239797 ⎘
Special receptacle or package Semiconductor wafer boat
Sub-classes:Substrate storage container
#2Wafer storing container
#3Method and system for mask handling in high productivity chamber
#4Jet stack brazing in a diffusion furnace
#5Method and system for mask handling in high productivity chamber
#6Jet stack brazing in a diffusion furnace
#7Jet stack brazing in a diffusion furnace
#8Reducing introduction of foreign material to wafers
#9Method and system for mask handling in high productivity chamber
#10Semiconductor wafer storage case and semiconductor wafer storing method
#11Integrated circuit wafer packaging system and method
#12Front opening substrate container with bottom plate
#13Rack for supporting liquid crystal display devices
#14Thin wafer insert
#15Container, container producing method, substrate processing device, and semiconductor device producing method
#16Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
#17Integrated circuit wafer packaging system and method
#18Wafer container door with particulate collecting structure
#19Resin-molded package with cavity structure
#20High purity silicon carbide wafer boats
#21Structure for racking substrates
#22Front opening substrate container with bottom plate
#23Thin-plate supporting container
#24Substrate carrier
#25Shipper with tooth design for improved loading
#26Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces