220593 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of surface acoustic wave devices; Characteristics of substrate, e.g. cutting angles of langanite substrates
Saw resonator comprising layers for attenuating parasitic waves
#2Surface elastic wave device comprising a single-crystal piezoelectric film and a crystalline substrate with low visoelastic coefficients
#3Ultra-thin film electrodes and protective layer for high temperature device applications