220535 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices; Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
VOLUME ACOUSTIC DEVICE AND METHOD FOR PRODUCING A VOLUME ACOUSTIC DEVICE
#2Partially Suspending a Piezoelectric Layer Using a Dielectric
#3FBAR Filter with Trap Rich Layer
#4TRANSDUCER STRUCTURE FOR AN ACOUSTIC WAVE DEVICE
#5Acoustic wave device
#6Method of forming an integrated resonator with a mass bias
#7Piezoelectric resonator unit and method of manufacturing the same
#8Piezoelectric resonator unit
#9Crystal resonator plate and crystal resonator device
#10Vibrator device, circuit device, method of manufacturing vibrator device, electronic apparatus, and vehicle
#11Bulk acoustic wave resonator
#12Acoustic resonator structure having an electrode with a cantilevered portion
#13Bulk acoustic wave resonator and filter including the same
#14Bulk acoustic wave resonator and filter including the same
#15Piezoelectric thin film resonator, filter, and multiplexer
#16Guided acoustic wave device
#17Acoustic resonator structure having an electrode with a cantilevered portion
#18Bulk acoustic wave resonator with a molybdenum tantalum alloy electrode and filter including the same
#19Method of forming an integrated resonator with a mass bias
#20Vibrating element, vibrator, oscillator, and electronic device with stepped excitation section
#21Protected resonator
#22Acoustic resonator structure having an electrode with a cantilevered portion
#23Selective tuning of acoustic devices
#24Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with varying amounts of dopant
#25Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with multiple dopants
#26TEMPERATURE COMPENSATED RESONATOR DEVICE HAVING LOW TRIM SENSITIVY AND METHOD OF FABRICATING THE SAME
#27Integrated resonator with a mass bias
#28Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
#29Bulk acoustic wave resonator and manufacturing method thereof, and radio frequency device using bulk acoustic wave resonator
#30Acoustic wave device and multilayered substrate
#31Tuning fork-type piezoelectric resonator plate and tuning fork-type piezoelectric resonator
#32Method of manufacturing a piezoelectric vibrator
#33ACOUSTIC RESONATOR STRUCTURE HAVING AN ELECTRODE WITH A CANTILEVERED PORTION
#34WAFER LEVEL FABRICATION OF CAVITY FOR SURFACE ACOUSTIC WAVE FILTER
#35Protected resonator
#36Vibrating element, vibrator, oscillator, and electronic device
#37ACOUSTIC RESONATOR STRUCTURE COMPRISING A BRIDGE
#38ACOUSTIC RESONATOR STRUCTURE COMPRISING A BRIDGE
#39Solid mount bulk acoustic wave resonator structure comprising a bridge
#40Acoustic wave device and method for manufacturing the same
#41Composite bulk acoustic wave resonator
#42Bulk acoustic wave resonator structure, a manufacturing method thereof, and a duplexer using the same
#43Protected resonator
#44Piezoelectric resonator and electrode structure thereof
#45Acoustic Wave Resonators and Methods of Manufacturing Same
#46Thin-film piezoelectric resonator and thin-film piezoelectric filter using the same
#47Surface acoustic wave device
#48Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece
#49PIEZOELECTRIC VIBRATOR, MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED CLOCK
#50Acoustic resonator structure having an electrode with a cantilevered portion
#51Acoustic resonator structure comprising a bridge
#52Protected resonator
#53Bulk acoustic wave resonator, filter and duplexer and methods of making same
#54Method of manufacturing a ladder filter
#55Crystal oscillator piece and method for manufacturing the same
#56Piezoelectric vibrator and electrode structure of piezoelectric vibrator
#57Thin film piezoelectric resonator and method for manufacturing the same
#58Bulk acoustic resonators with multi-layer electrodes
#59METHOD OF MANUFACTURING MICROMACHINE, AND MICROMACHINE
#60Manufacturing process for thin film bulk acoustic resonator (FBAR) filters
#61Method of manufacturing a piezoelectric vibrator
#62FILM BULK ACOUSTIC RESONATOR
#63Method of stabilizing a frequency of a piezoelectric vibration element
#64Acoustic resonator performance enhancement using alternating frame structure
#65Piezoelectric thin film resonator, piezoelectric thin film resonator filter and manufacturing method thereof
#66Ladder type filter
#67Method of fabricating an acoustic resonator comprising a filled recessed region
#68ELECTRONIC DEVICE
#69PIEZOELECTRIC RESONATOR, PIEZOELECTRIC FILTER, DUPLEXER, COMMUNICATION APPARATUS, AND METHOD FOR MANUFACTURING PIEZOELECTRIC RESONATOR
#70Component with a piezoelectric functional layer
#71Electrostatic discharge protection of thin-film resonators
#72Acoustic resonator performance enhancement using filled recessed region
#73Silicon film bulk acoustic wave device and process of the same
#74Method for manufacturing a film bulk acoustic resonator
#75Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and method of manufacturing the piezoelectric vibrator
#76Piezoelectric resonator and method for manufacturing the same
#77Electro-acoustic resonator with a top electrode layer thinner than a bottom electrode layer
#78Piezoelectric thin-film resonator and process for producing same
#79Piezoelectric thin-film resonator and filter using the same
#80Acoustic resonator performance enhancement using alternating frame structure
#81Acoustic resonator performance enhancements using recessed region
#82Bulk acoustic wave resonator, filter and duplexer and methods of making same
#83Resonator, filter and fabrication of resonator
#84Acoustic resonator and filter
#85Electronic device and method of fabricating the same
#86Method for manufacturing a piezoelectric resonator
#87Film bulk acoustic wave resonator device and manufacturing method thereof
#88Method of producing thin film bulk acoustic resonator
#89Manufacturing process for thin film bulk acoustic resonator (FBAR) filters
#90Acoustic mirror