241711 ⎘
Radiation imagery chemistry: process, composition, or product thereof; Electric or magnetic imagery, e.g., xerography, electrography, magnetography, etc. Process, composition, or product Polymer in developer
Photoacid generating polymer, its preparation method, top anti-reflective coating composition comprising the same, method of forming a pattern in a semiconductor device, and semiconductor device
#2Photoresist composition and method of forming a pattern using the same