TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH SYMMETRIC DIAPHRAGM

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND ACOUSTIC WAVE FILTER DEVICE

LAMB WAVE RESONATOR HAVING PIEZOELECTRIC LAYER WITH ENGINEERED REGION

ACOUSTIC WAVE DEVICE SUPPRESSING SPURIOUS WAVE IN LAMB WAVE AND FILTER INCLUDING THE SAME

ACOUSTIC RESONATOR LID FOR THERMAL TRANSPORT

ACOUSTIC BRAGG REFLECTOR IN A SOLIDLY-MOUNTED TRANSVERSELY-EXCITED BULK ACOUSTIC RESONATOR

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH MULTI-PITCH INTERDIGITAL TRANSDUCER

Lamb Wave Resonator and Preparation Method Thereof, Filter, Radio Frequency Module, and Electronic Device

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH CURVED SHAPED ENDS OF FINGERS OR OPPOSING BUSBARS

ACOUSTIC WAVE DEVICE

HIGH-FREQUENCY ACOUSTIC-WAVE RESONATOR AND FILTER COMPRISING THE SAME

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH GAP DIELECTRIC STRIPES IN BUSBAR-ELECTRODE GAPS

TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING

Interdigital Resonator and Filter

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH ELECTRODES HAVING IRREGULAR HEXAGON CROSS-SECTIONAL SHAPES

BULK ACOUSTIC RESONATOR WITH PITCH CONSERVING IDT

BULK ACOUSTIC RESONATOR WITH VARYING THICKNESS IDT CONFIGURATION

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

ACOUSTIC WAVE DEVICE

ETCHED REGION CONFIGURATIONS IN SOLIDLY-MOUNTED ACOUSTIC RESONATORS

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH THREE-LAYER ELECTRODES

FILTER USING TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH OXIDE STRIP ACOUSTIC CONFINEMENT STRUCTURES

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC FILTERS WITH MULTIPLE PIEZOELECTRIC PLATE THICKNESSES

ACOUSTIC FILTER DEVICE WITH HIGH-EDGE STEEPNESS

ACOUSTIC FILTER DEVICE WITH LOW-EDGE STEEPNESS

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH TWO-LAYER ELECTRODES HAVING A NARROWER TOP LAYER

ACOUSTIC RESONATOR

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH SOLIDLY MOUNTED RESONATOR (SMR) PEDESTALS

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS AND FILTERS

RESONATOR WITH COMPLEMENTARILY ORIENTED PIEZOELECTRIC STRUCTURE

STACKED DEVICE STRUCTURE WITH A BULK ACOUSTIC WAVE RESONATOR SUPPORTED BY A SURFACE ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH ELECTRODES HAVING A SECOND LAYER OF VARIABLE WIDTH

ACOUSTIC WAVE DEVICE

ACOUSTIC FILTER DEVICE WITH STAGGERED GROUND INDUCTORS

ACOUSTIC WAVE DEVICE

RESONATOR WITH OPTIMIZED LAYER THICKNESSES

ACOUSTIC WAVE DEVICE

BRAGG STACK STRUCTURE FOR SPURIOUS MODE SUPPRESSION IN SOLIDLY-MOUNTED ACOUSTIC RESONATOR

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE

ACOUSTIC WAVE DEVICE AND MULTIPLEXER

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH BURIED OXIDE STRIP ACOUSTIC CONFINEMENT STRUCTURES

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A CAVITY HAVING ROUND END ZONES

ACOUSTIC WAVE DEVICE

FILTERS USING TRANSVERSLY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH FREQUENCY-SETTING DIELECTRIC LAYERS

ACOUSTIC WAVE DEVICE AND FILTER APPARATUS

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH MULTIPLE PIEZOELECTRIC MEMBRANE THICKNESSES ON THE SAME CHIP

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR PACKAGE

EMBEDDED INTERDIGITAL TRANSDUCER FOR SOLIDLY-MOUNTED ACOUSTIC RESONATOR

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING SAME

METAL LAYER BETWEEN ELECTRODES AND PIEZOELECTRIC LAYER FOR CONTROLLING COUPLING

METAL-PIEZOELECTRIC-METAL CAPACITOR

ACOUSTIC WAVE DEVICE

ACOUSTIC RESONATOR FILTER WITH HIGH THERMAL CONDUCTIVITY

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS AND FILTERS WITH TRAP-RICH LAYER

FILTER USING TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH DIVIDED FREQUENCY-SETTING DIELECTRIC LAYERS

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

ACOUSTIC WAVE DEVICE WITH MULTIPLE PIEZOELECTRIC LAYERS

ACOUSTIC WAVE DEVICES AND MODULES USING SAME

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR PACKAGE

FILTERS USING DECOUPLED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS USING MULTIPLE DIELECTRIC LAYER THICKNESSES TO SUPPRESS SPURIOUS MODES

ACOUSTIC RESONATOR SOLIDLY MOUNTED ON A HIGH ACOUSTIC VELOCITY SUBSTRATE

BULK ACOUSTIC RESONATOR, ACOUSTIC FILTER, AND ELECTRONIC DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A BACK-SIDE DIELECTRIC LAYER

ALUMINUM NITRIDE DOPANT SCHEME FOR BULK ACOUSTIC WAVE DEVICES

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

METHOD FOR MANUFACTURING ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT

GRATING STRUCTURES FOR SYMMETRIC TRANSVERSELY-EXCITED BULK ACOUSTIC RESONATORS

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH SYMMETRIC DIAPHRAGM

ACOUSTIC WAVE DEVICE

LATERALLY EXCITED BULK WAVE DEVICE WITH ACOUSTIC MIRRORS

LATERALLY EXCITED BULK WAVE DEVICE WITH ACOUSTIC MIRROR

FILTER DEVICE WITH PCB HEAT SPREADER AND INTEGRATED GROUND INDUCTANCE

ACOUSTIC WAVE DEVICE AND COMPOSITE FILTER DEVICE

BULK ACOUSTIC WAVE RESONATOR, FILTER, AND ELECTRONIC DEVICE

ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS

CAPACITIVELY-COUPLED RESONATOR FOR IMPROVEMENT IN UPPER BAND EDGE STEEPNESS

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE

MANUFACTURING METHOD FOR ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT

METHOD FOR MANUFACTURING ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FILTERS WITH SUB-RESONATORS HAVING DIFFERENT MARK AND PITCH

ACOUSTIC RESONATOR LID FOR THERMAL TRANSPORT

ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE

RESONATORS WITH DIFFERENT MEMBRANE THICKNESSES ON THE SAME DIE

ACOUSTIC WAVE DEVICE

MULTIPLE MEMBRANE THICKNESS WAFERS USING LAYER TRANSFER ACOUSTIC RESONATORS AND METHOD OF MANUFACTURING SAME

Transversely-excited film bulk acoustic resonator with periodic etched holes

XBAR resonators with non-rectangular diaphragms

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH INTERDIGITAL TRANSDUCER CONFIGURED TO REDUCE DIAPHRAGM STRESS

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

SANDWICHED XBAR FOR THIRD HARMONIC OPERATION

ACOUSTIC RESONATOR LID FOR THERMAL TRANSPORT

Multi-port filter using transversely-excited film bulk acoustic resonators

ACOUSTIC WAVE DEVICE

Acoustic wave resonator with multiple resonant frequencies

PIEZOELECTRIC BULK WAVE DEVICE AND MANUFACTURING METHOD THEREOF

PIEZOELECTRIC BULK WAVE DEVICE

ACOUSTIC WAVE DEVICE

Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND MANUFACTURING METHOD FOR ACOUSTIC WAVE DEVICE

Solidly-mounted transversely-excited film bulk acoustic resonator

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR MATRIX FILTERS

ACOUSTIC WAVE DEVICE

Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers

Transversely-excited film bulk acoustic resonator

Decoupled transversely-excited film bulk acoustic resonators

ACOUSTIC RESONATOR AND FILTER DEVICE WITH BALANCED CHIRPING

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE CLOCK DISTRIBUTION

Interdigitated RF filter

Partially Suspending a Piezoelectric Layer Using a Dielectric

ACOUSTIC WAVE DEVICE

Transversely-excited acoustic resonator with Z-cut lithium niobate plate

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR USING PRE-FORMED CAVITIES

ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH OXIDE STRIP AND DUMMY FINGERS

ACOUSTIC WAVE DEVICE

LADDER FILTER WITH TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS HAVING DIFFERENT PITCHES

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH THICK DIELECTRIC LAYER FOR IMPROVED COUPLING

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED SPURIOUS MODES

ACOUSTIC WAVE DEVICE

Transversely-excited film bulk acoustic resonator with recessed rotated-Y-X cut lithium niobate

Transversely-excited film bulk acoustic resonator with symmetric diaphragm

FILTER WITH MULTIPLE RESONATORS HAVING DIFFERENT PASSIVATION THICKNESS DISTRIBUTIONS

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE

Electrode defined resonator

ACOUSTIC WAVE DEVICE

TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING

Transversely-excited film bulk acoustic resonators using multiple dielectric layer thicknesses to suppress spurious modes

Electrode-defined unsuspended acoustic resonator

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH COUNTER CHIRPED INTERDIGITAL TRANSDUCERS (IDTs) FOR MECHANICAL AND PROCESS COMPENSATION

Laterally excited bulk wave resonator and fabricating method thereof

METHOD FOR MANUFACTURING ACOUSTIC RESONATOR IN LATERAL EXCITATION SHEAR MODE

ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH GAP DIELECTRIC STRIPES IN BUSBAR-ELECTRODE GAPS

ACOUSTIC WAVE DEVICE

Dispersive delay line with lamb wave propagation

DISPERSIVE DELAY LINE WITH PIEZOELECTRIC SUBSTRATE

ACOUSTIC RESONATOR IN TRANSVERSE EXCITATION SHEAR MODE

ACOUSTIC WAVE DEVICE

BULK ACOUSTIC WAVE DEVICE AND METHOD OF MAKING SUCH A DEVICE

DISPERSIVE DELAY LINE WITH PIEZOELECTRIC SUBSTRATE AND LAMB WAVE PROPAGATION

ACOUSTIC WAVE DEVICE

Transversely-excited film bulk acoustic resonator package and method

Laterally excited bulk wave device with acoustic mirrors

DIELECTRIC COATED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR (XBAR) FOR COUPLING OPTIMIZATION

PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION METHODS

Laterally excited bulk wave device with acoustic mirror

FILM BULK ACOUSTIC WAVE RESONATORS AND FILTERS WITH TRANSVERSE MODE SUPPRESSION

Interdigital transducer electrode for acoustic wave device with improved response

STACKED ACOUSTIC WAVE DEVICE ASSEMBLY

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH CURVED SHAPED ENDS OF FINGERS OR OPPOSING BUSBARS

STACKED STRUCTURE WITH MULTIPLE ACOUSTIC WAVE DEVICES

STACKED ACOUSTIC WAVE DEVICE ASSEMBLY

ACOUSTIC WAVE DEVICE

BULK ACOUSTIC WAVE DEVICES WITH GAP FOR IMPROVED PERFORMANCE

SUSPENDED FRAME BULK ACOUSTIC WAVE DEVICES

ASSEMBLY WITH PIEZOELECTRIC LAYER WITH EMBEDDED INTERDIGITAL TRANSDUCER ELECTRODE

STACKED ACOUSTIC WAVE DEVICES WITH SOLID ACOUSTIC MIRROR THEREBETWEEN

STACKED SINGLE MIRROR ACOUSTIC WAVE DEVICE AND DOUBLE MIRROR ACOUSTIC WAVE DEVICE

Piston mode lamb wave resonators

PASSBAND FILTER COMBINING RESONATORS OF A FIRST TYPE AND RESONATORS OF A SECOND TYPE

HIGHER ORDER LAMB WAVE ACOUSTIC DEVICES WITH COMPLEMENTARILY-ORIENTED PIEZOELECTRIC LAYERS

Elastic wave device

PATTERNED CAVITY WALLS FOR TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FRONTSIDE MEMBRANE RELEASE

HYBRID FENCED SUBSTRATE FOR TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FRONTSIDE MEMBRANE RELEASE

Transversely-excited film bulk acoustic resonators and filters with trap-rich layer

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC FILTERS WITH EXCESS PIEZOELECTRIC MATERIAL REMOVED

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH NARROW GAPS BETWEEN BUSBARS AND ENDS OF INTERDIGITAL TRANSDUCER FINGERS

RESONATOR AND RESONANCE DEVICE

Acoustic wave device

Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters

Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters

Transversely-excited film bulk acoustic resonators with interdigital transducer configured to reduce diaphragm stress

Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICES INCLUDING HIGH DENSITY INTERDIGITATED ELECTRODES

XBAR devices with excess piezoelectric material removed

TRANSDUCER STRUCTURE FOR AN ACOUSTIC WAVE DEVICE

FILTER DEVICE

Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate

Solidly-mounted transversely-excited film bulk acoustic device and method

Acoustic wave device

Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FABRICATION USING A PIEZOELECTRIC PLATE, SILICON SUBSTRATE AND HANDLE WAFER SANDWICH

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FABRICATION USING A PIEZOELECTRIC PLATE, SILICON SUBSTRATE AND HANDLE WAFER SANDWICH

Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures

Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures

Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures

Transversely-excited film bulk acoustic resonator

Transversely-excited film bulk acoustic resonator fabrication using wafer-to-wafer bonding

Filter using transversely-excited film bulk acoustic resonators

ACOUSTIC WAVE DEVICE

LONGITUDINALLY LEAKY SURFACE ACOUSTIC WAVE DEVICE WITH DOUBLE SIDE ACOUSTIC MIRROR

ACOUSTIC WAVE DEVICE HAVING STACKED PIEZOELECTRIC LAYERS BETWEEN ELECTRODES

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE WITH DOUBLE SIDE ACOUSTIC MIRROR

Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals

Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH BUSBAR SIDE EDGES THAT FORM ANGLES WITH A PERIMETER OF THE CAVITY

Layout of XBARs with multiple sub-resonators in parallel

Transversely-excited film bulk acoustic resonator matrix filters

Interdigitated RF filter

Small transversely-excited film bulk acoustic resonators with enhanced Q-factor

TWO-DIMENSIONAL HIGH-PERFORMANCE RESONATOR

Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers

Acoustic wave device, multiplexer, and communication apparatus

PIEZOELECTRIC ELEMENT

Transversely-excited film bulk acoustic resonators with narrow gaps between busbars and ends of interdigital transducer fingers

Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes

Electrode-defined unsuspended acoustic resonator

Transversely-excited film bulk acoustic resonators with multiple piezoelectric membrane thicknesses on the same chip

Transversely-excited film bulk acoustic resonators with multiple piezoelectric membrane thicknesses on the same chip

Decoupled transversely-excited film bulk acoustic resonators

Filters using decoupled transversely-excited film bulk acoustic resonators

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH IMPROVED COUPLING AND REDUCED ENERGY LEAKAGE

Integrating Predefined Templates with Open Ticket Functionality

Acoustic wave device and multiplexer

Transversely-excited film bulk acoustic resonator with periodic etched holes

Acoustic wave device

Acoustic wave filter

ACOUSTIC WAVE DEVICE

Acoustic wave device

ACOUSTIC WAVE DEVICE

Acoustic wave device

ACOUSTIC WAVE DEVICE

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

Acoustic wave device

Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators

Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer

Rotation in XY plane to suppress spurious modes in XBAR devices

Transversely-excited film bulk acoustic resonator with etched conductor patterns

Acoustic wave device

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH IMPROVED EDGE EFFECTS

XBAR devices with excess piezoelectric material removed

Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack

Forming XBAR devices with excess piezoelectric material removed

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED LOSS IN THE APERTURE DIRECTION

Transversely-excited film bulk acoustic resonator with low thermal impedance

Transversely-excited film bulk acoustic resonator with low thermal impedance

Transversely-excited film bulk acoustic resonator with low thermal impedance

Transversely-excited film bulk acoustic resonator with tether-supported diaphragm

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH INTEGRATED PASSIVE DEVICE

Transversely-excited film bulk acoustic resonator with spiral interdigitated transducer fingers

Acoustic wave device, high-frequency front-end circuit, and communication device

Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses

High Q solidly-mounted transversely-excited film bulk acoustic resonators

Acoustic wave device

Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate