247043 ⎘
Machine element or mechanism; Control lever and linkage systems; Multiple controlling elements for single controlled element; Power elements as controlling elements Planar surface with orthogonal movement only
Positioning system
#2Mass transfer tool manipulator assembly with remote center of compliance
#3Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions
#4Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
#5Positioning system
#6Mass transfer tool manipulator assembly with remote center of compliance
#7Machine tool
#8Oblique-driven platform structure
#9Precision transfer equipment
#10Robot for virtual reality experience that generates various 3D-waveforms of the non-fixed curved trajectory
#11Hexapod actuator device
#12Wireless charger installed with a two-dimensional moving mechanism
#13Driving apparatus and exposure apparatus and device fabrication method
#14Feeder for machine tool
#15Energy transfer via rolling elements of rolling-element bearings
#16Toggle-type positioning platform
#17Apparatus for mobilization of the body, and use of such an apparatus
#18Microelectromechanical (MEMS) manipulators for control of nanoparticle coupling interactions
#19Low-profile X-Y table
#20Method and system to control movement of a body for nano-scale manufacturing
#21Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
#22Multi-functional feed-screw-type dovetail stage
#23Multi-Segmented Spine with Integrated Actuation
#24LINEAR AXLE
#25Lithographic apparatus and device manufacturing method
#26Work transfer apparatus
#27XY table actuator
#28Three-Axis Displacement Platform
#29Multi-axis robot for high-speed applications
#30Device for swiveling objects
#31Apparatus and method for supporting a substrate at a position with high precision
#32Driving apparatus and exposure apparatus, and device fabrication method
#33Special path generating device
#34Advancing means for a multi-coordinate measurement table of a coordinate measuring device and method for controlling such an advancing means
#35Article transfer system
#36Machine tool
#37Cross-wedge motion platform
#38Stage and X-Y stage each on which to place sample, and charged-particle beam apparatus
#39Toggle-type positioning platform and toggle-type machine tool
#40Electric actuator
#41Magnetic transmission
#42Robotized device to move an object
#43Positioning device and method of initializing a positioning device
#44Machine tool
#45Emission filter X-Y array
#46Supporting unit, and moving table device and linear-motion guiding device that use the supporting unit
#47Device for high-precision generation and measurement of forces and displacements
#48Impact absorbing mechanism of walking robot
#49Alignment apparatus, exposure apparatus, and device manufacturing method
#50Single degree of freedom axis positioner
#51Alignment apparatus, exposure apparatus, and device manufacturing method
#52Method and system to control movement of a body for nano-scale manufacturing
#53Manufacturing system for microstructure
#54Two-dimensional displacement apparatus
#55X-Y spinstand platform with flexure-coupled platen
#56Positioning device and method of initializing a positioning device
#57Positioning device, especially for offset plates
#58Actuator system for nanoscale movement
#59Large-stroke air flotation type nano-positioning platform