220539 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details; Tuning of film bulk acoustic resonators [FBAR] by application of heat from a heat source
Microelectromechanical resonator
#2Microelectromechanical resonator
#3Microelectromechanical resonator
#4Microelectromechanical resonator
#5Microelectromechanical resonator
#6Tunable narrow bandpass MEMS technology filter using an arch beam microresonator
#7Method for manufacturing a piezoelectric device
#8Microelectromechanical resonator
#9Bulk acoustic wave resonator with adjustable resonance frequency and use of such a resonator in the field of telephony
#10Bulk acoustic resonator with matched resonance frequency and fabrication process