241648 ⎘
Coating processes; Diamond-like carbon coating, i.e. DLC Utilizing plasma, e.g. corona, glow discharge, cold plasma
Method of making window unit
#2Si-O containing hydrogenated carbon film, optical device including the same, and method for manufacturing the Si-O containing hydrogenated carbon film and the optical device
#3METHOD OF PRODUCING SEMICONDUCTOR DEVICE
#4Substrate processing apparatus
#5METHOD AND APPARATUS FOR MAKING DIAMOND-LIKE CARBON FILMS
#6Method and apparatus for making diamond-like carbon films
#7Method of making window unit
#8High-speed diamond growth using a microwave plasma in pulsed mode
#9Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof