanical component

Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner

Conductive film, and transducer and flexible wiring board using the same

ACTUATING DEVICE, MICROSYSTEM DEVICE, AND METHOD FOR CONTROLLING A MICROMECHANICAL ACTUATOR

Capacitive electromechanical transducer

Via structure and method thereof

Micro-electro-mechanical transducer having an optimized non-flat surface

Semiconductor device and method of controlling electrostatic actuator

Nanofiber actuators and strain amplifiers

Two-dimensional comb-drive actuator and manufacturing method thereof

DIELECTRIC FILM, PROCESS FOR PRODUCING SAME, AND TRANSDUCER USING SAME

Optical image stabilizer and method of manufacturing the same

Silicon oxide electret electrode with laminate insulating film surrounding short conductive film

Methods for operating an electrostatic drive, and electrostataic drives

ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT

Cascaded micromechanical actuator structure

Electrostatic actuator apparatus

Electrostatic actuator apparatus and method of driving the same

MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME

Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same

MEMS sprung cantilever tunable capacitors and methods

Capacitive micromachine ultrasound transducer

Electrostatic actuator including a plurality of urging units with varying rigities

Electrostatic comb actuator

Micro-electro-mechanical transducer having a surface plate

Process for fabricating MEMS devices

Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator

Electret and electrostatic induction conversion device

Micro-electro mechanical system using snapping tabs, comb and parallel plate actuation

MEMS device with independent rotation in two axes of rotation

Microactuator, optical device, display apparatus, exposure apparatus, and method for producing device

Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator

Voltage generating circuit for electrostatic MEMS actuator

Micro-Motor

ELECTROSTATIC DRIVE MEMS ELEMENT AND METHOD OF PRODUCING THE SAME

Micro movable device and interferometer

MEMS ultrasonic device having a PZT and cMUT

Electrostatic drive, method for operating a micromechanical component having an electrostatic drive, and method for manufacturing an electrostatic drive

Reduced voltage MEMS electrostatic actuation methods

Oscillating device, optical scanning device using the same, image display apparatus, and control method of the oscillating device

SELF-SENSING DIELECTRIC ACTUATOR SYSTEM

Biased gap-closing actuator

Electrostatic actuator

Electrostatic acting device including an electret film

Micro movable device and optical switching apparatus

Actuator capable of driving with large rotational angle or large deflection angle

Actuator, image projection apparatus and production method for actuator