Patents-Review.com
ClassID:

220722 ⎘

H03H2009/155 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators consisting of piezo-electric or electrostrictive material using MEMS techniques

Recent Application in this class:
#1
20260142643
2026-05-21

WAFER-LEVEL-PACKAGED SILICON-PIEZOELECTRIC RESONATOR

 #2
20260100691
2026-04-09

Multiple Cantilever MEMS Resonator

 #3
20250373224
2025-12-04

THIN-FILM SUSPENDED MICROACOUSTIC RESONATORS FOR TIMING APPLICATIONS

 #4
20250317117
2025-10-09

SELF-REFERENCING MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR WITH DUAL MECHANICAL MODES FOR TEMPERATURE-INDEPENDENT ENVIRONMENTAL SENSING

 #5
20250293668
2025-09-18

TUNING-FORK-TYPE DRIVING ELEMENT AND LIGHT DEFLECTION ELEMENT

 #6
20250271513
2025-08-28

RESONANT MAGNETIC SENSOR

 #7
20250266801
2025-08-21

LATERALLY-DOPED MEMS RESONATOR WITH PIEZOELECTRIC LAYER

 #8
20250253826
2025-08-07

SEALED-CAVITY BULK ACOUSTIC-WAVE RESONATOR AND METHOD FOR MANUFACTURING

 #9
20250239989
2025-07-24

Microelectromechanical resonator

 #10
20250239984
2025-07-24

Piezo-actuated MEMS

 #11
20250080083
2025-03-06

Vibration Device

 #12
20250062744
2025-02-20

Quartz MEMS Piezoelectric Resonator for Chipscale RF Antennae

 #13
20250055440
2025-02-13

MEMS RESONATOR

 #14
20250007492
2025-01-02

Microelectromechanical resonator

 #15
20240375940
2024-11-14

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

 #16
20240372530
2024-11-07

SYSTEMS AND METHODS FOR ABSORPTION TUNING FOR TOTAL WAVE ABSORPTION AND REFLECTION

 #17
20240305266
2024-09-12

RESONATOR AND RESONANCE DEVICE

 #18
20240223151
2024-07-04

Piezo-actuated MEMS resonator with reduced nonlinear tcf

 #19
20240154599
2024-05-09

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPONDING MANUFACTURING PROCESS

 #20
20230412140
2023-12-21

MEMS resonator with high quality factor and its use

 #21
20230327640
2023-10-12

NON-LINEAR TETHERS FOR SUSPENDED DEVICES

 #22
20230253951
2023-08-10

Laterally Vibrating Bulk Acoustic Wave Resonator

 #23
20230116933
2023-04-20

Piezoelectric MEMS resonators based on porous silicon technologies

 #24
20220404611
2022-12-22

Power efficiency optimization method of LC resonant driver for MEMS mirrors

 #25
20220385262
2022-12-01

Acoustic resonator device with controlled placement of functionalization material

 #26
20220337218
2022-10-20

Microelectromechanical resonator

 #27
20220166403
2022-05-26

Microelectromechanical resonator

 #28
20220153573
2022-05-19

PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

 #29
20220140813
2022-05-05

Quartz MEMS piezoelectric resonator for chipscale RF antennae

 #30
20220077848
2022-03-10

Microelectromechanical tunable delay line circuit

 #31
20210409000
2021-12-30

Piezoelectric MEMS resonators based on porous silicon technologies

 #32
20210194454
2021-06-24

Resonance device

 #33
20210184651
2021-06-17

Resonator and resonance device

 #34
20210167751
2021-06-03

Resonance device

 #35
20210159875
2021-05-27

Piezo-actuated MEMS resonator

 #36
20210135649
2021-05-06

Non-linear tethers for suspended devices

 #37
20210099154
2021-04-01

Piezoelectric microelectromechanical resonator device and corresponding manufacturing process

 #38
20200389149
2020-12-10

Microfabricated notch filter

 #39
20200382097
2020-12-03

Method for generating high order harmonic frequencies and MEMS resonator

 #40
20200373908
2020-11-26

Using acoustic reflector to reduce spurious modes

 #41
20200280300
2020-09-03

Piezoelectric resonator with patterned resonant confiners

 #42
20200266798
2020-08-20

Micromachined ultrasound transducer using multiple piezoelectric materials

 #43
20200266790
2020-08-20

Thin-film bulk acoustic resonator and semiconductor apparatus comprising the same

 #44
20200259479
2020-08-13

Fin bulk acoustic resonator technology for UHF and SHF signal processing

 #45
20200244222
2020-07-30

Resonance device

 #46
20200136589
2020-04-30

Acoustic filter apparatus having configurable parallel resonance frequencies

 #47
20200067484
2020-02-27

Vibrator device, manufacturing method of vibrator device, electronic device, and vehicle

 #48
20200028485
2020-01-23

Microelectromechanical resonator

 #49
20200021272
2020-01-16

Laterally vibrating bulk acoustic wave resonator

 #50
20200018794
2020-01-16

Oscillator, electronic device, and vehicle

 #51
20190393859
2019-12-26

Electrical device and method for manufacturing the same

 #52
20190305749
2019-10-03

Piezoelectric single crystal silicon carbide microelectromechanical resonators

 #53
20190305744
2019-10-03

Method of fabricating a SiC resonator

 #54
20190296713
2019-09-26

Guided wave devices with selectively loaded piezoelectric layers

 #55
20190296712
2019-09-26

Resonance device

 #56
20190222196
2019-07-18

Distributed-mode beam and frame resonators for high frequency timing circuits

 #57
20190131953
2019-05-02

Interdigital transducers on a piezoelectric thin-film for signal compression

 #58
20190109578
2019-04-11

Resonator and resonance device

 #59
20190097600
2019-03-28

Resonator and resonance device

 #60
20190089321
2019-03-21

Resonance device manufacturing method

 #61
20190074812
2019-03-07

Resonator and resonance device

 #62
20190074811
2019-03-07

Resonator and resonance device

 #63
20190007026
2019-01-03

Gallium nitride structure, piezoelectric element, method of manufacturing piezoelectric element, and resonator using piezoelectric element

 #64
20180358406
2018-12-13

Techniques for integrating three-dimensional islands for radio frequency (RF) circuits

 #65
20180254761
2018-09-06

Switchable filters and design structures

 #66
20180226942
2018-08-09

Piezo-actuated MEMS resonator with surface electrodes

 #67
20180219529
2018-08-02

Bulk mode microelectromechanical resonator devices and methods

 #68
20180205363
2018-07-19

Resonator and resonance device

 #69
20180183403
2018-06-28

Corner coupling resonator array

 #70
20180175825
2018-06-21

MEMS resonator with suppressed spurious modes

 #71
20180175824
2018-06-21

Resonator and resonation device

 #72
20180159501
2018-06-07

Electronic component and method of manufacturing the same

 #73
20180138886
2018-05-17

Piezoelectric micromechanical resonator

 #74
20180097499
2018-04-05

Nano- and microelectromechanical resonators

 #75
20180083181
2018-03-22

Two-dimensional mode resonators

 #76
20180077497
2018-03-15

Cantilevered shear resonance microphone

 #77
20180069527
2018-03-08

MEMS resonator with a high quality factor

 #78
20180054180
2018-02-22

Resonator

 #79
20180048286
2018-02-15

Resonator and resonance device

 #80
20180048284
2018-02-15

Resonator

 #81
20180048280
2018-02-15

Acoustic resonator device with controlled placement of functionalization material

 #82
20180034438
2018-02-01

Acoustic resonator devices and methods with noble metal layer for functionalization

 #83
20180019724
2018-01-18

Temperature-engineered MEMS resonator

 #84
20170366154
2017-12-21

Switchable filters and design structures

 #85
20170366153
2017-12-21

Switchable filters and design structures

 #86
20170366107
2017-12-21

MEMS device for harvesting sound energy and methods for fabricating same

 #87
20170294894
2017-10-12

Piezoelectric thin film and piezoelectric vibrator

 #88
20170294892
2017-10-12

Fluidic sensor device having UV-blocking cover

 #89
20170288642
2017-10-05

Piezoelectric package-integrated contour mode filter devices

 #90
20170288635
2017-10-05

Piezoelectric package-integrated crystal devices

 #91
20170288629
2017-10-05

Solidly mounted layer thin film device with grounding layer

 #92
20170268931
2017-09-21

Uncooled, high sensitivity spectral selective infrared detector

 #93
20170264263
2017-09-14

Manufacturing of thin-film bulk acoustic resonator and semiconductor apparatus comprising the same

 #94
20170214385
2017-07-27

Guided wave devices with selectively loaded piezoelectric layers

 #95
20170214384
2017-07-27

Guided wave devices with sensors utilizing embedded electrodes

 #96
20170214383
2017-07-27

Mixed domain guided wave devices utilizing embedded electrodes

 #97
20170214382
2017-07-27

Guided wave devices with embedded electrodes and non-embedded electrodes

 #98
20170214381
2017-07-27

Guided wave devices with selectively thinned piezoelectric layers

 #99
20170201226
2017-07-13

Piezoelectric vibrator and piezoelectric vibration device

 #100
20170194934
2017-07-06

Micromachined ultrasound transducer using multiple piezoelectric materials

 #101
20170187347
2017-06-29

Piezoelectric MEMS resonator with integrated phase change material switches

 #102
20170170805
2017-06-15

DUAL TRENCH DEEP TRENCH BASED UNRELEASED MEMS RESONATORS

 #103
20170170803
2017-06-15

Nano- and microelectromechanical resonators

 #104
20170163240
2017-06-08

Nano- and micro-electromechanical resonators

 #105
20170149408
2017-05-25

Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response

 #106
20170134001
2017-05-11

Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization

 #107
20170125656
2017-05-04

Phononic metamaterials comprising atomically disordered resonators

 #108
20170122912
2017-05-04

Fluidic device with fluid port orthogonal to functionalized active region

 #109
20170117871
2017-04-27

Acoustic resonator devices and methods providing patterned functionalization areas

 #110
20170093361
2017-03-30

Microelectromechanical resonator

 #111
20160329877
2016-11-10

Piezoelectric vibrator and piezoelectric vibration device

 #112
20160322954
2016-11-03

MEMS device

 #113
20160322953
2016-11-03

Piezoelectric vibrator and piezoelectric vibrating apparatus

 #114
20160219719
2016-07-28

Method of trimming a component and a component trimmed by such a method

 #115
20160211826
2016-07-21

Passive wireless sensor including piezoelectric MEMS resonator

 #116
20160065169
2016-03-03

Nano- and micro-electromechanical resonators

 #117
20160064642
2016-03-03

Vibrating device

 #118
20160028374
2016-01-28

Apparatus and method for tuning a resonance frequency

 #119
20160006412
2016-01-07

Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations

 #120
20150372660
2015-12-24

Switchable filters and design structures

 #121
20150344293
2015-12-03

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

 #122
20150318838
2015-11-05

Enhanced MEMS vibrating device

 #123
20150288345
2015-10-08

MEMS resonator with functional layers

 #124
20150229290
2015-08-13

Alkali-niobate-based piezoelectric thin film element

 #125
20150015930
2015-01-15

Nanophononic metamaterials

 #126
20140230560
2014-08-21

Three dimensional piezoelectric MEMS

 #127
20140210315
2014-07-31

MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer

 #128
20140210314
2014-07-31

MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer

 #129
20140184347
2014-07-03

Microelectronic machine-based ariable

 #130
20140008741
2014-01-09

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

 #131
20130235001
2013-09-12

PIEZOELECTRIC RESONATOR WITH AIRGAP

 #132
20130214877
2013-08-22

Method of manufacturing switchable filters

 #133
20130122627
2013-05-16

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

 #134
20130119491
2013-05-16

Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure

 #135
20130119490
2013-05-16

Methods of manufacturing integrated semiconductor devices with single crystalline beam

 #136
20120295384
2012-11-22

Method of manufacturing a microelectromechanical system (MEMS) resonator

 #137
20120081195
2012-04-05

Lateral over-moded bulk acoustic resonators

 #138
20090158566
2009-06-25

Method for fabricating a microelectromechanical system (MEMS) resonator

 #139
18449089
2025-05-13

Techniques for adding compensating material(s) in semiconductor devices

 #140
17901748
2023-09-19

Temperature stable MEMS resonator

 #141
17363386
2022-10-11

Temperature stable MEMS resonator

 #142
16269499
2023-02-14

Nonlinear acoustic medium

 #143
15965652
2022-02-01

Quartz MEMS piezoelectric resonator for chipscale RF antennae

 #144
15916088
2020-01-21

Temperature stable MEMS resonator

 #145
15912551
2026-02-17

Laterally-doped MEMS resonator with piezoelectric layer

 #146
15387375
2018-04-17

Temperature stable MEMS resonator

 #147
15265340
2018-12-04

Trimming method for microresonators and microresonators made thereby

 #148
15149026
2018-11-27

High Q quartz-based MEMS resonators and method of fabricating same

 #149
14863337
2017-01-17

Temperature stable MEMS resonator

 #150
14617753
2017-07-11

Temperature-engineered MEMS resonator

 #151
14191939
2015-09-29

Temperature stable MEMS resonator

 #152
14136991
2018-04-24

Methods and apparatus for anchoring resonators

 #153
14032871
2016-03-01

Micromechanical devices based on piezoelectric resonators

 #154
13649025
2016-05-10

Microresonator electrode design

 #155
12202624
2016-06-14

Method for manufacturing a vibrating MEMS circuit