220569 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
Sub-classes:MEMS device
#2Micromechanical resonating devices and related methods
#3Resonance frequency tunable MEMS device
#4Self-locking micro electro mechanical device
#5Radio frequency device comprising a vibratile carbon nanotube and a vibratile tuning electrode
#6Micromechanical resonating devices and related methods
#7Method for gap adjustment of two mechanical elements of a substantially planar micromechanical structure and corresponding electromechanical resonator
#8TUNABLE METAMATERIALS USING MICROELECTROMECHANICAL STRUCTURES
#9Temperature compensation for silicon MEMS resonator
#10Temperature compensation for silicon MEMS resonator
#11Temperature compensation for silicon MEMS resonator
#12Vertical differential resonator