220528 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices; Means for compensation or elimination of undesirable effects of adherence
ACOUSTIC WAVE DEVICE, FILTER, MULTIPLEXER, AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#2PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC OSCILLATOR, AND PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD
#3Piezoelectric resonator unit and method of manufacturing the same
#4Piezoelectric device, piezoelectric vibrating piece, and method for manufacturing piezoelectric vibrating piece
#5Acoustic resonator and method for manufacturing the same
#6Bulk acoustic wave resonator and method of manufacturing the same
#7Component working with acoustic waves having reduced temperature coefficient of frequencies and method for producing same
#8Method for manufacturing electronic component
#9Method for manufacturing piezoelectric vibrator, piezoelectric vibrator, and oscillator
#10Thin-Film Bulk Acoustic Resonators Having Reduced Susceptibility to Process-Induced Material Thickness Variations
#11Electronic component and method for manufacturing electronic component
#12Piezoelectric thin film device and method for manufacturing the same
#13Piezoelectric thin film device and method for manufacturing the same
#14Method of determining adhesion quality
#15ELECTRONIC DEVICE
#16Surface acoustic wave substrate
#17Piezoelectric thin film device having a drive section with a weighted portion
#18Piezoelectric thin film device having an additional film outside an excitation region
#19Method of forming a surface acoustic wave (SAW) filter device
#20Apparatus embodying doped substrate portion
#21Surface acoustic wave device
#22Piezoelectric resonator and method for manufacturing the same
#23Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR
#24Crystal oscillator
#25Thin film piezoelectric resonator, thin film piezoelectric device, and manufacturing method thereof
#26Resonator, filter and fabrication of resonator
#27Component for fabricating an electronic device and method of fabricating an electronic device
#28Film bulk acoustic wave resonator
#29Piezoelectric thin film device and method for manufacturing the same
#30Surface acoustic wave device and surface acoustic wave filter comprising the device
#31Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
#32Piezoelectric element, composite piezoelectric element, and filter, duplexer and communication equipment using the same
#33Film bulk acoustic wave resonator wafer and method of fabricating a film bulk acoustic wave resonator
#34Film bulk acoustic resonator
#35Method of producing thin film bulk acoustic resonator
#36Electronic device and method of fabricating the same
#37Compact electronic component including piezo-electric resonator mounted by face-down bonding with improved reliability
#38Piezoelectric resonator, filter, and duplexer
#39Electronic component and method for manufacturing the same
#40Substrate for electronic device, electronic device and methods of manufacturing same
#41Ink jet recording head and ink jet printer with piezoelectric element