220567 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by annealing
Microelectromechanical resonator
#2Microelectromechanical resonator
#3Microelectromechanical resonator
#4Microelectromechanical resonator
#5Microelectromechanical resonator
#6Method for fabricating single crystal piezoelectric RF resonators and filters with improved cavity definition
#7MEMS controlled oscillator
#8Direct contact heat control of micro structures
#9Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating
#10Mechanical oscillator formed by a network of basic oscillators
#11Temperature controlled MEMS resonator and method for controlling resonator frequency
#12MEMS controlled oscillator
#13Method for adjusting the frequency of a MEMS resonator
#14Resonator
#15Capacitive vertical silicon bulk acoustic resonator
#16Temperature controlled MEMS resonator and method for controlling resonator frequency
#17Method for adjusting the frequency of a MEMS resonator
#18Temperature controlled MEMS resonator and method for controlling resonator frequency
#19Trimming method for microresonators and microresonators made thereby