220520 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices; Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
METHODS OF FORMING EPITAXIAL AlScN RESONATORS WITH SUPERLATTICE STRUCTURES INCLUDING AlGaN INTERLAYERS AND VARIED SCANDIUM CONCENTRATIONS FOR STRESS CONTROL AND RELATED STRUCTURES
#2PIEZOELECTRIC ELEMENT AND ELECTRONIC DEVICE
#3FILM STRUCTURE AND ELECTRONIC DEVICE
#4FBAR STRUCTURE HAVING SINGLE CRYSTALLINE PIEZOELECTRIC LAYER AND FABRICATING METHOD THEREOF
#5PIEZOELECTRIC MATERIALS, DEVICES AND METHODS OF FABRICATING SAID DEVICES
#6ZERO COUPLING BO REGION FOR BAW RESONATORS USING ANTIPARALLEL POLARIZATION PART
#7METHOD FOR THE PRODUCTION OF A SINGLE-CRYSTAL FILM, IN PARTICULAR PIEZOELECTRIC
#8ACOUSTIC WAVE DEVICE
#9ACOUSTIC WAVE DEVICE
#10VIBRATOR
#11MULTI-PIEZO ACOUSTIC WAVE DEVICES
#12STRAINED PIEZOELECTRIC DEVICES FOR RADIOFREQUENCY RESONATORS AND FABRICATION METHODS THEREOF
#13METHODS OF FORMING PIEZOELECTRIC LAYER WITH DIFFERENT STRUCTURE IN DIFFERENT REGIONS OF BULK ACOUSTIC WAVE DEVICE
#14BULK ACOUSTIC WAVE DEVICE INCLUDING PIEZOELECTRIC LAYER WITH ENGINEERED REGION
#15TEMPERATURE COMPENSATED BULK ACOUSTIC WAVE DEVICE INCLUDING PIEZOELECTRIC LAYER WITH ENGINEERED REGION
#16EPITAXIAL GROWTH OF ALUMINUM ON ALUMINUM-NITRIDE COMPOUNDS
#17ACOUSTIC WAVE DEVICE
#18ACOUSTIC WAVE DEVICE
#19ACOUSTIC WAVE DEVICE
#20ACOUSTIC RESONATOR
#21ACOUSTIC WAVE DEVICE
#22ACOUSTIC WAVE DEVICE
#23ACOUSTIC WAVE DEVICE
#24ACOUSTIC WAVE DEVICE INCLUDING ION IMPLANTED PIEZOELECTRIC LAYER
#25SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS AND FILTERS
#26RESONATOR WITH COMPLEMENTARILY ORIENTED PIEZOELECTRIC STRUCTURE
#27ACOUSTIC WAVE DEVICE
#28ACOUSTIC WAVE DEVICE
#29ASYMMETRIC RESONATOR STACK FOR HIGH ELECTROMECHANICAL COUPLING
#30BRAGG STACK STRUCTURE FOR SPURIOUS MODE SUPPRESSION IN SOLIDLY-MOUNTED ACOUSTIC RESONATOR
#31SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE
#32TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH BURIED OXIDE STRIP ACOUSTIC CONFINEMENT STRUCTURES
#33TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A CAVITY HAVING ROUND END ZONES
#34ACOUSTIC WAVE DEVICE
#35FILTERS USING TRANSVERSLY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH FREQUENCY-SETTING DIELECTRIC LAYERS
#36CIRCUITS, DEVICES AND METHODS FOR HARMONIC CONTROL
#37ACOUSTIC WAVE DEVICE AND FILTER APPARATUS
#38ACOUSTIC WAVE DEVICE
#39METHODS OF FORMING PIEZOELECTRIC LAYERS HAVING ALTERNATING POLARIZATIONS
#40ACOUSTIC WAVE DEVICE
#41ACOUSTIC WAVE DEVICE
#42ACOUSTIC WAVE DEVICE
#43BULK ACOUSTIC WAVE FILTERS WITH DIFFERENTLY DOPED ALUMINUM NITRIDE RESONATORS
#44ACOUSTIC WAVE DEVICE
#45ACOUSTIC WAVE DEVICE
#46FILTER USING TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH DIVIDED FREQUENCY-SETTING DIELECTRIC LAYERS
#47BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
#48METHOD FOR FORMING AN ALUMINUM NITRIDE LAYER
#49METHODS OF FORMING FILMS INCLUDING SCANDIUM AT LOW TEMPERATURES USING CHEMICAL VAPOR DEPOSITION TO PROVIDE PIEZOELECTRIC RESONATOR DEVICES AND/OR HIGH ELECTRON MOBILITY TRANSISTOR DEVICES
#50ACOUSTIC WAVE DEVICE
#51ACOUSTIC WAVE DEVICE
#52ACOUSTIC WAVE DEVICE WITH MULTIPLE PIEZOELECTRIC LAYERS
#53ACOUSTIC RESONATOR SOLIDLY MOUNTED ON A HIGH ACOUSTIC VELOCITY SUBSTRATE
#54TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A BACK-SIDE DIELECTRIC LAYER
#55ALUMINUM NITRIDE DOPANT SCHEME FOR BULK ACOUSTIC WAVE DEVICES
#56TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR
#57ACOUSTIC WAVE DEVICE
#58ACOUSTIC WAVE DEVICE
#59LATERALLY EXCITED BULK WAVE DEVICE WITH ACOUSTIC MIRRORS
#60ACOUSTIC WAVE DEVICE AND COMPOSITE FILTER DEVICE
#61BULK ACOUSTIC WAVE RESONATOR, FILTER, AND ELECTRONIC DEVICE
#62ACOUSTIC WAVE DEVICE
#63ACOUSTIC WAVE DEVICE
#64ACOUSTIC WAVE DEVICE WITH MULTI-LAYER SUBSTRATE INCLUDING CERAMIC
#65ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#66ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#67TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FILTERS WITH SUB-RESONATORS HAVING DIFFERENT MARK AND PITCH
#68ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
#69ACOUSTIC WAVE DEVICE WITH MULTI-LAYER SUBSTRATE INCLUDING CERAMIC
#70ACOUSTIC WAVE DEVICE
#71Transversely-excited film bulk acoustic resonator with periodic etched holes
#72XBAR resonators with non-rectangular diaphragms
#73ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#74ACOUSTIC WAVE DEVICE AND FILTER DEVICE
#75ACOUSTIC WAVE DEVICE
#76ACOUSTIC WAVE DEVICE
#77ACOUSTIC WAVE DEVICE, FILTER, MULTIPLEXER, AND WAFER
#78BULK FILTER
#79RECONFIGURABLE ACOUSTIC WAVE RESONATORS AND FILTERS
#80Multi-port filter using transversely-excited film bulk acoustic resonators
#81FREQUENCY-TUNABLE FILM BULK ACOUSTIC RESONATOR AND PREPARATION METHOD THEREFOR
#82PIEZOELECTRIC BULK WAVE DEVICE AND MANUFACTURING METHOD THEREOF
#83PIEZOELECTRIC BULK WAVE DEVICE
#84ACOUSTIC WAVE DEVICE
#85ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#86Solidly-mounted transversely-excited film bulk acoustic resonator
#87Two dimensional rod resonator for RF filtering
#88RESONATOR WITH INTRINSIC SECOND HARMONIC CANCELLATION
#89Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
#90Transversely-excited film bulk acoustic resonator
#91Decoupled transversely-excited film bulk acoustic resonators
#92METHOD AND STRUCTURE FOR HIGH PERFORMANCE RESONANCE CIRCUIT WITH SINGLE CRYSTAL PIEZOELECTRIC CAPACITOR DIELECTRIC MATERIAL
#93ACOUSTIC WAVE CLOCK DISTRIBUTION
#94ACOUSTIC WAVE DEVICE
#95ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
#96ACOUSTIC WAVE DEVICE
#97ACOUSTIC WAVE DEVICE WITH WURTZITE BASED PIEZOELECTRIC LAYER
#98Transversely-excited acoustic resonator with Z-cut lithium niobate plate
#99ACOUSTIC WAVE DEVICE
#100SUSPENDED COMPONENTS AND FUNCTIONAL FRAMES
#101ACOUSTIC WAVE DEVICE
#102ACOUSTIC WAVE DEVICE
#103ACOUSTIC WAVE DEVICE WITH WURTZITE BASED PIEZOELECTRIC LAYER WITH HIGH ACOUSTIC VELOCITY
#104COMPOSITE FILTER DEVICE
#105Radio-frequency circuits and devices having harmonic suppression
#106TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED SPURIOUS MODES
#107ACOUSTIC WAVE DEVICE
#108BULK-ACOUSTIC WAVE RESONATOR
#109ACOUSTIC WAVE DEVICE
#110ACOUSTIC WAVE DEVICE AND LADDER FILTER
#111Bulk acoustic wave resonator and fabrication method thereof
#112Transversely-excited film bulk acoustic resonator with recessed rotated-Y-X cut lithium niobate
#113ACOUSTIC WAVE DEVICE, FILTER, AND MULTIPLEXER
#114ACOUSTIC WAVE DEVICE
#115ACOUSTIC WAVE DEVICE
#116ACOUSTIC WAVE DEVICE
#117Acoustic wave device
#118ACOUSTIC WAVE DEVICE
#119PIEZOELECTRIC THIN FILM RESONATOR
#120TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FOR REDUCED YX-CUT PIEZOELECTRIC COUPLING
#121Electrode-defined unsuspended acoustic resonator
#122METHOD FOR MANUFACTURING ACOUSTIC RESONATOR IN LATERAL EXCITATION SHEAR MODE
#123ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#124ACOUSTIC WAVE DEVICE
#125ACOUSTIC RESONATOR IN TRANSVERSE EXCITATION SHEAR MODE
#126ACOUSTIC WAVE DEVICE
#127TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH GAP DIELECTRIC STRIPES IN BUSBAR-ELECTRODE GAPS
#128ACOUSTIC WAVE DEVICE
#129LAYERED SOLID STATE ELEMENT COMPRISING A FERROELECTRIC LAYER AND METHOD FOR MANUFACTURING THE SAME
#130ACOUSTIC WAVE DEVICE
#131FILTER
#132ACOUSTIC WAVE DEVICE
#133ACOUSTIC WAVE DEVICE
#134Laterally excited bulk wave device with acoustic mirrors
#135ACOUSTIC WAVE DEVICE
#136ACOUSTIC WAVE DEVICE
#137ACOUSTIC WAVE DEVICE
#138Filter
#139Piezoelectric MEMS resonators based on porous silicon technologies
#140METHOD FOR FORMING A PIEZOELECTRIC FILM
#141Resonator shapes for bulk acoustic wave (BAW) devices
#142ACOUSTIC WAVE DEVICE
#143Piston mode lamb wave resonators
#144PIEZOELECTRIC FILM LAMINATED BODY AND MANUFACTURING METHOD OF THE SAME
#145Bulk acoustic wave resonator and fabrication method thereof
#146BULK-ACOUSTIC WAVE RESONATOR
#147GALLIUM NITRIDE (GAN) INTEGRATED CIRCUIT TECHNOLOGY WITH RESONATORS
#148LAMINATE, RELEASED LAMINATE, AND METHOD FOR MANUFACTURING RESONATOR
#149RF BAW RESONATOR FILTER ARCHITECTURE FOR 6.5GHZ WI-FI 6E COEXISTENCE AND OTHER ULTRA-WIDEBAND APPLICATIONS
#150Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#151Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#152Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#153METHODS OF FORMING EPITAXIAL AlScN RESONATORS WITH SUPERLATTICE STRUCTURES INCLUDING AlGaN INTERLAYERS AND VARIED SCANDIUM CONCENTRATIONS FOR STRESS CONTROL AND RELATED STRUCTURES
#154Bulk Acoustic Wave Resonator with Improved Structures
#155TRANSDUCER STRUCTURE FOR AN ACOUSTIC WAVE DEVICE
#156FILTER DEVICE
#157Method of manufacturing an FBAR structure
#158ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD THEREOF
#159Acoustic wave resonator RF filter circuit and system
#160Acoustic wave resonator RF filter circuit and system
#161Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#162Solidly-mounted transversely-excited film bulk acoustic device and method
#163Bulk acoustic wave filter having release hole and fabricating method of the same
#164Epitaxial growth of aluminum on aluminum-nitride compounds
#165Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures
#166Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures
#167Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures
#168RF BAW RESONATOR FILTER ARCHITECTURE FOR 6.5GHZ WI-FI 6E COEXISTENCE AND OTHER ULTRA-WIDEBAND APPLICATIONS
#169RF filter circuit including BAW resonators
#170ACOUSTIC WAVE DEVICE HAVING STACKED PIEZOELECTRIC LAYERS BETWEEN ELECTRODES
#171ACOUSTIC WAVE DEVICE
#172Method for forming bulk acoustic wave resonance device
#173ELASTIC WAVE DEVICE
#174WAFER SCALE PACKAGING
#175TWO-DIMENSIONAL HIGH-PERFORMANCE RESONATOR
#176Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#177PIEZOELECTRIC ELEMENT
#178PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHODS FOR MAKING THE SAME
#179PATTERNED SUBSTRATE, SEMICONDUCTOR DEVICE AND NANOTUBE STRUCTURE
#180Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
#181Electrode-defined unsuspended acoustic resonator
#1825 and 6 GHz Wi-Fi coexistence acoustic wave resonator RF diplexer circuit
#183Hybrid bulk acoustic wave filter
#184Decoupled transversely-excited film bulk acoustic resonators
#185ACOUSTIC WAVE DEVICE
#186Strain compensated rare earth group III-nitride heterostructures
#187Transversely-excited film bulk acoustic resonator with periodic etched holes
#188Acoustic wave device
#189ACOUSTIC WAVE DEVICE
#190Acoustic wave device
#191ACOUSTIC WAVE DEVICE
#192Acoustic wave device
#193ACOUSTIC WAVE DEVICE
#194ACOUSTIC WAVE DEVICE AND FILTER DEVICE
#195Acoustic wave device
#196Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material
#197BULK-ACOUSTIC WAVE RESONATOR AND METHOD FOR FABRICATING BULK-ACOUSTIC WAVE RESONATOR
#198Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
#199Rotation in XY plane to suppress spurious modes in XBAR devices
#200Transversely-excited film bulk acoustic resonator with etched conductor patterns
#201DOPED CRYSTALLINE PIEZOELECTRIC RESONATOR FILMS AND METHODS OF FORMING DOPED SINGLE CRYSTALLINE PIEZOELECTRIC RESONATOR LAYERS ON SUBSTRATES VIA EPITAXY
#202FBAR structure having single crystalline piezoelectric layer and fabricating method thereof
#203Lithium niobate or lithium tantalate FBAR structure and fabricating method thereof
#204Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
#205Transversely-excited film bulk acoustic resonator with low thermal impedance
#206Transversely-excited film bulk acoustic resonator with low thermal impedance
#207Transversely-excited film bulk acoustic resonator with low thermal impedance
#208FBAR structure and manufacturing method of same
#209FBAR STRUCTURE HAVING SINGLE CRYSTALLINE PIEZOELECTRIC LAYER AND FABRICATING METHOD THEREOF
#210METHOD FOR MANUFACTURING FILM BULK ACOUSTIC RESONANCE DEVICE HAVING SPECIFIC RESONANT FREQUENCY
#211Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#212Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
#213Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#214Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#215LITHIUM NIOBATE OR LITHIUM TANTALATE FBAR STRUCTURE AND FABRICATING METHOD THEREOF
#216Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
#217ELECTRO-ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING THE SAME
#2183D HETEROGENEOUS INTEGRATED CRYSTALLINE PIEZOELECTRIC BULK ACOUSTIC RESONATORS
#219Transversely-excited film bulk acoustic resonator filters with sub-resonators having different mark and pitch
#220Solidly-mounted transversely-excited film bulk acoustic device
#221RF BAW resonator filter architecture for 6.5GHz Wi-Fi 6E coexistence and other ultra-wideband applications
#222PIEZOELECTRIC MATERIAL AND PIEZOELECTRIC DEVICE
#223Acoustic wave device
#224Lamb wave loop circuit for acoustic wave filter
#225LAMB WAVE RESONATOR AND OTHER TYPE OF ACOUSTIC WAVE RESONATOR INCLUDED IN ONE OR MORE FILTERS
#226Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#227Method for making transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#228Piezoelectric MEMS resonators based on porous silicon technologies
#229Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
#230Filter using lithium niobate and rotated lithium tantalate transversely-excited film bulk acoustic resonators
#231Filter device, RF front-end device and wireless communication device
#232BAW resonance device, filter device and RF front-end device
#233Transversely-excited film bulk acoustic resonator
#234Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness
#235METHOD FOR THE PRODUCTION OF A SINGLE-CRYSTAL FILM, IN PARTICULAR PIEZOELECTRIC
#236LAMINATED SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC THIN FILM ELEMENT AND METHOD FOR MANUFACTURING THIS ELEMENT
#237Transversely-excited film bulk acoustic resonator with etched conductor patterns
#238Transversely-excited film bulk acoustic resonator with etched conductor patterns
#239Solidly-mounted transversely-excited film bulk acoustic resonator
#240Transversely-excited film bulk acoustic resonator with reduced spurious modes
#241Transversely-excited film bulk acoustic resonator with reduced spurious modes
#242Transversely-excited film bulk acoustic resonator with reduced spurious modes
#243Acoustic wave device and filter
#244PIEZOELECTRIC MATERIAL AND PIEZOELECTROC DEVICE
#245Transversely-excited film bulk acoustic resonator with a cavity having round end zones
#246Substituted aluminum nitride for improved acoustic wave filters
#247Methods of forming films including scandium at low temperatures using chemical vapor deposition to provide piezoelectric resonator devices and/or high electron mobility transistor devices
#248Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers using rotated y-x cut lithium niobate
#249Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
#250Transversely-excited film bulk acoustic resonator with reduced spurious modes
#251Aluminum nitride dopant scheme for bulk acoustic wave filters
#252Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
#253Fabricating method of film bulk acoustic resonator
#254Transversely-excited film bulk acoustic resonator with a bonding layer and an etch-stop layer
#255Transversely-excited film bulk acoustic resonator with a back-side dielectric layer and an etch-stop layer
#256Transversely-excited film bulk acoustic resonator with thermally conductive etch-stop layer
#257Digitally tunable acoustic wave resonators
#258METHOD FOR MANUFACTURING AN ELECTRO-ACOUSTIC RESONATOR AND ELECTRO-ACOUSTIC RESONATOR DEVICE
#259Film bulk acoustic resonator and fabrication method thereof
#260Fifth-generation (5G)-focused piezoelectric resonators and filters
#261MANUFACTURING OF C-AXIS TEXTURED SIDEWALL ALN FILMS
#262Transversely-excited film bulk acoustic resonator with periodic etched holes
#263Laterally excited bulk wave device with acoustic mirrors
#264Acoustic resonators and filters that support fifth generation (5G) wireless communications standards
#265Piezoelectric device
#266Two dimensional rod resonator for RF filtering
#267Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
#268Bulk-acoustic wave resonator
#269Filter using transversely-excited film bulk acoustic resonators with two frequency setting layers
#270Lamb wave delay line with aluminum nitride piezoelectric layer
#271XBAR resonators with non-rectangular diaphragms
#272XBAR resonators with non-rectangular diaphragms
#273Piston mode Lamb wave resonators
#274Acoustic wave element having high acoustic velocity layer
#275Transversly-excited film bulk acoustic resonators and filters
#276Transversely-excited film bulk acoustic filter using pitch to establish frequency separation between resonators
#277Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
#278Microwave dielectric component and manufacturing method thereof
#279Harmonic suppression in bulk acoustic wave duplexer
#280Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
#281Multi-port filter using transversely-excited film bulk acoustic resonators
#282Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#283Bulk acoustic wave resonator and manufacturing method therefor
#284Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#285Transversely-excited film bulk acoustic resonator with reduced spurious modes
#286Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
#287TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS
#288Transversely-excited film bulk acoustic resonator with a cavity having a curved perimeter
#289TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS
#290Method for forming an aluminum nitride layer
#291Method of deposition
#292Solidly-mounted transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
#293Transversely-excited film bulk acoustic resonator with etch-stop layer
#294Transversely-excited film bulk acoustic resonator with periodic etched holes
#295Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
#296Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators
#297Transversely-excited film bulk acoustic resonator
#298Resonator shapes for bulk acoustic wave (BAW) devices
#299Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
#300Rotation in XY plane to suppress spurious modes in XBAR devices