220534 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices; Means for compensation or elimination of undesirable effects of electric discharge due to pyroelectricity
Baw filter structure with internal electrostatic shielding
#2Resonator and resonance device
#3Filter having multiple piezoelectric thin-film resonators
#4Electrostatic discharge protection of thin-film resonators
#5Film bulk acoustic wave resonator wafer and method of fabricating a film bulk acoustic wave resonator