218120 ⎘
Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for by Foucault currents
NOVEL ELECTROMAGNETIC PROPULSION AND LEVITATION TECHNOLOGY
#2Magnetically lifted vehicles using hover engines
#3Magnetically lifted vehicles using hover engines
#4Magnetically lifted vehicles using hover engines
#5Magnetic levitation apparatus
#6ALIGNMENT APPARATUS AND EXPOSURE APPARATUS USING THE SAME
#7Alignment apparatus and exposure apparatus using the same
#8Z actuator with anti-gravity
#9Magnetic levitation apparatus
#10Alignment apparatus and exposure apparatus using the same
#11Three axis active magnetic levitation for inertial sensing systems
#12Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby
#13Method of controlling propulsion and suspension of linear induction motors