220790 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Filters comprising resonators of piezo-electric or electrostrictive material; Multiple crystal filters implemented with thin-film techniques Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
Sub-classes:TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR PACKAGE
#2TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR PACKAGE
#3Transversely-excited film bulk acoustic resonator package and method
#4STACKED FILTER PACKAGE HAVING MULTIPLE TYPES OF ACOUSTIC WAVE DEVICES
#5Transversely-excited film bulk acoustic resonator package and method
#6Transversely-excited film bulk acoustic resonator package
#7Transversely-excited film bulk acoustic resonator package and method
#8Method of fabricating transversely-excited film bulk acoustic resonator
#9Transversely-excited film bulk acoustic resonator package
#10Transversely-excited film bulk acoustic resonator package
#11Transversely-excited film bulk acoustic resonator package
#12Transversely-excited film bulk acoustic resonator package
#13Transversely-excited film bulk acoustic resonator package and method
#14TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR
#15Transversely-excited film bulk acoustic resonator package and method
#16Microelectromechanical resonant circulator
#17Elastic wave apparatus
#18Resonator system with a plurality of individual mechanically coupled resonators and method of making same
#19MEMS piezoelectric longitudinal mode resonator
#20Single-port multi-resonator acoustic resonator device
#21Resonator and component with hermetic encapsulation
#22Film bulk-acoustic resonator filter having unbalanced-balanced input/output structure
#23Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
#24Resonator system with a plurality of individual mechanically coupled resonators and method of making same
#25Acoustic resonator device, filter device, manufacturing method for acoustic resonator device, and communication apparatus
#26Film bulk acoustic resonator structure and method of making
#27Electronic component having a resonator and fabrication process