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Inventor profile of:

Robert Eder

City:

Karlsruhe

Country:

Germany

Published Applications:

6

Last publication date:

2018-12-27

Top Assignees for applications by Robert Eder

The entities that hold a legal rights for patent applications filed by inventor Eder Robert:

Carl Zeiss SMT GmbH 5 Oberkochen, Germany
CARL ZEISS SMT AG 1 Oberkochen, Germany

Recent patent applications by Eder Robert

Robert Eder from Karlsruhe, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2018-12-27

US20180373155A1

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

#2 | 2017-08-10

US20170227853A1

Projection objective for a microlithographic projection exposure apparatus

#3 | 2016-09-29

US20160282729A1

Projection objective for a microlithographic projection exposure apparatus

#4 | 2015-02-26

US20150055109A1

Projection objective for a microlithographic projection exposure apparatus

#5 | 2012-02-09

US20120033296A1

Projection objective for a microlithographic projection exposure apparatus

#6 | 2008-05-29

US20080123069A1

Projection objective for a microlithographic projection exposure apparatus

InventorID:

1077699 ⎘