Y10S451/914 - CPC Classification Index

ClassID:

242150 ⎘

Y10S451/914 - CPC Classification

Classification description:

Abrading Supporting, positioning, or feeding work

Recent Application in this class:

20110237163

SUBSTRATE POLISHING APPARATUS AND METHOD

20090291624

Substrate polishing apparatus and method

20080085658

Substrate polishing apparatus and method

20070139642

Method for determining position of semiconductor wafer, and apparatus using the same

20070087666

Grinding jig set and grinding method

20060099887

Grinding jig set and grinding method