METHODS OF FORMING EPITAXIAL AlScN RESONATORS WITH SUPERLATTICE STRUCTURES INCLUDING AlGaN INTERLAYERS AND VARIED SCANDIUM CONCENTRATIONS FOR STRESS CONTROL AND RELATED STRUCTURES

BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREOF AND FILTER

PIEZOELECTRIC DEVICE AND PIEZOELECTRIC FILTER

RESONATOR DEVICE

CRYSTAL UNIT

ACOUSTIC RESONATOR WITH ASPECT RATIO FOR SPUR REDUCTION

ACOUSTIC MULTILAYER FILM, HIGH FREQUENCY FILTER DEVICE, AND BULK ACOUSTIC WAVE FILTER DEVICE

STRAINED PIEZOELECTRIC DEVICES FOR RADIOFREQUENCY RESONATORS AND FABRICATION METHODS THEREOF

VOLUME ACOUSTIC DEVICE AND METHOD FOR PRODUCING A VOLUME ACOUSTIC DEVICE

BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREOF AND FILTER

METAL RIBS IN ELECTROMECHANICAL DEVICES

BULK ACOUSTIC WAVE RESONATOR AND METHOD FOR MANUFACTURING THE SAME

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

RESONATOR, FILTER, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING RESONATOR

Bulk Acoustic Wave (BAW) Microresonator Package

QUARTZ-CRYSTAL VIBRATING PIECE, CRYSTAL UNIT, CRYSTAL CONTROLLED OSCILLATOR, AND INTERMEDIATE WAFER FOR QUARTZ-CRYSTAL VIBRATING PIECE

PIEZOELECTRIC RESONATOR PLATE AND PIEZOELECTRIC RESONATOR DEVICE

BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREOF, FILTER AND ELECTRONIC DEVICE

INTEGRATED BALUN AND FILTER

Vibrator Element And Vibrator Device

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH INTERDIGITAL TRANSDUCER CONFIGURED TO REDUCE DIAPHRAGM STRESS

SUSPENDED RESONATOR

PIEZOELECTRIC BULK WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME

Methods of plasma dicing bulk acoustic wave components

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD FOR ACOUSTIC WAVE DEVICE

Metal ribs in electromechanical devices

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

Acoustic wave device

PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC OSCILLATOR, AND PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD

Acoustic resonator with reinforcing structure and manufacturing method therefor

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

Bulk acoustic wave resonator

Bulk acoustic wave component with conductor extending laterally from via

ELASTIC WAVE DEVICE AND LADDER FILTER

PIEZOELECTRIC DEVICE

Transversely-excited film bulk acoustic resonators with interdigital transducer configured to reduce diaphragm stress

METHODS OF FORMING EPITAXIAL AlScN RESONATORS WITH SUPERLATTICE STRUCTURES INCLUDING AlGaN INTERLAYERS AND VARIED SCANDIUM CONCENTRATIONS FOR STRESS CONTROL AND RELATED STRUCTURES

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FABRICATION USING A PIEZOELECTRIC PLATE, SILICON SUBSTRATE AND HANDLE WAFER SANDWICH

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FABRICATION USING A PIEZOELECTRIC PLATE, SILICON SUBSTRATE AND HANDLE WAFER SANDWICH

Doubly Rotated Quartz Crystal Resonators With Reduced Sensitivity to Acceleration

Vibration Device And Method For Manufacturing Vibration Device

Vibrator device, vibrator module, and electronic apparatus

PIEZOELECTRIC ELEMENT

PATTERNED SUBSTRATE, SEMICONDUCTOR DEVICE AND NANOTUBE STRUCTURE

Strain compensated rare earth group III-nitride heterostructures

DOPED CRYSTALLINE PIEZOELECTRIC RESONATOR FILMS AND METHODS OF FORMING DOPED SINGLE CRYSTALLINE PIEZOELECTRIC RESONATOR LAYERS ON SUBSTRATES VIA EPITAXY

Vibration Device

Metal ribs in electromechanical devices

Method for manufacturing ceramic substrate and ceramic substrate

Transversely-excited film bulk acoustic resonators with interdigital transducer configured to reduce diaphragm stress

Vibration element and oscillator

Bulk acoustic wave resonator and manufacturing method therefor

Piezoelectric resonator device

Resonator element, resonator device, electronic apparatus, and vehicle

Vibrator device, vibrator module, and electronic apparatus

Piezoelectric resonator unit and method for manufacturing the piezoelectric resonator unit

Acoustic wave device, filter, and multiplexer

Bulk acoustic wave components

Methods of plasma dicing bulk acoustic wave components

Electronic component housing package, electronic apparatus, and electronic module

Crystal device and electronic apparatus using this crystal device

Piezoelectric resonator device

Epitaxial AIN/cREO structure for RF filter applications

Piezoelectric resonator unit and method of manufacturing the same

Vibrator device, circuit device, method of manufacturing vibrator device, electronic apparatus, and vehicle

Bulk acoustic wave resonator on a stress isolated platform

Vibrator device, electronic apparatus, and vehicle

VIBRATOR DEVICE, ELECTRONIC APPARATUS AND VEHICLE

Vibrator device including reduced mounting stress and frequency variation

Vibrator device, method of manufacturing vibrator device, electronic apparatus, and vehicle

Vibrator device, electronic apparatus, and vehicle

Quartz crystal resonator and quartz crystal resonator unit

RESONATOR DEVICE, OSCILLATOR, ELECTRONIC APPARATUS, AND VEHICLE

Piezoelectric thin film resonator, filter, and multiplexer

Electronic component housing package, electronic apparatus, and electronic module

COMPOSITE STRUCTURE AND ASSOCIATED PRODUCTION METHOD

Bulk acoustic wave resonator

Piezoelectric oscillator and piezoelectric oscillation device

BAW resonator and BAW filter for reducing harmonic distortion

Quartz crystal device

Elastic wave device

Acoustic wave resonator and method for manufacturing the same

Bulk acoustic wave resonator

Electronic component

Acoustic wave device

Bulk acoustic wave resonator and method for manufacturing the same

Resonator device, oscillator, electronic apparatus, and vehicle

Devices with specific termination angles in titanium tungsten layers and methods for fabricating the same

Electronic component-use package and piezoelectric device

Bulk acoustic wave resonator and filter including the same

At-cut crystal element, crystal resonator and crystal unit

Resonator applications for langasite and its isomorphs

Resonator device, electronic apparatus, and moving object

Vibration element, vibrator, oscillator, electronic apparatus, and moving object

Resonator with a staggered electrode configuration

Method for manufacturing an acoustic wave device

Topographical structure and method of producing it

Piezoelectric device

Bulk acoustic wave resonator having piezoelectric layer with varying amounts of dopant

Protected resonator

Acoustic wave device and method of fabricating the same

Piezoelectric device

Acoustic resonator formed on a pedestal

PIEZOELECTRIC VIBRATING PIECE AND PIEZOELECTRIC DEVICE

Tuning fork-type piezoelectric resonator plate and tuning fork-type piezoelectric resonator

Piezoelectric vibrating piece and piezoelectric device

Protected resonator

Flexural vibration piece and oscillator using the same

ELECTRONIC COMPONENT

Acoustic wave device and method for manufacturing the same

Piezoelectric vibrator element, piezoelectric module, and electronic device

Electrostatic bonding of a die substrate to a package substrate

Protected resonator

Quartz crystal resonator element, quartz crystal device, and method for producing quartz crystal resonator element

Thin-film piezoelectric resonator and thin-film piezoelectric filter using the same

OSCILLATOR HAVING REDUCED SENSITIVITY TO ACCELERATION

Electronic package having stress buffer layer on mounting surface thereof, and method for manufacturing same

Flexural vibration piece and oscillator using the same

Piezoelectric device, electronic device using the same, and automobile

Protected resonator

Component having stress-reduced mounting

Film bulk acoustic resonator shaped as an ellipse with a part cut off

Piezoelectric resonator including an acoustic reflector portion

ACOUSTIC RESONATOR AND ITS FABRICATING METHOD

Method of manufacturing film bulk acoustic resonator using internal stress of metallic film and resonator manufactured thereby

Method of manufacturing a ladder filter

Piezoelectric devices having improved impact resistance

Piezoelectric thin film resonator, filter, and communication apparatus

Filter, duplexer and communication apparatus

Electronic component for surface mounting

Resonant device, communication module, communication device, and method for manufacturing resonant device

Oscillator having reduced sensitivity to acceleration

Quartz crystal resonator element, quartz crystal device, and method for producing quartz crystal resonator element

QUARTZ CRYSTAL DEVICE

Pressure transducer

Piezoelectric thin-film resonator and filter

Ladder type filter

Piezoelectric electronic component, process for producing the same, and communication apparatus

Piezoelectric thin-film resonator

ELECTRONIC DEVICE

PIEZOELECTRIC RESONATOR, PIEZOELECTRIC FILTER, DUPLEXER, COMMUNICATION APPARATUS, AND METHOD FOR MANUFACTURING PIEZOELECTRIC RESONATOR

PIEZOELECTRIC THIN FILM DEVICE

PIEZOELECTRIC THIN FILM DEVICE

Method of manufacturing a piezoelectric thin film device

Method for manufacturing a film bulk acoustic resonator

Piezoelectric thin film resonator

Piezoelectric thin-film resonator and filter

Hybrid resonant structure

Piezoelectric electronic component, and production method therefor, and communication equipment

BAW apparatus

Piezoelectric thin film resonator and devices provided with the same

Air-gap type FBAR, and duplexer using the FBAR

Piezoelectric resonator element and method of manufacturing same

Ultrasonic element

Silicon film bulk acoustic wave device and process of the same

Piezoelectric thin-film resonator and filter using the same

Quartz resonator of small dimensions

Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR

Branching filter and communication device

Tapered electrode in an acoustic resonator

Thin film bulk acoustic wave resonator and production method of the same

Method for manufacturing a piezoelectric resonator

Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter

Film bulk acoustic resonator and method for manufacturing the same

Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink-jet type recording head, ink-jet printer surface-acoustic-wave element, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus

Piezoelectric thin-film resonator and filter using the same

Film bulk acoustic resonator and method for manufacturing the same

Film bulk acoustic resonator and method of producing the same

Film bulk acoustic resonator (FBAR) device and method for producing the same

Ink jet recording head and ink jet printer with piezoelectric element

Piezoelectric vibrator, filter using the same and its adjusting method

Method of manufacturing film bulk acoustic resonator using internal stress of metallic film and resonator manufactured thereby