ClassID:

220674

H03H9/1057 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details; Holders; Supports; Mounting in enclosures for microelectro-mechanical devices

Recent Application in this class:
#1
20260100692
2026-04-09

MEMS Resonator

#2
20250239989
2025-07-24

Microelectromechanical resonator

#3
20250128937
2025-04-24

MEMS RESONATOR

#4
20250119112
2025-04-10

Micro-Mechanical Resonator Having Out-of-Phase and Out-of-Plane Flexural Mode Resonator Portions

#5
20250112614
2025-04-03

RESONANCE DEVICE

#6
20250096774
2025-03-20

ELECTRONIC PACKAGE STRUCTURE

#7
20250096768
2025-03-20

METAL RIBS IN ELECTROMECHANICAL DEVICES

#8
20250055438
2025-02-13

RESONATOR AND RESONATOR DRIVE METHOD

#9
20250007492
2025-01-02

Microelectromechanical resonator

#10
20240154598
2024-05-09

MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD

#11
20240128948
2024-04-18

RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

#12
20240125599
2024-04-18

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

#13
20240056054
2024-02-15

Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant

#14
20240039500
2024-02-01

Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions

#15
20230416081
2023-12-28

MEMS resonator

#16
20230396230
2023-12-07

Metal ribs in electromechanical devices

#17
20230359019
2023-11-09

MICROMECHANICAL RESONATOR WAFER ASSEMBLY AND METHOD OF FABRICATION THEREOF

#18
20230353122
2023-11-02

Resonance device and manufacturing method

#19
20230308076
2023-09-28

Methods and devices for microelectromechanical resonators

#20
20230283257
2023-09-07

Resonator and resonance device

#21
20230208394
2023-06-29

Electronic package structure

#22
20230183060
2023-06-15

MEMS resonator

#23
20230119602
2023-04-20

RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFACTURING METHOD

#24
20230051438
2023-02-16

Methods and devices for microelectromechanical resonators

#25
20230015447
2023-01-19

Resonator and resonance device

#26
20230014350
2023-01-19

Resonator and resonance device

#27
20220368301
2022-11-17

METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE

#28
20220337218
2022-10-20

Microelectromechanical resonator

#29
20220278671
2022-09-01

Resonator and resonance device including the same

#30
20220231663
2022-07-21

RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

#31
20220166403
2022-05-26

Microelectromechanical resonator

#32
20220094332
2022-03-24

RESONATOR AND RESONANCE DEVICE

#33
20220069795
2022-03-03

Metal ribs in electromechanical devices

#34
20220029598
2022-01-27

Resonance device

#35
20210257988
2021-08-19

Semiconductor package structure and method of manufacturing the same

#36
20210203304
2021-07-01

Resonator and resonance device including same

#37
20210167754
2021-06-03

Resonator and resonance device including same

#38
20210159884
2021-05-27

Resonance device

#39
20210152148
2021-05-20

Resonance device and manufacturing method of resonance device

#40
20210083647
2021-03-18

MEMS device having a connection portion formed of a eutectic alloy

#41
20210006230
2021-01-07

Resonator and resonance device

#42
20200407218
2020-12-31

Methods and devices for microelectromechanical resonators

#43
20200309527
2020-10-01

Fused quartz dual shell resonator and method of fabrication

#44
20200295732
2020-09-17

Resonance device and method for producing resonance device

#45
20200259476
2020-08-13

Resonance device

#46
20200243369
2020-07-30

Device packaging using a recyclable carrier substrate

#47
20200212877
2020-07-02

Resonator and resonance device

#48
20200204149
2020-06-25

Resonator and resonance device

#49
20200144985
2020-05-07

Method of providing protective cavity and integrated passive components in wafer level chip scale package using a carrier wafer

#50
20200136587
2020-04-30

Resonator and resonant device

#51
20200119714
2020-04-16

Resonator and resonance device

#52
20200112295
2020-04-09

RESONATOR AND RESONANT DEVICE

#53
20200067479
2020-02-27

Resonator and device including the same

#54
20200028485
2020-01-23

Microelectromechanical resonator

#55
20190386627
2019-12-19

Method of forming an integrated resonator with a mass bias

#56
20190305750
2019-10-03

Method of providing protective cavity and integrated passive components in wafer level chip scale package using a carrier wafer

#57
20190293499
2019-09-26

Inferring ambient atmospheric temperature

#58
20190245513
2019-08-08

Micromechanical resonator having reduced size

#59
20190238113
2019-08-01

COMPONENT WITH A THIN-LAYER COVERING AND METHOD FOR ITS PRODUCTION

#60
20190229703
2019-07-25

Component with a thin-layer covering and method for its production

#61
20190225488
2019-07-25

Methods and devices for microelectromechanical resonators

#62
20190123711
2019-04-25

Acoustic management in integrated circuit using phononic bandgap structure

#63
20190097600
2019-03-28

Resonator and resonance device

#64
20190089321
2019-03-21

Resonance device manufacturing method

#65
20190074812
2019-03-07

Resonator and resonance device

#66
20190052246
2019-02-14

Resonator and resonance device

#67
20190052243
2019-02-14

Multi-function frequency control device

#68
20180273374
2018-09-27

Inferring ambient atmospheric temperature

#69
20180226937
2018-08-09

Resonance device and manufacturing method therefor

#70
20180212139
2018-07-26

Resonator and resonator device

#71
20180205363
2018-07-19

Resonator and resonance device

#72
20180191330
2018-07-05

Resonator and resonance device

#73
20180191329
2018-07-05

Resonator and resonance device

#74
20180175824
2018-06-21

Resonator and resonation device

#75
20180159501
2018-06-07

Electronic component and method of manufacturing the same

#76
20180155187
2018-06-07

Sensing device including a MEMS sensor and an adjustable amplifier

#77
20180138887
2018-05-17

Vibration transducer

#78
20180127268
2018-05-10

MEMS device and method for producing same

#79
20180054180
2018-02-22

Resonator

#80
20180048288
2018-02-15

Resonator and resonance device

#81
20180048286
2018-02-15

Resonator and resonance device

#82
20180048285
2018-02-15

Resonator device

#83
20180048284
2018-02-15

Resonator

#84
20180034441
2018-02-01

Resonator and resonance device

#85
20180026603
2018-01-25

Electronic component

#86
20170303398
2017-10-19

Ceramic substrate, electronic component, and method of manufacturing ceramic substrate

#87
20170236742
2017-08-17

Device packaging using a recyclable carrier substrate

#88
20170222621
2017-08-03

Resonator

#89
20170201226
2017-07-13

Piezoelectric vibrator and piezoelectric vibration device

#90
20170187351
2017-06-29

Resonance device

#91
20170163243
2017-06-08

Method of providing protective cavity and integrated passive components in wafer level chip scale package using a carrier wafer

#92
20170133995
2017-05-11

Method for manufacturing electronic component module

#93
20160363609
2016-12-15

Method of forming capacitive MEMS sensor devices

#94
20160105156
2016-04-14

Method of forming an integrated resonator with a mass bias

#95
20160072474
2016-03-10

Resonation element, resonator, oscillator, electronic device and moving object

#96
20160014902
2016-01-14

Miniaturized multi-part component and method for producing same

#97
20160006414
2016-01-07

Methods and devices for microelectromechanical resonators

#98
20160002026
2016-01-07

Methods and devices for microelectromechanical pressure sensors

#99
20150280686
2015-10-01

Multi-function frequency control device

#100
20150042208
2015-02-12

Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer

#101
20140239979
2014-08-28

Capacitive MEMS sensor devices

#102
20140204541
2014-07-24

Electronic device and method for manufacturing electronic device

#103
20140203688
2014-07-24

Method for manufacturing an electronic device

#104
20140203424
2014-07-24

Electronic device and manufacturing method thereof

#105
20140146451
2014-05-29

Method for manufacturing electronic device, cover body, electronic device, electronic apparatus, and moving object

#106
20140084752
2014-03-27

Method of manufacturing electronic device, electronic apparatus, and mobile apparatus

#107
20140062262
2014-03-06

Methods and apparatus for temperature control of devices and mechanical resonating structures

#108
20140015373
2014-01-16

Electronic component module

#109
20130320808
2013-12-05

Integrated resonator with a mass bias

#110
20130313947
2013-11-28

Integration of piezoelectric materials with substrates

#111
20130200957
2013-08-08

MEMS oscillator and manufacturing method thereof

#112
20130176686
2013-07-11

Module and production method

#113
20130135056
2013-05-30

Oscillator device and manufacturing process of the same

#114
20130087379
2013-04-11

HIGH RELIABILITY WAFER LEVEL PACKAGE AND MANUFACTURING METHOD

#115
20120195797
2012-08-02

MEMS sensors with closed nodal anchors for operation in an in-plane contour mode

#116
20120112765
2012-05-10

MEMS in-plane resonators

#117
20120075030
2012-03-29

MEMS element, and manufacturing method of MEMS element

#118
20120003791
2012-01-05

Method for packaging electronic devices and integrated circuits

#119
20110279201
2011-11-17

Microelectromechanical resonator and a method for producing the same

#120
20110221536
2011-09-15

MEMS device and oscillator

#121
20110121908
2011-05-26

Resonator including a microelectromechanical system structure with first and second structures of silicon layers

#122
20110121414
2011-05-26

Encapsulation, MEMS and method of selective encapsulation

#123
20110095835
2011-04-28

Hybrid system having a non-MEMS device and a MEMS device

#124
20110074517
2011-03-31

Hybrid system having a non-MEMS device and a MEMS device

#125
20110006381
2011-01-13

MEMS package and method for the production thereof

#126
20100315179
2010-12-16

Methods and apparatus for temperature control of devices and mechanical resonating structures

#127
20100308423
2010-12-09

MEMS device and manufacturing method thereof

#128
20100197064
2010-08-05

Silicon-based RF system and method of manufacturing the same

#129
20100109815
2010-05-06

MEMS resonator and manufacturing method of the same

#130
20100059877
2010-03-11

Method for packaging electronic devices and integrated circuits

#131
20090315169
2009-12-24

FRAME AND METHOD OF MANUFACTURING ASSEMBLY

#132
20090195330
2009-08-06

Vibrator, resonator using the same and electromechanical filter using the same

#133
20090101383
2009-04-23

Micromechanical device and method of manufacturing micromechanical device

#134
20080290479
2008-11-27

Wafer level device package with sealing line having electroconductive pattern and method of packaging the same

#135
20080261344
2008-10-23

Vacuum packaged single crystal silicon device

#136
20080261343
2008-10-23

Vacuum packaged single crystal silicon device

#137
20080238575
2008-10-02

Electro mechanical device and manufacturing method thereof, and resonator and manufacturing method thereof

#138
20080233349
2008-09-25

Functional device

#139
20080142912
2008-06-19

MEMS resonator and manufacturing method of the same

#140
20080076211
2008-03-27

Method for making an electromechanical component on a plane substrate

#141
20080054759
2008-03-06

Wafer-level encapsulation and sealing of electrostatic transducers

#142
20080036094
2008-02-14

Functional device-mounted module and a method for mounting functional device-mounted module

#143
20080032457
2008-02-07

Structure and method of making sealed capped chips

#144
20070222056
2007-09-27

Encapsulated electrical component and production method

#145
20070096850
2007-05-03

Method and apparatus for frequency tuning of a micro-mechanical resonator

#146
20070096312
2007-05-03

Structure and self-locating method of making capped chips

#147
20070096311
2007-05-03

Structure and method of making capped chips having vertical interconnects

#148
20070096296
2007-05-03

Manufacture of mountable capped chips

#149
20070096295
2007-05-03

Back-face and edge interconnects for lidded package

#150
20070040257
2007-02-22

Chip packages with covers

#151
20060211169
2006-09-21

Vacuum packaged single crystal silicon device

#152
20060180897
2006-08-17

Silicon-based RF system and method of manufacturing the same

#153
20060113660
2006-06-01

Chip package mechanism

#154
20060033189
2006-02-16

Structure and method of forming capped chips

#155
20060006964
2006-01-12

Method for frequency tuning of a micro-mechanical resonator

#156
20050214974
2005-09-29

Integrated circuit having one or more conductive devices formed over a SAW and/or MEMS device

#157
20050195049
2005-09-08

Method and apparatus for frequency tuning of a micro-mechanical resonator

#158
20050166677
2005-08-04

Vertically integrated MEMS structure with electronics in a hermetically sealed cavity

#159
20050151442
2005-07-14

Micromechanical electrostatic resonator

#160
20050121413
2005-06-09

Method of manufacturing an electronic device

#161
20050095835
2005-05-05

Structure and method of making capped chips having vertical interconnects

#162
20050087861
2005-04-28

Back-face and edge interconnects for lidded package

#163
20050085016
2005-04-21

Structure and method of making capped chips using sacrificial layer

#164
20050082654
2005-04-21

Structure and self-locating method of making capped chips

#165
20050082653
2005-04-21

Structure and method of making sealed capped chips

#166
20050067688
2005-03-31

Structure and method of making capped chips including vertical interconnects having stud bumps engaged to surfaces of said caps

#167
20050036269
2005-02-17

Vacuum-cavity MEMS resonator

#168
20050017348
2005-01-27

Manufacture of mountable capped chips

#169
17197378
2023-09-26

MEMS resonator with co-located temperature sensor

#170
16861778
2023-02-21

MEMS resonator

#171
16591717
2024-09-17

MEMS resonator with colocated temperature sensor