238453 ⎘
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor Graphoepitaxy or surface modification to enhance epitaxy
Methods for enhancing P-type doping in III-V semiconductor films
#2Base material with single-crystal silicon carbide film, method of producing single-crystal silicon carbide film, and method of producing base material with single-crystal silicon carbide film