220548 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators Design
RESONATOR ELEMENT
#2RESONATOR ELEMENT
#3DUAL-MODE MEMS RESONATORS WITH LOW SUPPORT LOSS
#4Microelectromechanical Devices For Higher Order Passive Temperature Compensation and Methods of Designing Thereof
#5Micromechanical resonator having reduced size
#6Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#7Multiple coil spring MEMS resonator
#8Compound spring MEMS resonators for frequency and timing generation
#9Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations
#10MEMS element and oscillator
#11Methods and apparatus for mechanical resonating structures
#12Self-polarized capacitive micromechanical resonator apparatus and fabrication method
#13Method of manufacturing a microelectromechanical system (MEMS) resonator
#14Resonator and method of controlling the same
#15Micro-electromechanical resonator geometry
#16Method for fabricating a microelectromechanical system (MEMS) resonator
#17Techniques for adding compensating material(s) in semiconductor devices
#18Temperature stable MEMS resonator
#19Temperature stable MEMS resonator
#20Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making
#21Temperature stable MEMS resonator