240947 ⎘
Optical: systems and elements Micromirror
Surface micromachined structures
#2Surface micromachined structures
#3METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#4Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#5Optical scanner and image forming apparatus
#6Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#7Optical scanner and image forming apparatus
#8Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#9Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner
#10Micromirror unit and method of making the same
#11Microstructure and method of manufacturing the same
#12Optical scanner and image forming apparatus
#13MEMS device having reduced deformations
#14Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#15Micro-oscillating member, light-deflector, and image-forming apparatus
#16Projection optical system having a light blocker
#17Micromirror unit with torsion connector having nonconstant width
#18Image projector
#19Micro-oscillating member, light-deflector, and image-forming apparatus
#20Micromirror unit with torsion connector having nonconstant width
#21Method to improve scan-line alignment by adjusting the pixel rate
#22Hinge design for enhanced optical performance for a digital micro-mirror device
#23Micro-oscillating member, light-deflector, and image-forming apparatus
#24Surface deformation actuation structure
#25Tiltable-body apparatus, and method of fabricating the same
#26Magnetically actuated microelectromechanical systems actuator
#27Reflective spatial light modulator
#28Rotational micro mirror
#29Micromirror unit and method of making the same
#30Lithographic apparatus and device manufacturing method
#31Micro mirror unit and method of making the same
#32Dynamic reflector array and method of making the same
#33Yokeless hidden hinge digital micromirror device with double binge layer
#34Yokeless hidden hinge digital micromirror device with double binge layer
#35Illumination unit and image projection apparatus employing the same
#36Sunken electrode configuration for MEMs micromirror
#37Tiltable-body apparatus, and method of fabricating the same
#38Micromirror device
#39Micro-oscillating member, light-deflector, and image-forming apparatus
#40Optical microelectromechanical device and fabrication method thereof
#41Optical system having extended angular scan range
#42Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
#43Micro-mirror with rotor structure
#44Optical switching apparatus
#45Device for converting light
#46Micro-mirror and a method for fabricating the same
#47Micromirror array device and a method for making the same
#48Asymmetric spatial light modulator in a package
#49Micromirror array device and a method for making the same
#50Spatial light modulators with non-uniform pixels
#51Methods and systems for improved boundary contrast
#52Magnetically actuated microelectromechanical systems actuator
#53Micromirror devices with in-plane deformable hinge
#54Micromirror device and method for making the same
#55Hinge for micro-mirror devices
#56Drive mechanism
#57Reflective spatial light modulator
#58Lithographic apparatus and device manufacturing method
#59Electrode configuration for piano MEMs micromirror
#60Oscillating device
#61Multiple beam-directing micromirror device
#62Variable focal length lens comprising micromirrors with one degree of freedom translation
#63Electrostatic-type variable diffractive light modulator and manufacturing method thereof
#64Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system
#65Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
#66Altering temporal response of microelectromechanical elements
#67Micro mirror device with adjacently suspended spring and method for the same
#68Interlaced array of piano MEMs micromirrors
#69Micromirror device
#70Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
#71Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
#72Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
#73Micromirror unit and method of making the same
#74Deformable mirror and optical controller including the deformable mirror
#75Laser scanning unit
#76Hinge design for enhanced optical performance for a micro-mirror device
#77Micro mirror device with spring and method for the same
#78Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
#79MEMS device and method of forming MEMS device
#80Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
#81Dynamic reflector array and method of making the same
#82Dual mode liquid crystal displays (LCDs) with electromechanical reflective array
#83Methods and apparatus for selectively updating memory cell arrays
#84Sunken electrode configuration for MEMs Micromirror
#85Micro-mirror device including dielectrophoretic liquid
#86Methods and apparatus for selectively updating memory cell arrays
#87Pivoting mirror with improved magnetic drive
#88Micro mirror device with spring and method for the same
#89Oscillating micromirror with bimorph actuation
#90Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system
#91Micro mirror unit and method of making the same
#92Tiltable-body apparatus, and method of fabricating the same
#93Wavelength router with staggered input/output fibers
#94Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
#95Projection display
#96Integrated continuous spectrum spatial light modulator
#97Optical scanner with micro-optics for beam combination
#98Rear projection TV with improved micromirror array