220521 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices; Characteristics of piezoelectric layers, e.g. cutting angles consisting of a material from the crystal group 32, e.g. langasite, langatate, langanite
FILTERS USING TRANSVERSLY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH FREQUENCY-SETTING DIELECTRIC LAYERS
#2TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A BACK-SIDE DIELECTRIC LAYER
#3Sensor with a Resonator Positioned at a Cavity of a Substrate
#4Transversely-excited film bulk acoustic resonator with periodic etched holes
#5XBAR resonators with non-rectangular diaphragms
#6ACOUSTIC WAVE DEVICE
#7Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
#8Transversely-excited film bulk acoustic resonator
#9ACOUSTIC WAVE DEVICE
#10Transversely-excited acoustic resonator with Z-cut lithium niobate plate
#11Transversely-excited film bulk acoustic resonator with recessed rotated-Y-X cut lithium niobate
#12BULK ACOUSTIC WAVE DEVICE AND METHOD OF MAKING SUCH A DEVICE
#13ACOUSTIC WAVE DEVICE
#14ACOUSTIC WAVE DEVICE
#15PIEZOELECTRIC FILM AND RESONATOR
#16FILTER DEVICE
#17Transversely-excited film bulk acoustic resonator with periodic etched holes
#18Rotation in XY plane to suppress spurious modes in XBAR devices
#19Sensor with resonator supported on a substrate
#20Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness
#21Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers using rotated y-x cut lithium niobate
#22Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
#23Transversely-excited film bulk acoustic resonator with a bonding layer and an etch-stop layer
#24Transversely-excited film bulk acoustic resonator with a back-side dielectric layer and an etch-stop layer
#25Transversely-excited film bulk acoustic resonator with thermally conductive etch-stop layer
#26Transversely-excited film bulk acoustic resonator with periodic etched holes
#27Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
#28Filter using transversely-excited film bulk acoustic resonators with two frequency setting layers
#29XBAR resonators with non-rectangular diaphragms
#30XBAR resonators with non-rectangular diaphragms
#31Transversly-excited film bulk acoustic resonators and filters
#32Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
#33Solidly-mounted transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
#34Transversely-excited film bulk acoustic resonator with etch-stop layer
#35Transversely-excited film bulk acoustic resonator with periodic etched holes
#36Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
#37Rotation in XY plane to suppress spurious modes in XBAR devices
#38Composite substrate and acoustic wave element using same
#39XBAR resonators with non-rectangular diaphragms
#40Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
#41Acoustic wave device, filter, and multiplexer
#42Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness
#43Transversely-excited film bulk acoustic resonator
#44Acoustic wave element and method for manufacturing same
#45Piezoelectric vibrator and sensor
#46Resonator applications for langasite and its isomorphs
#47PIEZOELECTRIC THIN FILM DEVICE
#48PIEZOELECTRIC THIN FILM DEVICE
#49Method of manufacturing a piezoelectric thin film device