220568 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
MICRO-RESONATOR DESIGN IMPLEMENTING INTERNAL RESONANCE FOR MEMS APPLICATIONS
#2Micro-resonator design implementing internal resonance for MEMS applications
#3MEMS device including spurious mode suppression and corresponding operating method
#4MEMS frequency-tuning springs
#5Tunable narrow bandpass MEMS technology filter using an arch beam microresonator
#6Microelectromechanical system resonator devices and oscillator control circuits
#7Stacked balanced resonators
#8MEMS resonator
#9Micro-electromechanical resonators and methods of providing a reference frequency
#10Tunable Q resonator
#11Apparatus and method for tuning a resonance frequency
#12Volume wave resonator using excitation/detection of vibrations
#13Microelectronic machine-based ariable
#14Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#15Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#16Circuit for autoregulating the oscillation frequency of an oscillating mechanical system and device including the same
#17Out-of plane MEMS resonator with static out-of-plane deflection
#18MEMS device
#19Out-of-plane MEMS resonator with static out-of-plane deflection
#20Resonator and oscillator using same
#21Microelectromechanical resonant structure having improved electrical characteristics
#22Resonance frequency tunable MEMS device
#23Direct contact heat control of micro structures
#24Nanotube Device
#25Systems and methods to overcome DC offsets in amplifiers used to start resonant micro-electro mechanical systems
#26Resonant circuit, method of producing same, and electronic device
#27Resonant circuit, oscillation circuit, filter circuit, and electronic device
#28Methods and devices for compensating a signal using resonators
#29Tuning and compensation technique for semiconductor bulk resonators
#30Charge biased MEM resonator
#31Device for controlling the frequency of resonance of an oscillating micro-electromechanical system
#32Micromechanical element having adjustable resonant frequency
#33Capacitive vertical silicon bulk acoustic resonator
#34Electromechanical resonator and method of operating same
#35Micromechanical devices based on piezoelectric resonators
#36Vertical differential resonator