Arne DANNENBERG

CAPACITIVE MICROSENSOR WITH COMPENSATION ELECTRODE

METHOD FOR COMPENSATION FOR AN INFLUENCE OF AN ALTERNATIVE MEDIUM AND MICROSENSOR DEVICE

CAPACITIVE PRESSURE SENSOR FOR DETECTING A PRESSURE, COMPRISING TWO PRESSURE RANGES, AND PRODUCTION METHODS

PRESSURE SENSOR WITH CONTACT DETECTION OF THE DEFLECTION OF THE MEMBRANE, PRESSURE SENSOR SYSTEM AND METHOD FOR GENERATING A PRESSURE SIGNAL

MEMS sensor as well as method for operating a mems sensor

Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate

Micromechanical pressure sensor device and corresponding manufacturing method

Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component

Method for manufacturing micromechanical diaphragm sensors

Linearized micromechanical sensor

Method for manufacturing a MEMS unit for a micromechanical pressure sensor

Micromechanical pressure sensor and method for producing said micromechanical pressure sensor

Micromechanical pressure sensor

Method for producing a stress-decoupled micromechanical pressure sensor

Sensor apparatus, production method for a sensor apparatus having at least one magnetic core and method for determining a field strength of a magnetic field in at least one spatial direction

Magnetic sensor device and manufacturing method for a magnetic sensor device

Cartridge having Electrical Sliding Contact, and Method

Method for joining a first component to a second component with the aid of laser welding

Microtechnical component for a magnetic sensor device or a magnetic actuator and production method for a microtechnical component for a magnetic sensor device or a magnetic actuator