220772 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Filters; Coupling means therefor; Mechanical coupling means for microelectro-mechanical filters
MEMS RESONATOR
#2HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS
#3RF-powered micromechanical clock generator
#4Corner coupling resonator array
#5Signal processing apparatus and method for transmitting and receiving coherent parallel optical signals
#6Tunable Q resonator
#7Integrated microelectromechanical system devices and methods for making the same
#8Frequency divider apparatus
#9Integrated microelectromechanical system devices and methods for making the same
#10MEMS resonator
#11Microelectromechanical filter
#12Micromechanical resonator array and method for manufacturing thereof
#13MEMS resonator array structure and method of operating and using same
#14Device with a micro electromechanical structure
#15Resonators, resonator arrays, apparatus and methods
#16Resonator having a sideways oscillation compressing one connector while extending another
#17Digitally programmable RF MEMS filters with mechanically coupled resonators
#18MEMS resonator having at least one resonator mode shape
#19Nano electromechanical integrated-circuit bank and switch
#20Resonator and filter using the same
#21Nanomechanical oscillator
#22MEMS resonator array structure and method of operating and using same
#23Multi-ring resonator system and method
#24MEMS filter device having a nanosize coupling element and manufacturing method thereof
#25High frequency device, power supply device and communication apparatus
#26MEMS resonator array structure
#27Mechanical oscillator formed by a network of basic oscillators
#28Nonlinear micromechanical resonator
#29Mechanical decoupling device for monolithic differential vibrating sensor
#30Dielectrically transduced single-ended to differential MEMS filter
#31Nonlinear internal resonance based micromechanical resonators
#32In-plane mechanically coupled microelectromechanical tuning fork resonators
#33MEMS resonator array structure and method of operating and using same
#34Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto
#35High-Q micromechanical resonator devices and filters utilizing same
#36Vertical differential resonator
#37Micromechanical devices based on piezoelectric resonators
#38Vertical differential resonator