Patents-Review.com
ClassID:

220780 ⎘

H03H9/562 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Filters comprising resonators of piezo-electric or electrostrictive material; Monolithic crystal filters comprising a ceramic piezoelectric layer

Recent Application in this class:
#1
20260058640
2026-02-26

5.5 GHz Wi-Fi 5G COEXISTENCE ACOUSTIC WAVE RESONATOR RF FILTER CIRCUIT

 #2
20250364966
2025-11-27

PIEZOELECTRIC MATERIALS, DEVICES AND METHODS OF FABRICATING SAID DEVICES

 #3
20250357907
2025-11-20

TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING

 #4
20250309863
2025-10-02

MULTIPLE ELECTROMECHANICAL COUPLING COEFFICIENTS ON SAME WAFER

 #5
20250275480
2025-08-28

ACOUSTIC WAVE DEVICE

 #6
20250274100
2025-08-28

METHODS OF FORMING PIEZOELECTRIC LAYERS HAVING ALTERNATING POLARIZATIONS AND RELATED BULK ACOUSTIC WAVE FILTER DEVICES

 #7
20250260388
2025-08-14

ACOUSTIC WAVE DEVICE

 #8
20250219610
2025-07-03

STRAINED PIEZOELECTRIC DEVICES FOR RADIOFREQUENCY RESONATORS AND FABRICATION METHODS THEREOF

 #9
20250211203
2025-06-26

FUNDAMENTAL TONE MITIGATION FOR SECOND OVERTONE BULK ACOUSTIC WAVE RESONATOR

 #10
20250183876
2025-06-05

ACOUSTIC WAVE DEVICE

 #11
20250158589
2025-05-15

ACOUSTIC WAVE DEVICE INCLUDING ION IMPLANTED PIEZOELECTRIC LAYER

 #12
20250150053
2025-05-08

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS AND FILTERS

 #13
20250105820
2025-03-27

BRAGG STACK STRUCTURE FOR SPURIOUS MODE SUPPRESSION IN SOLIDLY-MOUNTED ACOUSTIC RESONATOR

 #14
20250105816
2025-03-27

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE

 #15
20250096769
2025-03-20

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH BURIED OXIDE STRIP ACOUSTIC CONFINEMENT STRUCTURES

 #16
20250088167
2025-03-13

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A CAVITY HAVING ROUND END ZONES

 #17
20250070753
2025-02-27

FILTERS USING TRANSVERSLY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH FREQUENCY-SETTING DIELECTRIC LAYERS

 #18
20250070752
2025-02-27

CIRCUITS, DEVICES AND METHODS FOR HARMONIC CONTROL

 #19
20250070750
2025-02-27

ACOUSTIC WAVE DEVICE AND FILTER APPARATUS

 #20
20250038730
2025-01-30

ACOUSTIC WAVE DEVICE

 #21
20250023554
2025-01-16

ACOUSTIC WAVE DEVICE

 #22
20250023553
2025-01-16

ACOUSTIC WAVE DEVICE

 #23
20250023552
2025-01-16

BULK ACOUSTIC WAVE FILTERS WITH DIFFERENTLY DOPED ALUMINUM NITRIDE RESONATORS

 #24
20250023539
2025-01-16

FILTER USING TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH DIVIDED FREQUENCY-SETTING DIELECTRIC LAYERS

 #25
20250015777
2025-01-09

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

 #26
20240396526
2024-11-28

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A BACK-SIDE DIELECTRIC LAYER

 #27
20240388273
2024-11-21

ALUMINUM NITRIDE DOPANT SCHEME FOR BULK ACOUSTIC WAVE DEVICES

 #28
20240380376
2024-11-14

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

 #29
20240372519
2024-11-07

METHOD FOR FABRICATING FILM BULK ACOUSTIC RESONATOR (FBAR), FBAR, AND FILTER

 #30
20240364294
2024-10-31

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

 #31
20240275360
2024-08-15

FILTER DEVICE

 #32
20240195387
2024-06-13

FILTER ELEMENT AND FILTER DEVICE

 #33
20240195377
2024-06-13

METHOD FOR MAKING A WITH BULK ACOUSTIC WAVE FILTER

 #34
20240186984
2024-06-06

Transversely-excited film bulk acoustic resonator with periodic etched holes

 #35
20240186983
2024-06-06

XBAR resonators with non-rectangular diaphragms

 #36
20240113681
2024-04-04

Multi-port filter using transversely-excited film bulk acoustic resonators

 #37
20240039506
2024-02-01

Solidly-mounted transversely-excited film bulk acoustic resonator

 #38
20240022234
2024-01-18

Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers

 #39
20240022233
2024-01-18

Transversely-excited film bulk acoustic resonator

 #40
20240022228
2024-01-18

Decoupled transversely-excited film bulk acoustic resonators

 #41
20230344414
2023-10-26

Transversely-excited acoustic resonator with Z-cut lithium niobate plate

 #42
20230344400
2023-10-26

Electronic device and formation method therefor

 #43
20230327649
2023-10-12

5.5 GHz Wi-Fi 5G COEXISTENCE ACOUSTIC WAVE RESONATOR RF FILTER CIRCUIT

 #44
20230318571
2023-10-05

COMPOSITE FILTER DEVICE

 #45
20230318569
2023-10-05

Radio-frequency circuits and devices having harmonic suppression

 #46
20230318564
2023-10-05

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED SPURIOUS MODES

 #47
20230291388
2023-09-14

Transversely-excited film bulk acoustic resonator with recessed rotated-Y-X cut lithium niobate

 #48
20230275562
2023-08-31

ACOUSTIC WAVE DEVICE

 #49
20230261631
2023-08-17

Acoustic wave device

 #50
20230261630
2023-08-17

ACOUSTIC WAVE DEVICE

 #51
20230261626
2023-08-17

TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING

 #52
20230216475
2023-07-06

ACOUSTIC WAVE DEVICE

 #53
20230198500
2023-06-22

ACOUSTIC WAVE DEVICE

 #54
20230113584
2023-04-13

METHOD FOR FORMING A PIEZOELECTRIC FILM

 #55
20230112046
2023-04-13

Resonator shapes for bulk acoustic wave (BAW) devices

 #56
20230099342
2023-03-30

Piston mode lamb wave resonators

 #57
20230034164
2023-02-02

RF BAW RESONATOR FILTER ARCHITECTURE FOR 6.5GHZ WI-FI 6E COEXISTENCE AND OTHER ULTRA-WIDEBAND APPLICATIONS

 #58
20230006632
2023-01-05

Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate

 #59
20220393666
2022-12-08

FILTER DEVICE

 #60
20220385263
2022-12-01

Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate

 #61
20220376669
2022-11-24

Solidly-mounted transversely-excited film bulk acoustic device and method

 #62
20220352869
2022-11-03

Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures

 #63
20220352868
2022-11-03

Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures

 #64
20220352867
2022-11-03

Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures

 #65
20220352866
2022-11-03

RF BAW RESONATOR FILTER ARCHITECTURE FOR 6.5GHZ WI-FI 6E COEXISTENCE AND OTHER ULTRA-WIDEBAND APPLICATIONS

 #66
20220345110
2022-10-27

5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit

 #67
20220344576
2022-10-27

METHODS OF FORMING GROUP III PIEZOELECTRIC THIN FILMS VIA SPUTTERING

 #68
20220321095
2022-10-06

ACOUSTIC WAVE DEVICE HAVING STACKED PIEZOELECTRIC LAYERS BETWEEN ELECTRODES

 #69
20220286108
2022-09-08

ALUMINUM NITRIDE DOPANT SCHEME FOR BULK ACOUSTIC WAVE FILTERS

 #70
20220278666
2022-09-01

Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers

 #71
20220271195
2022-08-25

PATTERNED SUBSTRATE, SEMICONDUCTOR DEVICE AND NANOTUBE STRUCTURE

 #72
20220263490
2022-08-18

Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes

 #73
20220231665
2022-07-21

5 and 6 GHz Wi-Fi coexistence acoustic wave resonator RF diplexer circuit

 #74
20220231664
2022-07-21

Hybrid bulk acoustic wave filter

 #75
20220231659
2022-07-21

Decoupled transversely-excited film bulk acoustic resonators

 #76
20220216855
2022-07-07

Transversely-excited film bulk acoustic resonator with periodic etched holes

 #77
20220216854
2022-07-07

Acoustic wave device

 #78
20220216848
2022-07-07

Acoustic wave device

 #79
20220216846
2022-07-07

ACOUSTIC WAVE DEVICE

 #80
20220216844
2022-07-07

Acoustic wave device

 #81
20220216842
2022-07-07

ACOUSTIC WAVE DEVICE AND FILTER DEVICE

 #82
20220216392
2022-07-07

Acoustic wave device

 #83
20220200573
2022-06-23

Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators

 #84
20220190807
2022-06-16

Rotation in XY plane to suppress spurious modes in XBAR devices

 #85
20220182038
2022-06-09

Transversely-excited film bulk acoustic resonator with etched conductor patterns

 #86
20220158608
2022-05-19

Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack

 #87
20220149809
2022-05-12

Transversely-excited film bulk acoustic resonator with low thermal impedance

 #88
20220149808
2022-05-12

Transversely-excited film bulk acoustic resonator with low thermal impedance

 #89
20220149807
2022-05-12

Transversely-excited film bulk acoustic resonator with low thermal impedance

 #90
20220140226
2022-05-05

Piezoelectric composition, piezoelectric element, piezoelectric device, piezoelectric transformer, ultrasonic motor, ultrasonic wave-generating element, and filter element

 #91
20220116019
2022-04-14

Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate

 #92
20220116010
2022-04-14

Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands

 #93
20220103154
2022-03-31

Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub

 #94
20220094322
2022-03-24

ELECTRO-ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING THE SAME

 #95
20220093683
2022-03-24

3D HETEROGENEOUS INTEGRATED CRYSTALLINE PIEZOELECTRIC BULK ACOUSTIC RESONATORS

 #96
20220085795
2022-03-17

Tunable monolithic group III-nitride filter banks

 #97
20220060170
2022-02-24

Solidly-mounted transversely-excited film bulk acoustic device

 #98
20220052665
2022-02-17

RF BAW resonator filter architecture for 6.5GHz Wi-Fi 6E coexistence and other ultra-wideband applications

 #99
20220014174
2022-01-13

Acoustic wave device

 #100
20220014168
2022-01-13

Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate

 #101
20220014161
2022-01-13

Method for making transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate

 #102
20210399718
2021-12-23

Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators

 #103
20210399717
2021-12-23

Filter using lithium niobate and rotated lithium tantalate transversely-excited film bulk acoustic resonators

 #104
20210399716
2021-12-23

Filter device, RF front-end device and wireless communication device

 #105
20210399713
2021-12-23

BAW resonance device, filter device and RF front-end device

 #106
20210391844
2021-12-16

Transversely-excited film bulk acoustic resonator

 #107
20210384889
2021-12-09

Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness

 #108
20210360837
2021-11-18

Filter with cover layer and shield layer

 #109
20210344325
2021-11-04

Transversely-excited film bulk acoustic resonator with etched conductor patterns

 #110
20210344317
2021-11-04

Transversely-excited film bulk acoustic resonator with etched conductor patterns

 #111
20210328568
2021-10-21

Solidly-mounted transversely-excited film bulk acoustic resonator

 #112
20210313953
2021-10-07

Transversely-excited film bulk acoustic resonator with reduced spurious modes

 #113
20210313952
2021-10-07

Transversely-excited film bulk acoustic resonator with reduced spurious modes

 #114
20210313951
2021-10-07

Transversely-excited film bulk acoustic resonator with reduced spurious modes

 #115
20210297055
2021-09-23

Acoustic wave device and filter

 #116
20210281238
2021-09-09

Transversely-excited film bulk acoustic resonator with a cavity having round end zones

 #117
20210273632
2021-09-02

Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers using rotated y-x cut lithium niobate

 #118
20210273626
2021-09-02

Transversely-excited film bulk acoustic resonator with reduced spurious modes

 #119
20210273625
2021-09-02

Aluminum nitride dopant scheme for bulk acoustic wave filters

 #120
20210265978
2021-08-26

Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers

 #121
20210257992
2021-08-19

Transversely-excited film bulk acoustic resonator with a bonding layer and an etch-stop layer

 #122
20210257991
2021-08-19

Transversely-excited film bulk acoustic resonator with a back-side dielectric layer and an etch-stop layer

 #123
20210257990
2021-08-19

Transversely-excited film bulk acoustic resonator with thermally conductive etch-stop layer

 #124
20210234528
2021-07-29

Fifth-generation (5G)-focused piezoelectric resonators and filters

 #125
20210184648
2021-06-17

Elastic wave device

 #126
20210167756
2021-06-03

Transversely-excited film bulk acoustic resonator with periodic etched holes

 #127
20210159874
2021-05-27

Acoustic resonators and filters that support fifth generation (5G) wireless communications standards

 #128
20210143794
2021-05-13

Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers

 #129
20210111703
2021-04-15

Filter using transversely-excited film bulk acoustic resonators with two frequency setting layers

 #130
20210105006
2021-04-08

Bulk acoustic wave filter co-package

 #131
20210105005
2021-04-08

Method for forming multiple bulk acoustic wave filters on shared die

 #132
20210105003
2021-04-08

XBAR resonators with non-rectangular diaphragms

 #133
20210105002
2021-04-08

XBAR resonators with non-rectangular diaphragms

 #134
20210099153
2021-04-01

Piston mode Lamb wave resonators

 #135
20210091749
2021-03-25

Transversly-excited film bulk acoustic resonators and filters

 #136
20210091745
2021-03-25

Transversely-excited film bulk acoustic filter using pitch to establish frequency separation between resonators

 #137
20210083652
2021-03-18

Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator

 #138
20210075400
2021-03-11

Harmonic suppression in bulk acoustic wave duplexer

 #139
20210075393
2021-03-11

Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes

 #140
20210067133
2021-03-04

Multi-port filter using transversely-excited film bulk acoustic resonators

 #141
20210058056
2021-02-25

Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers

 #142
20210044278
2021-02-11

Bulk acoustic wave filters on shared die

 #143
20210044272
2021-02-11

Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers

 #144
20210028757
2021-01-28

Transversely-excited film bulk acoustic resonator with reduced spurious modes

 #145
20210028756
2021-01-28

Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer

 #146
20210013861
2021-01-14

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS

 #147
20210013860
2021-01-14

Transversely-excited film bulk acoustic resonator with a cavity having a curved perimeter

 #148
20210013859
2021-01-14

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS

 #149
20200366265
2020-11-19

Bulk acoustic resonator and filter including the same

 #150
20200358426
2020-11-12

Solidly-mounted transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate

 #151
20200350891
2020-11-05

Transversely-excited film bulk acoustic resonator with etch-stop layer

 #152
20200350890
2020-11-05

Transversely-excited film bulk acoustic resonator with periodic etched holes

 #153
20200343877
2020-10-29

Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers

 #154
20200336126
2020-10-22

Transversely-excited film bulk acoustic resonator

 #155
20200336125
2020-10-22

Resonator shapes for bulk acoustic wave (BAW) devices

 #156
20200313649
2020-10-01

Film bulk acoustic resonator (FBAR) devices for high frequency RF filters

 #157
20200304091
2020-09-24

Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack

 #158
20200287521
2020-09-10

Rotation in XY plane to suppress spurious modes in XBAR devices

 #159
20200235719
2020-07-23

XBAR resonators with non-rectangular diaphragms

 #160
20200228096
2020-07-16

5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit

 #161
20200204157
2020-06-25

FRONT END MODULE

 #162
20200177162
2020-06-04

Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate

 #163
20200169241
2020-05-28

Solidly-mounted transversely-excited film bulk acoustic resonator

 #164
20200119715
2020-04-16

Method and structure for single crystal acoustic resonator devices using thermal recrystallization

 #165
20200119087
2020-04-16

Techniques for monolithic co-integration of polycrystalline thin-film bulk acoustic resonator devices and monocrystalline III-N semiconductor transistor devices

 #166
20200112298
2020-04-09

4.5G 3.55-3.7 GHz band bulk acoustic wave resonator RF filter circuit

 #167
20200111949
2020-04-09

Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films

 #168
20200091893
2020-03-19

Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness

 #169
20200036358
2020-01-30

Acoustic wave filter device

 #170
20200013948
2020-01-09

Methods of forming group III piezoelectric thin films via sputtering

 #171
20190386637
2019-12-19

Solidly-mounted transversely-excited film bulk acoustic resonator

 #172
20190386636
2019-12-19

Transversely-excited film bulk acoustic resonator

 #173
20190386635
2019-12-19

Transversely-excited film bulk acoustic resonator

 #174
20190379344
2019-12-12

FILM BULK ACOUSTIC WAVE RESONATORS AND FABRICATION METHODS THEREOF

 #175
20190372543
2019-12-05

Acoustic filter with packaging-defined boundary conditions and method for producing the same

 #176
20190363694
2019-11-28

Bulk acoustic wave (BAW) and passive-on-glass (POG) filter co-integration

 #177
20190363693
2019-11-28

Elastic wave device

 #178
20190356300
2019-11-21

Acoustic wave resonator and electronic filter circuit

 #179
20190319604
2019-10-17

Piezoelectric thin film and bulk acoustic wave filter

 #180
20190305039
2019-10-03

Epitaxial AIN/cREO structure for RF filter applications

 #181
20190253035
2019-08-15

Acoustic wave element and method for manufacturing same

 #182
20190173452
2019-06-06

Film bulk acoustic resonator (FBAR) RF filter having epitaxial layers

 #183
20190089325
2019-03-21

Piezoelectric layer and piezoelectric device comprising the piezoelectric layer

 #184
20190074813
2019-03-07

Piston mode lamb wave resonators

 #185
20190020327
2019-01-17

5.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit

 #186
20190007021
2019-01-03

Piezoelectric thin film resonator and fabrication method of the same, filter, and multiplexer

 #187
20180358406
2018-12-13

Techniques for integrating three-dimensional islands for radio frequency (RF) circuits

 #188
20180342999
2018-11-29

Method and structure for single crystal acoustic resonator devices using thermal recrystallization

 #189
20180337654
2018-11-22

Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof

 #190
20180331156
2018-11-15

Integrated RF frontend structures

 #191
20180323767
2018-11-08

Film bulk acoustic resonator (FBAR) devices for high frequency RF filters

 #192
20180309422
2018-10-25

5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit

 #193
20180278228
2018-09-27

Method for fabricating RF resonators and filters

 #194
20180275485
2018-09-27

Method of fabrication for single crystal piezoelectric RF resonators and filters

 #195
20180175826
2018-06-21

Bulk acoustic wave resonator with multilayer piezoelectric structure

 #196
20180062608
2018-03-01

Bulk acoustic resonator and filter including the same

 #197
20170353171
2017-12-07

Temperature compensated oscillation circuit, oscillator, electronic apparatus, vehicle, and method of manufacturing oscillator

 #198
20170222622
2017-08-03

Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof

 #199
20170187350
2017-06-29

Elastic wave device having a cut in a busbar electrode layer

 #200
20170134003
2017-05-11

Elastic wave device

 #201
20160261249
2016-09-08

Splitter

 #202
20150256146
2015-09-10

Resonator filter having a recess in insulating material of a multi-layered coupling structure

 #203
20150244346
2015-08-27

Bulk acoustic wave resonators having doped piezoelectric material and frame elements

 #204
20150054597
2015-02-26

Elastic wave filter device and duplexer

 #205
20120086523
2012-04-12

Method of manufacturing laterally coupled BAW thin films

 #206
20110121683
2011-05-26

Piezoelectric resonator operating in thickness shear mode

 #207
20110006638
2011-01-13

Multidomain acoustic wave devices

 #208
20080290759
2008-11-27

Piezoelectric vibrator

 #209
20080143457
2008-06-19

Process for making a FBAR bandpass filter

 #210
20080055021
2008-03-06

Acoustic wave device, filter and duplexer

 #211
20070210875
2007-09-13

Piezoelectric plate electric connection structure

 #212
20070063623
2007-03-22

Multilayer ceramic substrate, method for manufacturing the same, and piezoelectric resonator component

 #213
20060139121
2006-06-29

FBAR band pass filter, duplexer having the filter and methods for manufacturing the same

 #214
20050248238
2005-11-10

Thin film piezoelectric resonator, thin film piezoelectric device, and manufacturing method thereof

 #215
20050093397
2005-05-05

Method of producing thin film bulk acoustic resonator

 #216
20050046519
2005-03-03

Film bulk acoustic resonator and method of producing the same

 #217
20050035828
2005-02-17

Film bulk acoustic resonator (FBAR) device and method for producing the same

 #218
20050012569
2005-01-20

Piezoelectric vibrator, filter using the same and its adjusting method

 #219
17408120
2022-02-01

Decoupled transversely-excited film bulk acoustic resonators