220540 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details; Tuning of film bulk acoustic resonators [FBAR] Electrically tuning
Sub-classes:Zero-output coupled resonator filter and related radio frequency filter circuit
#2Method for fabricating resonator structure and resonator structure
#3High-voltage converter based tuning of acoustic filters
#4Co-integrated bulk acoustic wave resonators
#5Acoustic structure comprising at least one resonator and at least one cointegrated capacitor in one and the same piezoelectric or ferroelectric layer
#6Tunable BAW resonator with ion-conductible structure