Y10S156/914 - CPC Classification Index

ClassID:

238894 ⎘

Y10S156/914 - CPC Classification

Classification description:

Adhesive bonding and miscellaneous chemical manufacture Differential etching apparatus including particular materials of construction

METHOD FOR FABRICATING CHAMBER PARTS

Method for fabricating chamber parts

Plasma confinement rings having reduced polymer deposition characteristics

Method for backside polymer reduction in dry-etch process

Plasma confinement rings having reduced polymer deposition characteristics

Plasma processing apparatus

Plasma confinement ring assemblies having reduced polymer deposition characteristics

Method and apparatus for backside polymer reduction in dry-etch process