Peter Heiland

SYSTEM AND METHOD FOR COOLING A COMPUTER SYSTEM

SYSTEM AND METHOD FOR COOLING A PROCESSING SYSTEM

Active vibration isolation system

Combined motion sensor for use in feedback control systems for vibration isolation

Vibration isolator for use in a vacuum

Control system for active vibration isolation of a supported payload

Method and device for frequency-response correction in vibration isolation systems

Device for monitoring the relative positions of several devices

Method for adapting a vibration isolation system

Air bearing with consideration of high-frequency resonances

Combined motion control system

Environmental noise shielding apparatus

Active oscillation isolation system by means of a hysteresis-free pneumatic bearing

Magnetic filed compensation system with increased bandwidth

Active vibration isolation system with improved sensor/actuator matching

Active vibration isolation system which is more effective against seismic vibration

Active vibration isolation system with a combined position actuator

Magnetic spring device with negative stiffness

Active vibration isolation system

Method and apparatus for regulating vibration isolation systems

Supporting device for supporting vibration sensitive components

Control of an active vibration isolation system

Electrostatic gripping device

Fast swapping station for wafer transport

Method and apparatus of vibration isolation, in particular for electron beam metrology tools