233532 ⎘
Direct voltage accelerators; Accelerators using single pulses; Multistage accelerators Tandems
SYSTEMS, DEVICES, AND METHODS FOR HIGH QUALITY ION BEAM FORMATION
#2SYSTEMS, DEVICES, AND METHODS FOR ION BEAM MODULATION
#3SYSTEMS, DEVICES, AND METHODS FOR DEFORMATION REDUCTION AND RESISTANCE IN METALLIC BODIES
#4Systems, devices, and methods for high quality ion beam formation
#5Systems, devices, and methods for ion beam modulation
#6Systems, devices, and methods for deformation reduction and resistance in metallic bodies
#7Systems, devices, and methods for high quality ion beam formation
#8Functional membrane for ion beam transmission, beam line device and filter device each having the same, and method of adjusting filter device
#9Bias electrodes for tandem accelerator
#10Cold stripper for high energy ion implanter with tandem accelerator
#11Electrode, accelerator column and ion implantation apparatus including same