PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT

PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT

FLUORORESIN MEMBRANE MATERIAL AND PRODUCTION PROCESS THEREFOR

Plasma etching method

Zincoaluminosilicates with GME topologies and methods of making and using the same

Method and apparatus for deposition cleaning in a pumping line

Stamps including a self-assembled block copolymer material, and related methods

Methods to produce zeolites with the GME topology and compositions derived therefrom

Plasma abatement system utilizing water vapor and oxygen reagent

In situ apparatus and method for providing deuterium oxide or tritium oxide in an industrial apparatus or method

Abatement and strip process chamber in a dual load lock configuration

Method and apparatus for deposition cleaning in a pumping line

Process for purifying (hydro)fluoropropenes contaminated with halogenated ethane

Abatement and strip process chamber in a dual loadlock configuration

Plasma foreline thermal reactor system

Hydrochloric acid purification process and plant

Chamber Cleaning and Semiconductor Etching Gases

Plasma abatement of compounds containing heavy atoms

Enhancement of claus tail gas treatment by sulfur dioxide-selective membrane technology

Chamber Cleaning and Semiconductor Etching Gases

Plasma abatement technology utilizing water vapor and oxygen reagent

COMPOSITIONS CONTAINING CHLOROFLUOROOLEFINS OR FLUOROOLEFINS

Plasma abatement of compounds containing heavy atoms

Methods of forming a self-assembled block copolymer material

TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD

Abatement system

Apparatus for evacuating a corrosive effluent gas stream from a processing chamber

Device of purifying hydrogen fluoride in semiconductor process waste gas

Zincoaluminosilicates with CHA topologies and methods of making and using the same

Zeolites with the GME topology and methods of using the same

Method of capturing sintered product after sintering waste gas in semiconductor manufacturing process

Abatement device

Ethylene disposal apparatus and ethylene disposal method using same

Apparatus for exhaust cooling

Plasma abatement solids avoidance by use of oxygen plasma cleaning cycle

Gas treatment process and apparatus

Toroidal plasma abatement apparatus and method

Vacuum evacuation system

Method and apparatus for valve deposition cleaning and prevention by plasma discharge

Hydrochloric acid purification process

Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system

Process for purifying (hydro) fluoropropenes contaminated with halogenated ethane

Compositions containing chlorofluoroolefins or fluoroolefins

Method for treating waste gas containing polycyclic aromatic hydrocarbons

Apparatus and methods for generating reactive gas with glow discharges

Plasma induced flow electrode structure, plasma induced flow generation device, and method of manufacturing plasma induced flow electrode structure

Chamber cleaning and semiconductor etching gases

Method for treating sulfur hexafluoride using radiation and apparatus for collecting and treating by-products

Apparatus for treating a gas in a conduit

Methods to produce zeolites with the GME topology and compositions derived therefrom

Processes for preparing zincoaluminosilicates with AEI, CHA, and GME topologies and compositions derived therefrom

Separation and recycling system of perfluorinated compounds

Porous polymers for the abatement and purification of electronic gas and the removal of mercury from hydrocarbon streams

Abatement system having a plasma source

Capacitively coupled plasma source for abating compounds produced in semiconductor processes

Corrosion resistant abatement system

Reagent delivery system freeze prevention heat exchanger

Method for preventing explosion of exhaust gas in decompression processing apparatus

CVD system having particle separator

Plasma reactor for abatement of hazardous material

Exhaust system

Device and method for exhaust gas treatment on CVD reactor

Vacuum pump with abatement function

Vacuum pump with abatement function

Plasma abatement of compounds containing heavy atoms

Stamps and methods of forming a pattern on a substrate

Compositions containing chlorofluoroolefins or fluoroolefins

Trap assembly in film forming apparatus

Substrate processing apparatus and substrate detaching method

System and methods for removing contaminants from gas effluents

Trap mechanism, exhaust system, and film formation device

Catalyst for decomposition of perfluorinated compound containing halogen acid gas, and preparation method thereof

Gas pumping and treatment device

Exhaust gas abatement apparatus

Compositions containing chlorfluoroolefins or fluoroolefins

Toroidal plasma abatement apparatus and method

Use of a KMgFcompound for trapping metals in the form of fluorides and/or oxyfluorides in a gaseous or a liquid phase

In-situ generation of the molecular etcher carbonyl fluoride or any of its variants and its use

Process to enhance mixing of dry sorbents and flue gas for air pollution control

Abatement and strip process chamber in a dual loadlock configuration

Apparatus for treating an exhaust gas in a foreline

Compositions containing chlorofluoroolefins or fluoroolefins

Method for biogas treatment

Caustic scrubber system and method for biogas treatment

PLASMA REACTOR FOR REMOVAL OF CONTAMINANTS

Continuous process for converting natural gas to liquid hydrocarbons

Method of producing high purity steam

Method for the manufacture of electronic devices with purified fluorine

Exhaust gas treatment system

RF coupled plasma abatement system comprising an integrated power oscillator

Apparatus and method for recovery of sulfur hexafluoride

Method of making fluoropolymer dispersion

Methods for reducing the acidic gas content of effluent gases

EXHAUST GAS PROCESSING APPARATUS AND METHOD FOR PROCESSING EXHAUST GAS

METHOD FOR CATALYTIC TREATING PERFLUOROCOMPOUND GAS INCLUDING PARTICLE REMOVING UNIT

Hydrofluorocarbon sensing and elimination device and method

Pyrolysis Methods, Catalysts, and Apparatuses for Treating and/or Detecting Gas Contaminants

Solvent compositions containing chlorofluoroolefins or fluoroolefins

Method of purifying a hydrogen stream using an electrochemical cell

Electrode for plasma generation

Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same

Raw material recovery method and trapping mechanism for recovering raw material

Method of treating a gas stream

Substantially Non-Oxidizing Plasma Treatment Devices and Processes

Methods and apparatus for treating exhaust gas in a processing system

FLUORINE PURIFICATION

Recovery of a gaseous component from a mixture of gaseous compounds

Plasma reactor for abating hazardous materials and driving method thereof

EXHAUST GAS TREATMENT DEVICE FOR A CVD DEVICE, CVD DEVICE, AND EXHAUST GAS TREATMENT METHOD

METAL CAPTURING APPARATUS AND ATOMIC LAYER DEPOSITION APPARATUS HAVING THE SAME

EXHAUST SYSTEM STRUCTURE OF FILM FORMATION APPARATUS, FILM FORMATION APPARATUS, AND EXHAUST GAS PROCESSING METHOD

Apparatus for treating a gas stream

Exhaust gas treatment method and system

Method to produce nanometer-sized features with directed assembly of block copolymers

Method for the cleaning of off-gas

METHOD AND APPARATUS FOR THE REMOVAL OF FLUORINE FROM A GAS STREAM

METHOD OF RECOVERING HYDROFLUORIC ACID

Method for using apparatus configured to form germanium-containing film

CHEMICAL VAPOR DEPOSITION APPARATUS

Reactive chemical containment system

APPLICATION OF DENSE PLASMAS GENERATED AT ATMOSPHERIC PRESSURE FOR TREATING GAS EFFLUENTS

Method of treating a gas system

Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type

Method of making fluoropolymer dispersion

Continuous process for converting natural gas to liquid hydrocarbons

Continuous process for converting natural gas to liquid hydrocarbons

Continuous process for converting natural gas to liquid hydrocarbons

Dry etching method of silicon compound film

APPARATUS AND METHOD FOR TREATING A GAS STREAM

Method of treating gas

Gas abatement

Microwave plasma reactor

Recovery of Hydrofluoroalkanes

Solvent compositions containing chlorofloroolefins or fluoroolefins

METHOD FOR TREATING EFFLUENTS CONTAINING FLUOROCOMPOUNDS LIKE PFC AND HFC

Compositions and methods containing fluorine substituted olefins

Method of treating a gas stream

Hazardous gas abatement method

Exhaust Gas-Processing Apparatus

Apparatus for treating a gas stream

Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same

Granular material comprising porous particles containing calcium and/or magnesium

Exhaust trap device

Ternary azeotropic-like compositions with 1,1,1,2,3,3-hexafluoro-3-methoxy-propane and trans-1,2-dichloroethylene

APPARATUS FOR DECOMPOSING SUFLUR-FLUORINE-CONTAINING COMPOUND AND METHOD THEREOF

Nitrogen oxide-reducing catalyst and method for reducing nitrogen oxide

Method of producing high purity steam

Method for catalytic treating perfluorocompound gas including particle removing unit

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

TREATMENT METHOD FOR DECOMPOSING PERFLUOROCOMPOUND, DECOMPOSING CATALYST AND TREATMENT APPARATUS

Method and apparatus for depositing chalcogens

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

Separation, purification and recovery method of SF, HFCs and PFCs

Apparatus For Treating A Gas Stream

Process for Treating Perfluorides

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

Plasma treatment system and cleaning method of the same

Chamber isolation valve RF grounding

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

Apparatus and method for separating gas

Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type

Treatment method for decomposing perfluorocompound, decomposing catalyst and treatment apparatus

Microwave plasma exciters

EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES

Exhaust assembly for a plasma processing system

Film formation apparatus and method for using the same

OIL SHALE BASED METHOD AND APPARATUS FOR EMISSION REDUCTION IN GAS STREAMS

Catalysts for treating acid and halogen gases and production methods thereof

Atmospheric Pressure Plasma Treatment of Gaseous Effluents

OIL SHALE DERIVED POLLUTANT CONTROL MATERIALS AND METHODS AND APPARATUSES FOR PRODUCING AND UTILIZING THE SAME

Method and apparatus for cleaning the waste gases from a silicon thin-film production plant

Film formation apparatus and method for using the same

CVD PROCESS FOR FORMING A THIN FILM

Decomposing catalyst for perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gas compounds and method of producing it

Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite

TREATMENT OF EFFLUENT IN THE DEPOSITION OF CARBON-DOPED SILICON

SYSTEM AND METHOD INCLUDING A PARTICLE TRAP/FILTER FOR RECIRCULATING A DILUTION GAS

Method for Generating a Cold Plasma for Sterilizing a Gaseous Medium and Device Therefor

Exhaust assembly for plasma processing system and method

Sulfur hexafluoride recycling system and method for recycling sulfur hexafluoride

Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite

PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

Use of molecular sieves for the removal of HFC-23 from fluorocarbon products

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

Method For Treating Gases By High Frequency Discharges

Methods and sytems for the destruction of perfluorinated compounds

Method and apparatus for treating gas containing flourine-containing compounds

Method and Apparatus for Treating a Fluorocompound-Containing Gas Stream

Method of recovering valuable material from exhaust gas stream of a reaction chamber

Gas abatement

Exhaust gas treatment

Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases

Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus

Exhaust trap device

EXHAUST PROCESSING METHOD, PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES

Radical generating method, etching method and apparatus for use in these methods

Chemical vapour deposition apparatus

Methods and apparatus for process abatement

Unit for separating gas

Integrated chamber cleaning system

Scrubber for processing semiconductor waste gas

Adsorption apparatus, semiconductor device manufacturing facility comprising the same, and method of recycling perfulorocompounds

Method of removing fluorinated carboxylic acid from aqueous liquid

RECOVERY OF FLUORINATED CARBOXYLIC ACID FROM ADSORBENT PARTICLES

PROCESS FOR RECOVERY OF FLUORINATED CARBOXYLIC ACID SURFACTANTS FROM EXHAUST GAS

Method of making fluoropolymer dispersion

Chamber isolation valve RF grounding

Oil shale derived pollutant control materials and methods and apparatuses for producing and utilizing the same

Method and apparatus for process monitoring and control

Perfluoride processing apparatus

Apparatus for processing perfluorocarbon

Electrochemical preferential oxidation of carbon monoxide from reformate

Plasma generating electrode, plasma generation device, and exhaust gas purifying device

Plasma generating electrode, plasma generation device, and exhaust gas purifying device

Trapping device, processing system, and method removing impurities

Solvent compositions containing chlorofluoroolefins or fluoroolefins

Process for decomposing fluorine compounds

Treatment of effluent gases

Process for treating perfluorides

Process for treating fluorine compound-containing gas

Safety, monitoring and control features for thermal abatement reactor

Process for treating fluorine compound-containing gas

Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same

Catalytic exhaust gas decomposition apparatus and exhaust gas decomposition method

Exhaust gas decomposition processor

Film formation apparatus and method of using the same

Method of recycling fluorine using an adsorption purification process

Catalyst and method for decomposition of perfluoro-compound in waste gas

Enhanced PFC waste-gas treating system

Hazardous gas abatement system using electrical heater and water scrubber

Method and apparatus for treating a waste gas containing fluorine-containing compounds

Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas

Method and apparatus for maintaining by-product volatility in deposition process

System and method for treating a flue gas stream

Hazardous gas abatement system using electrical heater and water scrubber

Method for separating gas mixtures

Perfluoride processing apparatus

Method and apparatus for treating exhaust gas

Method and apparatus for abatement of reaction products from a vacuum processing chamber

CVD process for forming a thin film

Chamber cleaning or etching gas regeneration and recycle method

Solvent compositions containing chlorofluoroolefins

Cleaning gas and cleaning method

System and method for ventilation in the fabrication of integrated circuits

Cleaning method and cleaning device

Method for removing the harmful effects of organic halogen compound gas, apparatus for removing the harmful effects of organic halogen compound gas, system for fabricating semiconductor devices, and method for fabricating semiconductor devices

PLASMA PROCESSING MATERIAL RECLAMATION AND REUSE