250158 ⎘
Chucks or sockets by centrifugal force
Sub-classes:Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber
#2Rotational assembly method and apparatus
#3PARALLEL MULTI WAFER AXIAL SPIN CLEAN PROCESSING USING SPIN CASSETTE INSIDE MOVABLE PROCESS CHAMBER
#4Wheel chuck with counterweighted jaws