Koenigsbronn
Germany
5
2019-10-03
The entities that hold a legal rights for patent applications filed by inventor Schmittner Arno:
Arno Schmittner from Koenigsbronn, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for repairing reflective optical elements for EUV lithography
#2 | 2019-10-03Optical element, in particular for a microlithographic projection exposure apparatus
#3 | 2016-10-13Cooler for use in a device in a vacuum
#4 | 2016-03-24Hermetic weighing cell having overload protection
#5 | 2015-03-26COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
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