220536 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH SYMMETRIC DIAPHRAGM
#2BULK ACOUSTIC WAVE RESONANCE STRUCTURE AND MANUFACTURING METHOD
#3ACOUSTIC WAVE DEVICE AND ACOUSTIC WAVE FILTER DEVICE
#4BULK ACOUSTIC WAVE FILTER
#5STRUCTURES, ACOUSTIC DEVICES AND SYSTEMS
#6STRUCTURES, DEVICES, ACOUSTIC WAVE RESONATORS, AND SYSTEMS
#7ACOUSTIC WAVE DEVICE
#8TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WAFER-LEVEL PACKAGING USING A DIELECTRIC COVER
#9BULK ACOUSTIC WAVE RESONATOR, PATTERNED LAYER STRUCTURES, DEVICES AND SYSTEMS
#10TUNABLE BULK ACOUSTIC WAVE DEVICE
#11BULK ACOUSTIC RESONATOR WITH VARYING THICKNESS IDT CONFIGURATION
#12RAISED FRAME BULK ACOUSTIC WAVE DEVICES
#13SYSTEMS, ACOUSTIC WAVE STRUCTURES, AND DEVICES
#14ACOUSTIC RESONATOR PACKAGE
#15ACOUSTIC WAVE DEVICE
#16ACOUSTIC REFLECTOR AND RESONATOR STRUCTURES, DEVICES AND SYSTEMS
#17BULK ACOUSTIC WAVE DEVICE WITH TEMPERATURE COMPENSATION LAYER
#18BULK ACOUSTIC WAVE RESONANT STRUCTURE AND PREPARATION METHOD THEREFOR, AND ACOUSTIC WAVE DEVICE
#19ACOUSTIC MULTILAYER FILM, HIGH FREQUENCY FILTER DEVICE, AND BULK ACOUSTIC WAVE FILTER DEVICE
#20TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH OXIDE STRIP ACOUSTIC CONFINEMENT STRUCTURES
#21ACOUSTIC WAVE DEVICE
#22ACOUSTIC WAVE DEVICE
#23ACOUSTIC WAVE DEVICE
#24SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC FILTERS WITH MULTIPLE PIEZOELECTRIC PLATE THICKNESSES
#25ACOUSTIC WAVE DEVICE
#26ACOUSTIC WAVE DEVICE
#27ACOUSTIC WAVE DEVICE
#28ACOUSTIC WAVE DEVICE WITH ENHANCED QUALITY FACTOR
#29TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH ELECTRODES HAVING A SECOND LAYER OF VARIABLE WIDTH
#30ACOUSTIC WAVE DEVICE
#31ACOUSTIC WAVE DEVICE
#32RESONATOR WITH OPTIMIZED LAYER THICKNESSES
#33ACOUSTIC WAVE DEVICE
#34ACOUSTIC WAVE DEVICE WITH LAYER STRUCTURES, DEVICES AND SYSTEMS
#35ACOUSTIC WAVE DEVICE
#36ACOUSTIC WAVE DEVICE AND FILTER APPARATUS
#37TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH MULTIPLE PIEZOELECTRIC MEMBRANE THICKNESSES ON THE SAME CHIP
#38SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH RECESSED INTERDIGITAL TRANSDUCER FINGERS
#39ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING SAME
#40ACOUSTIC WAVE DEVICE
#41ACOUSTIC WAVE DEVICE
#42ACOUSTIC WAVE DEVICE
#43ACOUSTIC WAVE DEVICE
#44ACOUSTIC WAVE DEVICE
#45DOPED ACOUSTIC WAVE RESONATORS, STRUCTURES, DEVICES AND SYSTEMS
#46ACOUSTIC STRUCTURES, DEVICES, FILTERS AND SYSTEMS
#47BULK ACOUSTIC WAVE RESONATORS HAVING CONVEX SURFACES, AND METHODS OF FORMING THE SAME
#48ACOUSTIC WAVE DEVICE
#49ACOUSTIC WAVE DEVICE
#50TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR
#51FILTERS USING DECOUPLED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS
#52TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS USING MULTIPLE DIELECTRIC LAYER THICKNESSES TO SUPPRESS SPURIOUS MODES
#53ACOUSTIC RESONATOR SOLIDLY MOUNTED ON A HIGH ACOUSTIC VELOCITY SUBSTRATE
#54BULK ACOUSTIC RESONATOR, ACOUSTIC FILTER, AND ELECTRONIC DEVICE
#55METHOD FOR MANUFACTURING ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT
#56BULK ACOUSTIC RESONATOR
#57BULK ACOUSTIC WAVE DEVICE WITH OVERTONE MODE
#58ACOUSTIC WAVE DEVICE
#59TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH SYMMETRIC DIAPHRAGM
#60BULK ACOUSTIC RESONATOR
#61ACOUSTIC WAVE DEVICE AND COMPOSITE FILTER DEVICE
#62ACOUSTIC WAVE DEVICE
#63QUARTZ-CRYSTAL VIBRATING PIECE, CRYSTAL UNIT, CRYSTAL CONTROLLED OSCILLATOR, AND INTERMEDIATE WAFER FOR QUARTZ-CRYSTAL VIBRATING PIECE
#64Resonator Device
#65ACOUSTIC WAVE DEVICE
#66FILM BULK ACOUSTIC RESONATOR
#67METHOD FOR MANUFACTURING ACOUSTIC DEVICES WITH IMPROVED PERFORMANCE
#68ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#69ACOUSTIC WAVE DEVICE
#70TEMPERATURE COMPENSATING ACOUSTIC WAVE STRUCTURES, DEVICES AND SYSTEMS
#71ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
#72RESONATORS WITH DIFFERENT MEMBRANE THICKNESSES ON THE SAME DIE
#73ACOUSTIC WAVE DEVICE
#74ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#75BULK ACOUSTIC WAVE RESONATOR WITH PATTERNED LAYER STRUCTURES, DEVICES AND SYSTEMS
#76ACOUSTIC WAVE DEVICE
#77SANDWICHED XBAR FOR THIRD HARMONIC OPERATION
#78MASS LOADED BULK ACOUSTIC WAVE RESONATOR STRUCTURES, DEVICES AND SYSTEMS
#79ACOUSTIC WAVE DEVICE, FILTER, MULTIPLEXER, AND WAFER
#80ACOUSTIC WAVE DEVICE
#81ACOUSTIC DEVICES, STRUCTURES AND SYSTEMS
#82ULTRA-HIGH FREQUENCY AT-CUT QUARTZ BLANK AND MANUFACTURING METHOD THEREOF
#83ACOUSTIC WAVE DEVICE
#84SYSTEMS, STRUCTURES, ACOUSTIC WAVE RESONATORS AND DEVICES TO SENSE A TARGET VARIABLE
#85PIEZOELECTRIC BULK WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
#86Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
#87ACOUSTIC WAVE DEVICE
#88ACOUSTIC WAVE DEVICE
#89ACOUSTIC WAVE DEVICE
#90ACOUSTIC WAVE DEVICE
#91ACOUSTIC WAVE DEVICE AND ACOUSTIC WAVE DEVICE MANUFACTURING METHOD
#92ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
#93ACOUSTIC WAVE DEVICE
#94Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#95RESONATOR AND METHOD OF PREPARING A RESONATOR
#96BULK ACOUSTIC WAVE DEVICE
#97ACOUSTIC WAVE DEVICE, FILTER DEVICE, AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#98ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE
#99Baw resonators with antisymmetric thick electrodes
#100ACOUSTIC WAVE DEVICE
#101ACOUSTIC WAVE DEVICE
#102ACOUSTIC WAVE DEVICE
#103COMPOSITE FILTER DEVICE
#104ACOUSTIC WAVE DEVICE
#105ACOUSTIC WAVE DEVICE AND LADDER FILTER
#106Bulk acoustic wave (BAW) resonator structures, devices and systems
#107Transversely-excited film bulk acoustic resonator with symmetric diaphragm
#108ACOUSTIC WAVE DEVICE
#109Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers
#110Transversely-excited film bulk acoustic resonators using multiple dielectric layer thicknesses to suppress spurious modes
#111Acoustic resonator with reinforcing structure and manufacturing method therefor
#112BULK ACOUSTIC RESONATOR FILTER AND BULK ACOUSTIC RESONATOR FILTER MODULE
#113LAYERS, STRUCTURES, ACOUSTIC WAVE RESONATORS, DEVICES AND SYSTEMS
#114DIELECTRIC COATED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR (XBAR) FOR COUPLING OPTIMIZATION
#115Bulk acoustic wave resonator with stacked piezoelectric layers
#116TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WAFER-LEVEL PACKAGING USING A DIELECTRIC COVER
#117ACOUSTIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
#118ELECTRODE GEOMETRY TO MINIMIZE STRESS IN TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS
#119Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#120PATTERNED CAVITY WALLS FOR TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FRONTSIDE MEMBRANE RELEASE
#121TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH NARROW GAPS BETWEEN BUSBARS AND ENDS OF INTERDIGITAL TRANSDUCER FINGERS
#122Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
#123Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#124Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#125Method for manufacturing acoustic devices with improved performance
#126ACOUSTIC WAVE DEVICE
#127XBAR devices with excess piezoelectric material removed
#128Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures
#129TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FABRICATION USING A PIEZOELECTRIC PLATE, SILICON SUBSTRATE AND HANDLE WAFER SANDWICH
#130Transversely-excited film bulk acoustic resonator
#131Transversely-excited film bulk acoustic resonator fabrication using wafer-to-wafer bonding
#132Filters with raised frame bulk acoustic wave devices
#133Raised frame bulk acoustic wave devices
#134ACOUSTIC WAVE DEVICE
#135WAFER SCALE PACKAGING
#136Acoustic wave device, multiplexer, and communication apparatus
#137BULK ACOUSTIC WAVE DEVICE WITH REDUCED NON-LINEARITIES
#138Transversely-excited film bulk acoustic resonators with narrow gaps between busbars and ends of interdigital transducer fingers
#139BAW RESONATOR WITH REDUCED LATERAL MODES
#140Transversely-excited film bulk acoustic resonators with multiple piezoelectric membrane thicknesses on the same chip
#141Transversely-excited film bulk acoustic resonators with multiple piezoelectric membrane thicknesses on the same chip
#142Bulk acoustic resonator
#143Filters using decoupled transversely-excited film bulk acoustic resonators
#144TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH IMPROVED COUPLING AND REDUCED ENERGY LEAKAGE
#145ACOUSTIC WAVE DEVICE
#146Acoustic wave device
#147Bulk acoustic resonator filter
#148XBAR devices with excess piezoelectric material removed
#149Forming XBAR devices with excess piezoelectric material removed
#150TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED LOSS IN THE APERTURE DIRECTION
#151Transversely-excited film bulk acoustic resonator with tether-supported diaphragm
#152BULK ACOUSTIC WAVE RESONATOR
#153STRUCTURES, ACOUSTIC WAVE RESONATORS, DEVICES AND SYSTEMS
#154Temperature compensating bulk acoustic wave (BAW) resonator structures, devices and systems
#155Mass loaded bulk acoustic wave (BAW) resonator structures, devices, and systems
#156Bulk acoustic wave (BAW) resonator with patterned layer structures, devices and systems
#157Crystal vibration device
#158Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses
#159Acoustic devices structures, filters and systems
#160High Q solidly-mounted transversely-excited film bulk acoustic resonators
#161Bulk acoustic wave (BAW) reflector and resonator structures, devices and systems
#162Acoustic devices with layer structures, devices and systems
#163Doped acoustic wave resonator structures, devices and systems
#164Bulk acoustic wave (BAW) resonator structures, devices, and systems
#165Acoustic device structures, devices and systems
#166Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#167Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters
#168Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
#169Sandwiched XBAR for third harmonic operation
#170Sandwiched XBAR for third harmonic operation
#171ACOUSTIC WAVE DEVICE, WAFER, AND MANUFACTURING METHOD OF WAFER
#172Acoustic wave device
#173Resonators with different membrane thicknesses on the same die
#174Resonators with different membrane thicknesses on the same die
#175Transversely-excited film bulk acoustic resonators using multiple dielectric layer thicknesses to suppress spurious modes
#176Transversely-excited film bulk acoustic resonator with tether-supported diaphragm
#177Transversely-excited film bulk acoustic resonator with tether-supported diaphragm
#178Acoustic wave device, filter, and multiplexer
#179Acoustic wave device
#180Temperature compensated bulk acoustic wave device by neutral stress plane engineering through double sided silicon substrate integration
#181Transversely-excited film bulk acoustic resonator with symmetric diaphragm
#182Acoustic wave device
#183Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
#184Structures, acoustic wave resonators, devices and systems to sense a target variable
#185Film bulk acoustic resonator fabrication method
#186Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
#187Bulk-acoustic wave resonator and bulk-acoustic wave filter device
#188Bulk-acoustic wave resonator
#189Bulk-acoustic wave resonator
#190Acoustic wave device
#191Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers
#192PACKAGING MODULE AND PACKAGING METHOD OF BAW RESONATOR
#193HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS
#194High Q BAW resonator with spurious mode suppression
#195BAW resonators with antisymmetric thick electrodes
#196ELLIPTICAL STRUCTURE FOR BULK ACOUSTIC WAVE RESONATOR
#197Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
#198Method for the production of a bulk acoustic wave resonator with a reduced parasitic capacitance
#199Acoustic wave device, multiplexer, and communication apparatus
#200Recess frame structure for a bulk acoustic wave resonator including electrode recesses
#201Structures, acoustic wave resonators, devices and systems to sense a target variable, including as a non-limiting example corona viruses
#202Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers
#203Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#204Bulk acoustic wave/film bulk acoustic wave resonator and filter for wide bandwidth applications
#205Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
#206Film bulk acoustic resonator fabrication method
#207Acoustic wave resonator
#208Acoustic wave resonator
#209Bulk acoustic resonator and filter including the same
#210Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators
#211BAW resonators with antisymmetric thick electrodes
#212Buk acoustic wave resonator with guard rings having recessed space from electrode edge and periodic designs
#213Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#214Multiplexer, high-frequency front-end circuit, and communication device
#215Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
#216Acoustic wave device, filter, and multiplexer
#217Bulk-acoustic wave resonator
#218Oscillator, electronic apparatus and vehicle
#219Method and structure for single crystal acoustic resonator devices using thermal recrystallization
#220BAW resonator and resonator arrangement
#221Acoustic resonator and acoustic resonator filter including the same
#222Wafer scale packaging
#223Effective coupling coefficients for strained single crystal epitaxial film bulk acoustic resonators
#224Substrate for surface acoustic wave device, and pseudo surface acoustic wave element
#225Filter including bulk acoustic wave resonator
#226Crystal vibration element and crystal device
#227Elastic wave device, radio-frequency front-end circuit, and communication apparatus
#228Crystal resonator plate and crystal resonator device
#229Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
#230RF filters and resonators of crystalline III-N films
#231Quartz crystal resonator, quartz crystal resonator unit, and method of manufacturing quartz crystal resonator
#232Quartz crystal resonator and quartz crystal resonator unit
#233Acoustic MEMs resonator and filter with fractal electrode and method for producing the same
#234Elastic wave device, radio-frequency front-end circuit, and communication apparatus
#235Quartz crystal unit, quartz crystal oscillator and electronic apparatus
#236Resonator, unit and oscillator
#237Quartz crystal device
#238Elliptical structure for bulk acoustic wave resonator
#239Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#240Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
#241Method and structure for single crystal acoustic resonator devices using thermal recrystallization
#242Bulk acoustic wave resonator
#243Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#244Acoustic wave resonator
#245Quartz crystal blank and quartz crystal resonator unit
#246Quartz crystal blank and quartz crystal resonator unit
#247Quartz crystal blank and quartz crystal resonator unit
#248Quartz crystal blank and quartz crystal resonator unit
#249Piezoelectric vibrating piece and piezoelectric device
#250Bulk acoustic wave resonator
#251Bulk acoustic wave filter and a method of frequency tuning for bulk acoustic wave resonator of bulk acoustic wave filter
#252MEMS resonator with suppressed spurious modes
#253Bulk acoustic wave resonator
#254Quartz crystal resonator and quartz crystal resonator unit
#255Bulk acoustic wave resonator and method for manufacturing the same
#256Filter including bulk acoustic wave resonator
#257Acoustic wave resonator and filter including the same
#258Piezoelectric resonator unit and method of manufacturing the same
#259Quartz crystal blank and quartz crystal resonator unit
#260Bulk acoustic resonator and filter including the same
#261Bulk acoustic wave resonator device
#262Bulk acoustic resonator devices and processes for fabricating bulk acoustic resonator devices
#263Transverse bulk acoustic wave filter
#264Resonance structure of bulk acoustic wave resonator
#265Solidly mounted layer thin film device with grounding layer
#266Crystal element and crystal device
#267Crystal vibration element and crystal vibration device
#268Resonator element, method of manufacturing resonator element, oscillator, electronic apparatus, moving object, and base station
#269CAP STRUCTURE FOR WAFER LEVEL PACKAGE
#270Piezoelectric thin film resonator, filter, and duplexer
#271Bulk acoustic wave resonator with a modified outside stack portion
#272Piezoelectric vibrating piece and piezoelectric device
#273Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed layers
#274Multi-stage deposition system for growth of inclined c-axis piezoelectric material structures
#275Methods for fabricating acoustic structure with inclined c-axis piezoelectric bulk and crystalline seed layers
#276Piezoelectric oscillator and method of making the same
#277BAW resonator having lateral energy confinement and methods of fabrication thereof
#278Piezoelectric component
#279Unit, oscillator and electronic apparatus
#280Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object
#281Acoustic resonator device with structures having different apodized shapes
#282Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object
#283Crystal vibration device
#284Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations
#285Capacitive coupled resonator device with air-gap separating electrode and piezoelectric layer
#286Tuning-fork type quartz vibrator
#287Bulk acoustic wave resonator having doped piezoelectric layer
#288Vibrating element, vibrator, oscillator, and electronic device with stepped excitation section
#289Tuning-fork type crystal resonator plate
#290Resonator element, resonator, oscillator, electronic device, and mobile object
#291Resonator element, resonator, oscillator, electronic device and mobile object
#292Resonator element, resonator, oscillator, electronic apparatus, and mobile object
#293Asymmetric unbalanced acoustically coupled resonators for spurious mode suppression
#294Piezoelectric device
#295Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure
#296Piezoelectric vibrating piece having reduced resistance and high-order vibration suppression
#297Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus and radio controlled timepiece
#298Unit, oscillator and electronic apparatus
#299Volume wave resonators on micromachined vertical structures
#300Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece