Multipurpose chuck

ELECTROSTATIC CHUCK

Electrostatic chuck and manufacturing method therefor

EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING CHAMBER

Electrostatic chuck and plasma processing apparatus

Apparatus for spatial and temporal control of temperature on a substrate

Methods of milling a piece of raw steel stock into a machine-ready piece of steel

Micro device electrostatic chuck

Edge ring assembly for a substrate support in a plasma processing chamber

Methods of minimizing wafer backside damage in semiconductor wafer processing

Methods of milling a piece of raw steel stock into a machine-ready piece of steel

Plasma processing apparatus

Cooling element for an electrostatic chuck assembly

PROCESS KIT COMPONENTS FOR USE WITH AN EXTENDED AND INDEPENDENT RF POWERED CATHODE SUBSTRATE FOR EXTREME EDGE TUNABILITY

Method and apparatus for de-chucking a workpiece using a swing voltage sequence

Method and apparatus for de-chucking a workpiece using a swing voltage sequence

Electrostatic chuck and plasma processing apparatus

Electrostatic chuck and wafer processing apparatus

Chuck for a high precision machine tool

Plasma processing apparatus

Plasma processing apparatus

Substrate processing apparatus

Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing

Work holder and work machining method

Wafer support device and method for removing lift pin therefrom

SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE SUPPORT ASSEMBLY HAVING METAL BONDED PROTECTIVE LAYER

Multiple tool

Methods for bonding substrates

High temperature electrostatic chuck bonding adhesive

Micro device transfer system with pivot mount

Electrostatic chuck

Drill chuck, drilling needle and drilling needle-drill chuck assembly

Fabrication system and method of using the same

Electrostatic chuck

Electrically-adjustable tool holder

Multi-zone heated ESC with independent edge zones

Cutter holding device of cutting machine

Tool gripping mechanism

Electromagnetic chuck for OLED mask chucking

High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same

Substrate processing apparatus

Electrostatic chuck

Tool connector having multiple seating positions

Method of adsorbing target object on mounting table and plasma processing apparatus

Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof

Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity

Apparatus for spatial and temporal control of temperature on a substrate

Cooling pedestal with coating of diamond-like carbon

Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing

Substrate holder assembly for controlled layer transfer

Mounting table and plasma processing apparatus

Temperature management of aluminium nitride electrostatic chuck

Mounting table and plasma processing apparatus

Micro device transfer system with pivot mount

Substrate support assembly having metal bonded protective layer

Compliant micro device transfer head array with metal electrodes

Dielectric layer for electrostatic chuck and electrostatic chuck

Methods for bonding substrates

Wafer support device

Electrostatic chuck device

Power tool adaptor and a reversible tool bit holder adaptor for a power tool adaptor

Electrostatic chuck device

Alumina sintered body, member including the same, and semiconductor manufacturing apparatus

Z-stage with dynamically driven stage mirror and chuck assembly having constraint

Right angle attachment for power tools

Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability

WAFER SUPPORTING STRUCTURE

Plate and shaft device

Chuck assembly for plasma processing

Magnetically levitated gas cell for touchless site-isolated wet processing

Method for spatial and temporal control of temperature on a substrate

Method for reduction of voltage potential spike during dechucking

Method for performing hot water seal on electrostatic chuck

Electrostatic chuck

ELECTROSTATIC CHUCK

Electrostatic chuck assembly

Connecting rod assembly for connecting a work head

Electrostatic chuck apparatus

Electrostatic chuck having a plurality of heater coils

Compound tool with screwdriver attachment

Tool connecting rod

Method for producing electrostatic chuck and electrostatic chuck

Electrostatic chuck

Electrode assembly and plasma processing apparatus

Moil guide

Substrate Assembly Carrier Using Electrostatic Force

Closing tool

METHOD FOR COATING INTERNAL MEMBER HAVING HOLES IN VACUUM PROCESSING APPARATUS AND THE INTERNAL MEMBER HAVING HOLES COATED BY USING THE COATING METHOD

Small outer diameter quick release extension rod

Electrostatic chuck electrical balancing circuit repair

Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof

Quick-release bit adapter

Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Hand-held power tool with a quick-clamping device for a working element

Thermally zoned substrate holder assembly

Adapter for a motor-driven machine tool with a rotatably driveable tool

Ceramic-metal bonded body and method of producing the same

Apparatus for spatial and temporal control of temperature on a substrate

ESC high voltage control and methods thereof

Positioning apparatus, a substrate processing apparatus and method for fixing a reference member

Assembly for delivering RF power and DC voltage to a plasma processing chamber

Matched coefficient of thermal expansion for an electrostatic chuck

Wafer mount device and manufacturing method thereof

ELECTROSTATIC CHUCK

Tool connector having multiple seating positions

Magnetic driving device

Two-sided attraction structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus

Electrostatic chuck with reduced arcing

Electrostatic chuck and vacuum processing apparatus

High precision chuck with centering function

Plasma processing apparatus and plasma processing method

Electrostatic chuck

Plasma processing system ESC high voltage control and methods thereof

Plasma processing apparatus and focus ring

Processing equipment for object to be processed

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Adjustable magnetism shelter of a cutter holder

Heat exchange pedestal with coating of diamond-like material

Compound tool with screwdriver attachment

Z-stage with dynamically driven stage mirror and chuck assembly

Removal of charge between a substrate and an electrostatic clamp

Electrostatic chuck

Method and apparatus for reduction of voltage potential spike during dechucking

DETACHABLE SCREWDRIVER ASSEMBLY

Hand-held power tool with a tool holder

Method for backside polymer reduction in dry-etch process

Pin lifting system

Electrostatic chuck power supply

Substrate temperature control fixing apparatus

High temperature electrostatic chuck bonding adhesive

SAMPLE HOLDING TOOL, SAMPLE SUCTION DEVICE USING THE SAME AND SAMPLE PROCESSING METHOD USING THE SAME

Shrinking coil with direct tool cooling

Electrostatic chuck having reduced arcing

METHOD FOR COATING INTERNAL MEMBER HAVING HOLES IN VACUUM PROCESSING APPARATUS AND THE INTERNAL MEMBER HAVING HOLES COATED BY USING THE COATING METHOD

Fluid delivery mechanism for vacuum wafer processing system

Corrosion-resistant member and method of manufacturing same

Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring

Electromagnetic clamping device

Feeding structure of electrostatic chuck, method for producing the same, and method for regenerating feeding structure of electrostatic chuck

Electrostatic chuck power supply

Electrostatic chuck electrical balancing circuit repair

Adapter for a motor-driven machine tool with a rotatably driveable machine tool

Edge rings for electrostatic chucks

Apparatus for increasing electric conductivity to a semiconductor wafer substrate when exposure to electron beam

Electrostatic chuck device

Chuck for bit

Substrate support device and plasma processing apparatus

SUBSTRATE HOLDING APPARATUS

Apparatus for etching semiconductor wafers

Semiconductor producing device and semiconductor device producing method

System for the rapid change of head on operating machines

Releasable guide and methods for using same

Electrostatic chuck and manufacturing method thereof

Electrostatic chuck and method for manufacturing the same

Electrostatic chuck

Detachable electrostatic chuck for supporting a substrate in a process chamber

High efficiency electro-static chucks for semiconductor wafer processing

Tool connecting device

Bonding structure and semiconductor device manufacturing apparatus

Bonding structure and semiconductor device manufacturing apparatus

Electrostatic chuck support assembly

Reconfigurable system that exchanges substrates using coulomb forces to optimize a parameter

Heat treatment jig and heat treatment method for silicon wafer

Cleaning method and a vacuum processing apparatus

Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate

ELECTROSTATIC CHUCK MEMBER, METHOD OF MANUFACTURING THE SAME, AND ELECTROSTATIC CHUCK DEVICE

Electrode sheet for electrostatic chuck, and electrostatic chuck

Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing

Device for automatic indexing of a golf ball

Electrostatic holding apparatus, vacuum environmental apparatus using it and joining apparatus

Polyceramic e-chuck

ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME

Plasma processing apparatus

Plasma processing system ESC high voltage control

Electrostatic chuck structure for semiconductor manufacturing apparatus

Power supply apparatus and deposition method using the power supply apparatus

Processing equipment for object to be processed

Semiconductor producing device and semiconductor device producing method

Bit mounting devices

Coupling device

Method and a device for effecting automatic centering of an annular workpiece on a rotating surface

Electrostatic chuck and method of forming

Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism

Exchanging device

Chuck

Thermally zoned substrate holder assembly

Detachable electrostatic chuck having sealing assembly

Method of tuning thermal conductivity of electrostatic chuck support assembly

Non-ferrous bit for use with a magnetic chuck

Spin head and substrate treating method using the same

Device comprising a tool holder and a removably attachable tool

Electrostatic chuck with heater and manufacturing method thereof

Electrostatic chuck

Tool retaining or connecting device

Semiconductor manufacturing device and method for manufacturing semiconductor devices

Heat-transfer structure and substrate processing apparatus

Substrate support with electrostatic chuck having dual temperature zones

Electrostatic chuck

Z-stage with dynamically driven stage mirror and chuck assembly

Centering process in chucking work and apparatus therefor

Apparatus and Method for Carrying Substrates

QUICK CONNECT/DISCONNECT CHUCKS

Etch resistant wafer processing apparatus and method for producing the same

Method of feedback control of ESC voltage using wafer voltage measurement at the bias supply output

METHOD AND APPARATUS FOR CONTROLLING TEMPERATURE OF A SUBSTRATE

Width adjustable substrate support for plasma processing

Electrostatic chuck having textured contact surface

Yttria sintered body, electrostatic chuck, and manufacturing method of yttria sintered body

Substrate processing apparatus

Mobile transportable electrostatic substrate holder

Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output

Heat treatment jig and heat treatment method for silicon wafer

Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method

Substrate holding mechanism using electrostaic chuck and method of manufacturing the same

Aluminum nitride conjugate body and method of producing the same

Semiconductor producing device and semiconductor producing method

Apparatus for spatial and temporal control of temperature on a substrate

Method for mounting object and spindle device

Substrate table, production method therefor and plasma treating device

Installation for processing a substrate

Method and apparatus for controlling temperature of a substrate

Method and apparatus for controlling temperature of a substrate

Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtod

Manufacturing method for sintered body with buried metallic member

Substrate supporting structure for semiconductor processing, and plasma processing device

Detachable electrostatic chuck for supporting a substrate in a process chamber

Method and apparatus for electrostatically maintaining substrate flatness

Contaminant reducing substrate transport and support system

Method of determining the correct average bias compensation voltage during a plasma process

Detachable electrostatic chuck

Electrostatic chuck and substrate fixing method using the same

Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof

Coating for reducing contamination of substrates during processing

Method and apparatus for backside polymer reduction in dry-etch process

Holding mechanism of object to be processed

Carbon-containing aluminum nitride sintered body, and ceramic substrate for a semiconductor producing/examining device

Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same

Electrostatic chuck module and cooling system

Substrate supporting table, method for producing same, and processing system

Dry etching method and apparatus for use in the LCD device

Composite material, wafer holding member and method for manufacturing the same

Adaptive electrostatic pin chuck

Plasma apparatus and method capable of adaptive impedance matching

Method for plasma etching a wafer

Electrostatic chuck having a low level of particle generation and method of fabricating same

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Substrate temperature control in an ALD reactor

Aluminum nitride sintered body and method of evaluation for the same